JPS6229100A - Nuclear fuser - Google Patents
Nuclear fuserInfo
- Publication number
- JPS6229100A JPS6229100A JP60167590A JP16759085A JPS6229100A JP S6229100 A JPS6229100 A JP S6229100A JP 60167590 A JP60167590 A JP 60167590A JP 16759085 A JP16759085 A JP 16759085A JP S6229100 A JPS6229100 A JP S6229100A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- nuclear fusion
- fusion device
- frequency power
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は核融合装置に係シ、特に、高周波の大電力を真
空容器内にアンテナによシ伝送してプラズマ加熱やプラ
ズマ電流駆動を行う方式に好適な核融合装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a nuclear fusion device, and in particular to a method of transmitting high frequency high power through an antenna into a vacuum container to heat plasma and drive plasma current. The present invention relates to a nuclear fusion device suitable for.
数メガヘルツから数１０ギガヘルツの高周波電力を用い
たプラズマ加熱やプラズマ電流駆動を行う核融合装置は
、通常、プラズマを内部に発生させる金属性の真空容器
と、この真空容器内に直接接近可能な真空的に接続され
た各種のボートを有している。そのボートの一部は高周
波電力を真空容器内に伝送して、アンテナを介してプラ
ズマに高周波電力を供給するために使用される。この他
に、ボートは、その先端部にプラズマを制御するための
各徨センサーを取付けた状態で使用された）、（この場
合、ボート内はプラズマを見通すために単なる真空空間
として使用される。）、プラズマ制御の目的で、ボート
内に真空状態を破らずに可変駆動可能な機器を設置する
場合が多い。Nuclear fusion devices that use high-frequency power from several megahertz to several tens of gigahertz to heat plasma and drive plasma current usually have a metallic vacuum container that generates plasma inside, and a vacuum that can be directly accessed inside this vacuum container. It has various boats connected to each other. Part of the boat is used to transmit radio frequency power into the vacuum vessel and supply radio frequency power to the plasma via an antenna. In addition, the boat was used with various sensors attached to the tip of the boat to control the plasma (in this case, the inside of the boat was simply used as a vacuum space to see through the plasma). ), for the purpose of plasma control, equipment that can be variably driven without breaking the vacuum is often installed inside the boat.
一方、ボート部は、通常、真空容器と一体化された金属
壁面を構成しておシ、真空容器内に伝送された高周波電
力は当然ボート内部にも侵入して来る。この場合、ボー
トは一種の空胴共振器として働いたシ、ボート内設置機
器が高周波の受信ア１、ンテナとして働き、ボート内に
大電力が伝送されて来る恐れがあシ、ボート内に大電力
が伝送されてくると機器に熱的破損を生ずる。特に、核
融合装置では使用する周波数幅が非常に広く、かつ、ボ
ート形状が多岐に渡るため特別な対策が必要となる。On the other hand, the boat section usually has a metal wall integrated with the vacuum vessel, and the high-frequency power transmitted into the vacuum vessel naturally enters the interior of the boat. In this case, the boat acts as a kind of cavity resonator, and the equipment installed inside the boat acts as a high-frequency receiver and antenna, and there is a risk that large amounts of power may be transmitted inside the boat. When electric power is transmitted, thermal damage occurs to the equipment. In particular, nuclear fusion devices require special measures because the frequency range used is extremely wide and the boat shapes are diverse.
第４図に従来の核融合装置の概略構成を示す。FIG. 4 shows a schematic configuration of a conventional nuclear fusion device.
線図の如く、プラズマ１は金属容器で構成された真空容
器２内に発生させられる。プラズマ１をさらに高温に加
熱したシする目的で、真空容器２の内壁側には、プラズ
マ２に向かって高周波の大電力を放射するアンテナ３が
取付けられている。このアンテナ３には、真空容器２に
取付けられた高周波ボート４を通シ、真空的にシールさ
れたフィードスル５を通った同軸上伝送−Ｗ６によシ高
周波電力が供給されている。また、プラズマエの計測用
に計測ボート７が設けられている。この計測ボート７は
、真空容器１と真空的に接続されていてプラズマ１を直
視できる様になっていると共に。As shown in the diagram, plasma 1 is generated in a vacuum container 2 made of a metal container. In order to further heat the plasma 1 to a high temperature, an antenna 3 is attached to the inner wall of the vacuum container 2 to radiate high frequency and large power toward the plasma 2. This antenna 3 is supplied with high frequency power through a high frequency boat 4 attached to the vacuum vessel 2 and through a coaxial transmission W6 through a vacuum sealed feedthrough 5. Furthermore, a measurement boat 7 is provided for measuring plasma. This measurement boat 7 is vacuum-connected to the vacuum vessel 1 so that the plasma 1 can be directly viewed.
