JPS6231974U - - Google Patents
Info
- Publication number
- JPS6231974U JPS6231974U JP12127285U JP12127285U JPS6231974U JP S6231974 U JPS6231974 U JP S6231974U JP 12127285 U JP12127285 U JP 12127285U JP 12127285 U JP12127285 U JP 12127285U JP S6231974 U JPS6231974 U JP S6231974U
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- spinner
- positions
- rotation
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
図面はこの考案の一実施例を示すもので、第１
図は平面図、第２図は縦断正面図、第３図は膜厚
分布特性図である。 ２……スピナーチヤツキング治具、３ａ〜３ｄ
……長方形基板。
図は平面図、第２図は縦断正面図、第３図は膜厚
分布特性図である。 ２……スピナーチヤツキング治具、３ａ〜３ｄ
……長方形基板。
Claims (1)
- スピナーチヤツキング治具上の回転中心から外
れた位置に塗膜を作成すべき複数枚の長方形基板
をセツトしたことを特徴とする塗膜作成装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12127285U JPS6231974U (ja) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12127285U JPS6231974U (ja) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231974U true JPS6231974U (ja) | 1987-02-25 |
Family
ID=31010384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12127285U Pending JPS6231974U (ja) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231974U (ja) |
-
1985
- 1985-08-07 JP JP12127285U patent/JPS6231974U/ja active Pending
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