JPS6232309U - - Google Patents
Info
- Publication number
- JPS6232309U JPS6232309U JP12441385U JP12441385U JPS6232309U JP S6232309 U JPS6232309 U JP S6232309U JP 12441385 U JP12441385 U JP 12441385U JP 12441385 U JP12441385 U JP 12441385U JP S6232309 U JPS6232309 U JP S6232309U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- line image
- image sensor
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12441385U JPS6232309U (ko) | 1985-08-13 | 1985-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12441385U JPS6232309U (ko) | 1985-08-13 | 1985-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232309U true JPS6232309U (ko) | 1987-02-26 |
Family
ID=31016400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12441385U Pending JPS6232309U (ko) | 1985-08-13 | 1985-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232309U (ko) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0213288U (ko) * | 1988-03-17 | 1990-01-26 | ||
| JP2008309532A (ja) * | 2007-06-13 | 2008-12-25 | Lasertec Corp | ３次元測定装置及び検査装置 |
| JP2009139333A (ja) * | 2007-12-10 | 2009-06-25 | Internatl Business Mach Corp <Ibm> | マクロ検査装置、マクロ検査方法 |
| JP2010145230A (ja) * | 2008-12-18 | 2010-07-01 | Disco Abrasive Syst Ltd | チャックテーブルに保持された被加工物の高さ位置計測装置 |
-
1985
- 1985-08-13 JP JP12441385U patent/JPS6232309U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0213288U (ko) * | 1988-03-17 | 1990-01-26 | ||
| JPH048475Y2 (ko) * | 1988-03-17 | 1992-03-03 | ||
| JP2008309532A (ja) * | 2007-06-13 | 2008-12-25 | Lasertec Corp | ３次元測定装置及び検査装置 |
| JP2009139333A (ja) * | 2007-12-10 | 2009-06-25 | Internatl Business Mach Corp <Ibm> | マクロ検査装置、マクロ検査方法 |
| JP2010145230A (ja) * | 2008-12-18 | 2010-07-01 | Disco Abrasive Syst Ltd | チャックテーブルに保持された被加工物の高さ位置計測装置 |
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