ベローズ部８によシ計測ボート７の長さが可変される様
になっていて、その一端には計測器９が設置されている
。更に、プラズマ１を制御する制御ボー）１０には、プ
ラズマｌの境界を制御する様なりミタ１１が設けられて
いて、リミタ駆動軸１２と駆動装置１３、ベローズ８と
の組合せでリミタ１１が真空を破らずに移動可変となっ
ている。The length of the measuring boat 7 is made variable by the bellows portion 8, and a measuring instrument 9 is installed at one end of the measuring boat 7. Further, the control board 10 for controlling the plasma 1 is provided with a limiter 11 for controlling the boundary of the plasma 1, and the limiter 11 is moved to a vacuum by the combination of the limiter drive shaft 12, the drive device 13, and the bellows 8. It can be moved without breaking.
尚、計測器９や移動装置１３は架台１４によシ支持され
ている。Note that the measuring instrument 9 and the moving device 13 are supported by a pedestal 14.
ところで、上記のように構成される核融合装置特有の特
徴として、プラズマ１の状態や加熱、電流駆動、電流分
布制御等の目的によシ、アンテナ３に供給される高周波
電力の周波数は、数メガヘルツから数ギガヘルツの広範
囲に及び、がっ、真真空容器２内に放射される電力も数
メガワットに達してしまう。一方、計測ボート７や制御
ボート１０は、その寸法が多岐に渡るため、上記のよう
な真空容器２内に放射されると、放射された高周波電力
に対して計測ボート７部で空胴共振が生じたシ、制御ボ
ート９内で同軸モード的共振状態が生じてしまい、ボー
ト内に大電力が入射する他高周波高電圧が発生しベロー
ズ８が放電によシ破壊する等の問題が生ずる。尚、高周
波加熱を行い、！
プラズマを追加熱するものには、特開昭５８−２３２０
０号公報、特開昭５９−１２８７９７号公報等に開示が
ある。By the way, as a characteristic peculiar to the nuclear fusion device configured as described above, the frequency of the high-frequency power supplied to the antenna 3 varies depending on the state of the plasma 1 and the purpose of heating, current drive, current distribution control, etc. The power ranges from megahertz to several gigahertz, and the power radiated into the vacuum chamber 2 reaches several megawatts. On the other hand, since the measurement boat 7 and the control boat 10 have a wide variety of dimensions, when the radiated high-frequency power is radiated into the vacuum vessel 2 as described above, cavity resonance occurs in the measurement boat 7 due to the radiated high-frequency power. As a result, a coaxial mode resonance state occurs within the control boat 9, causing problems such as a large amount of power being input into the boat and a high frequency high voltage being generated, causing the bellows 8 to be destroyed due to discharge. In addition, high frequency heating is performed! For those that additionally heat plasma, Japanese Patent Application Laid-Open No. 58-2320
There are disclosures in Publication No. 0, Japanese Unexamined Patent Publication No. 59-128797, etc.
本発明は上述の点に鑑み成されたもので、その目的とす
るところは、高周波電力を真空容器内に入射してプラズ
マを加熱するようにしだものでるっても、その高周波電
力がボート内部へ伝播するのを防止し、機器が破損等に
至ることのないようにした核融合装置を提供するにある
。The present invention has been made in view of the above points, and its purpose is to inject high frequency power into a vacuum vessel to heat the plasma. It is an object of the present invention to provide a nuclear fusion device that prevents nuclear fusion from spreading and does not cause damage to the equipment.
本発明は内部にプラズマを発生させる真空容器内部と真
空的に接続されているボートの内側に、高周波電力の減
衰部材を設けることによシ、所期の目的を達成するよう
になしたものである。The present invention achieves the intended purpose by providing a high-frequency power attenuation member inside a boat that is vacuum-connected to the inside of a vacuum vessel in which plasma is generated. be.
