JPS623038U - - Google Patents

Info

Publication number

JPS623038U

JPS623038U JP9390185U JP9390185U JPS623038U JP S623038 U JPS623038 U JP S623038U JP 9390185 U JP9390185 U JP 9390185U JP 9390185 U JP9390185 U JP 9390185U JP S623038 U JPS623038 U JP S623038U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

pressure

semiconductor

thin film

sensor

Prior art date

1985-06-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 11
• 239000000758 substrate Substances 0.000 claims description 8
• 239000011521 glass Substances 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims description 4
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000004519 manufacturing process Methods 0.000 description 1