JPS6232309U - - Google Patents

Info

Publication number
JPS6232309U
JPS6232309U JP12441385U JP12441385U JPS6232309U JP S6232309 U JPS6232309 U JP S6232309U JP 12441385 U JP12441385 U JP 12441385U JP 12441385 U JP12441385 U JP 12441385U JP S6232309 U JPS6232309 U JP S6232309U
Authority
JP
Japan
Prior art keywords
measured
light
line image
image sensor
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12441385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12441385U priority Critical patent/JPS6232309U/ja
Publication of JPS6232309U publication Critical patent/JPS6232309U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP12441385U 1985-08-13 1985-08-13 Pending JPS6232309U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12441385U JPS6232309U (enrdf_load_stackoverflow) 1985-08-13 1985-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12441385U JPS6232309U (enrdf_load_stackoverflow) 1985-08-13 1985-08-13

Publications (1)

Publication Number Publication Date
JPS6232309U true JPS6232309U (enrdf_load_stackoverflow) 1987-02-26

Family

ID=31016400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12441385U Pending JPS6232309U (enrdf_load_stackoverflow) 1985-08-13 1985-08-13

Country Status (1)

Country Link
JP (1) JPS6232309U (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213288U (enrdf_load_stackoverflow) * 1988-03-17 1990-01-26
JP2008309532A (ja) * 2007-06-13 2008-12-25 Lasertec Corp ３次元測定装置及び検査装置
JP2009139333A (ja) * 2007-12-10 2009-06-25 Internatl Business Mach Corp <Ibm> マクロ検査装置、マクロ検査方法
JP2010145230A (ja) * 2008-12-18 2010-07-01 Disco Abrasive Syst Ltd チャックテーブルに保持された被加工物の高さ位置計測装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213288U (enrdf_load_stackoverflow) * 1988-03-17 1990-01-26
JP2008309532A (ja) * 2007-06-13 2008-12-25 Lasertec Corp ３次元測定装置及び検査装置
JP2009139333A (ja) * 2007-12-10 2009-06-25 Internatl Business Mach Corp <Ibm> マクロ検査装置、マクロ検査方法
JP2010145230A (ja) * 2008-12-18 2010-07-01 Disco Abrasive Syst Ltd チャックテーブルに保持された被加工物の高さ位置計測装置

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