以下、図面の実施例に基づいて本発明の詳細な説明する
。尚、符号は従来と同一のものは同符号を用いて説明す
る。Hereinafter, the present invention will be described in detail based on embodiments of the drawings. Note that the same reference numerals will be used to describe the same parts as in the conventional art.
第１図に本発明の一実施例を示す。線図には本発明に関
連する部分のみが図示されている。FIG. 1 shows an embodiment of the present invention. Only the parts relevant to the invention are shown in the diagram.
第１図に示す如く、本実施例ではプラズマ１に接近した
ボート１５部の真空側内壁面に、高周波電力の減衰部材
として高周波特性に優れた炭化珪素質抵抗体１６を設置
している。この炭化珪素質抵抗体１６は、ボート１５の
長さ方向に複数個に分割して配置され、更に、炭化珪素
質抵抗体１６の接するボート１５の壁面には除熱の目的
で冷却管１８が設置され、この冷却管１８に冷却媒体を
矢印の如く流通させることで強制冷却されている。As shown in FIG. 1, in this embodiment, a silicon carbide resistor 16 having excellent high frequency characteristics is installed as a high frequency power attenuation member on the vacuum side inner wall of the boat 15 that is close to the plasma 1. The silicon carbide resistor 16 is divided into a plurality of pieces in the length direction of the boat 15, and a cooling pipe 18 is provided on the wall of the boat 15 in contact with the silicon carbide resistor 16 for the purpose of removing heat. The cooling medium is forcedly cooled by flowing a cooling medium through the cooling pipe 18 as shown by the arrow.
このようにすることによシ、ボート１５内へ入射した高
周波電力は、炭化珪素質抵抗体１６で減衰させられるた
めボート１５内がたとえ高周波的に共振状態になっても
ボート１５内に発生する高周波電磁界の大きさを充分抑
えることができる。従って、高周波電力がボート１５内
に伝播することがなくなるので、ボートに取付けられて
いる各種の計測器や機器の損傷が防止される。By doing this, the high frequency power incident on the boat 15 is attenuated by the silicon carbide resistor 16, so even if the boat 15 becomes in a high frequency resonance state, it will not be generated inside the boat 15. The magnitude of the high frequency electromagnetic field can be sufficiently suppressed. Therefore, the high frequency power is not propagated into the boat 15, so that damage to various measuring instruments and equipment attached to the boat is prevented.
）″２第２図に本発明の第２の実施例を示す。線図に示
す実施例は、プラズマ１の境界を制御するためのリミタ
を駆動するリミタ駆動軸１２が設置されている制御ボー
）１０の例である。本実施例では、制御ポー）１０の内
壁に沿った部分とリミタ駆動軸１２に沿った部分に、高
周波電力吸収体１７を取付けている。この高周波電力吸
収体１７を取付けることによシ、高周波電力を、この高
周波電力吸収体１７で減衰させることができ、上述した
実施例と同様な効果が得られる。尚、高周波電力吸収体
１７での発熱は、リミタ駆動軸１２には冷却通路１９に
設け、一方制御ポート１０には冷却管１８を設け、これ
に冷却媒体を流通させ直接冷却して除熱している。)''2 A second embodiment of the present invention is shown in FIG. ) 10. In this embodiment, a high frequency power absorber 17 is attached to a portion along the inner wall of the control port 10 and a portion along the limiter drive shaft 12. By installing the high-frequency power absorber 17, the high-frequency power can be attenuated by the high-frequency power absorber 17, and the same effect as in the above-mentioned embodiment can be obtained. 12 is provided in a cooling passage 19, while the control port 10 is provided with a cooling pipe 18, through which a cooling medium is passed for direct cooling and heat removal.
第３図に本発明の第３の実施例を示す。線図に示す実施
例も第２図と同様、プラズマ１の境界を制御するための
リミタを駆動するリミタ駆動軸：１２が設置されている
制御ボート１ｏの例であシ。FIG. 3 shows a third embodiment of the present invention. Similarly to FIG. 2, the embodiment shown in the diagram is also an example of a control boat 1o in which a limiter drive shaft 12 for driving a limiter for controlling the boundary of the plasma 1 is installed.
制御ボート１０の内側とリミタ駆動軸１２の表面に炭化
珪素質抵抗体１６を設けて上述の実施例とン同様な効果
を得せようとしたものである。本実施例においては、各
々に設けられている炭化珪素質抵抗体１６は、長手方向
に複数に分割されて設置されており、これによる発熱は
リミタ駆動軸１２には冷却通路１９を設け、一方、制御
ボート１０には冷却管１８を設け、これに冷却媒体を流
通させて除熱している。A silicon carbide resistor 16 is provided inside the control boat 10 and on the surface of the limiter drive shaft 12 in an attempt to obtain the same effect as in the above embodiment. In this embodiment, the silicon carbide resistor 16 provided in each is divided into a plurality of parts in the longitudinal direction and the heat generated by this is removed by providing a cooling passage 19 in the limiter drive shaft 12, The control boat 10 is provided with a cooling pipe 18, through which a cooling medium is passed to remove heat.
尚、上述した実施例で用いられている炭化珪素質抵抗体
１６は、フェライトの如き強磁性体で高周波損失の大き
いものでもよい。また、ボート上の制約が無ければ、真
空容器１とボート１５との取合部にボート面全体をおお
う導電性金鋼を張シめぐらすのも効果があるし、ボート
１５のサイド側に特別なサイドボートを設け、この内に
電波吸収体を収納し、ボート内への出入調整によシミ力
を吸収させるのも良い。いずれにしても、炭化珪素質抵
抗体１Ｇや高周波電力吸収体１７は、真空容器１の内壁
面側に取付けられていなくてはならないし、真空容器１
内ね清浄な真空を得るためにはボート１５も通常２５０
Ｃ程度には加熱されるので、耐熱特性に優れたものでな
ければならない他、真空的にも優れた特性を有している
必要がある。The silicon carbide resistor 16 used in the above-described embodiments may be a ferromagnetic material such as ferrite that has a large high frequency loss. In addition, if there are no restrictions on the boat, it is effective to cover the entire surface of the boat with conductive gold steel at the joint between the vacuum vessel 1 and the boat 15, or to install a special material on the side of the boat 15. It is also a good idea to provide a side boat, store a radio wave absorber in it, and absorb the stain force by adjusting entry and exit from the boat. In any case, the silicon carbide resistor 1G and the high-frequency power absorber 17 must be attached to the inner wall side of the vacuum container 1, and the
Boat 15 is usually 250 mm in order to obtain a clean vacuum inside.
Since it is heated to about C, it must not only have excellent heat resistance properties but also excellent vacuum properties.
以上説明した本発明の核融合装置によれば、内部にプラ
ズマを発生させる真空容器内部と真空的に接続されてい
るボートの内側に、高周波電力の減衰部材を設けたもの
であるから、真空容器内のプラズマを加熱しようと入射
された高周波電力がボート内に侵入しても、前記減衰部
材によシ減衰されるので、ボート内に生ずる電磁界強度
が小さく抑えられ機器の損傷を防止でき、此８種核融合
装置には非常に有効である。According to the nuclear fusion device of the present invention described above, a high-frequency power attenuating member is provided inside the boat that is vacuum-connected to the inside of the vacuum vessel in which plasma is generated. Even if high-frequency power enters the boat to heat the plasma inside the boat, it is attenuated by the attenuation member, so the electromagnetic field strength generated inside the boat can be kept low and damage to equipment can be prevented. It is very effective for this 8-type nuclear fusion device.
第１図は本発明の一実施例を示す真空容器とポートとの
接続部分の断面図、第２図は本発明の第２の実施例を示
す真空容器と制御ポートとの接続部分の断面図、第３図
は本発明の第３の実施例を示す制御ボートの部分断面図
、第４図は従来の核融合装置の概略構成を示す断面図で
ある。
ｌ・・−プラズマ、２・・・真空容器、３・・・アンテ
ナ、４・・・高周波ポート、５・・・フィードスル、６
・・・同軸上伝送管、７・・・計測ポート、９・・・計
測器、１０・・・制御ボート、１１・・・リミタ、１２
・・・リミタ駆動軸、１５・・・ポート、１６・・・炭
化珪素質抵抗体、１７・・・高周波電力吸収体、１８・
・・冷却管、１９・・・冷却通路。FIG. 1 is a cross-sectional view of a connecting portion between a vacuum container and a port showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view of a connecting portion between a vacuum container and a control port showing a second embodiment of the present invention. 3 is a partial sectional view of a control boat showing a third embodiment of the present invention, and FIG. 4 is a sectional view showing a schematic configuration of a conventional nuclear fusion device. l...-Plasma, 2... Vacuum vessel, 3... Antenna, 4... High frequency port, 5... Feed through, 6
... Coaxial transmission tube, 7... Measurement port, 9... Measuring instrument, 10... Control boat, 11... Limiter, 12
...Limiter drive shaft, 15...Port, 16...Silicon carbide resistor, 17...High frequency power absorber, 18.
...Cooling pipe, 19...Cooling passage.
Claims (1)
器内部と真空的に接続されているボートとを備え、前記
真空容器内に高周波電力を入射して成る核融合装置にお
いて、前記ボートの内側に、前記高周波電力の減衰部材
を設けたことを特徴とする核融合装置。 ２、前記高周波電力の減衰部材は、炭化珪素質抵抗体で
形成されていることを特徴とする特許請求の範囲第１項
記載の核融合装置。 ３、前記炭化珪素質抵抗体はボートの長手方向に複数個
に分割されて列置されていることを特徴とする特許請求
の範囲第２項記載の核融合装置。 ４、前記炭化珪素質抵抗体近傍のボートに冷却管を設け
、該冷却管に冷却媒体を流通させることを特徴とする特
許請求の範囲第２項、又は第３項記載の核融合装置。 ５、前記ボート内部には、前記真空容器内のプラズマの
境界を制御するためのリミタを駆動するリミタ駆動軸が
設置されており、該リミタ駆動軸の表面にも炭化珪素質
抵抗体が設けられていることを特徴とする特許請求の範
囲第２項、第３項、又は第４項記載の核融合装置。 ６、前記リミタ駆動軸表面に設けられている炭化珪素質
抵抗体は、該リミタ駆動軸の軸方向に複数個に分割され
ていることを特徴とする特許請求の範囲第５項記載の核
融合装置。 ７、前記高周波電力の減衰部材は、高周波電力吸収体で
形成されていることを特徴とする特許請求の範囲第１項
記載の核融合装置。 ８、前記ボート内部には、前記真空容器内のプラズマの
境界を制御するためのリミタを駆動するリミタ駆動軸が
設置されており、該リミタ駆動軸の表面にも高周波電力
吸収体が設けられていることを特徴とする特許請求の範
囲第７項記載の核融合装置。 ９、前記ボートの外側に冷却管を設け、該冷却管に冷却
媒体を流通させることを特徴とする特許請求の範囲第７
項、又は第８項記載の核融合装置。[Claims] 1. A nuclear fusion device comprising a vacuum vessel in which plasma is generated and a boat vacuum-connected to the inside of the vacuum vessel, and in which high-frequency power is input into the vacuum vessel. 2. A nuclear fusion device according to claim 1, further comprising an attenuation member for the high-frequency power provided inside the boat. 2. The nuclear fusion device according to claim 1, wherein the high-frequency power attenuation member is formed of a silicon carbide resistor. 3. The nuclear fusion device according to claim 2, wherein the silicon carbide resistor is divided into a plurality of pieces and arranged in a row in the longitudinal direction of the boat. 4. The nuclear fusion device according to claim 2 or 3, wherein a cooling pipe is provided in the boat near the silicon carbide resistor, and a cooling medium is allowed to flow through the cooling pipe. 5. A limiter drive shaft for driving a limiter for controlling the plasma boundary in the vacuum vessel is installed inside the boat, and a silicon carbide resistor is also provided on the surface of the limiter drive shaft. A nuclear fusion device according to claim 2, 3, or 4, characterized in that: 6. The nuclear fusion device according to claim 5, wherein the silicon carbide resistor provided on the surface of the limiter drive shaft is divided into a plurality of pieces in the axial direction of the limiter drive shaft. Device. 7. The nuclear fusion device according to claim 1, wherein the high-frequency power attenuation member is formed of a high-frequency power absorber. 8. A limiter drive shaft for driving a limiter for controlling the plasma boundary in the vacuum vessel is installed inside the boat, and a high frequency power absorber is also provided on the surface of the limiter drive shaft. A nuclear fusion device according to claim 7, characterized in that: 9. Claim 7, characterized in that a cooling pipe is provided outside the boat, and a cooling medium is allowed to flow through the cooling pipe.
or the nuclear fusion device according to item 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60167590A JPH0750177B2 (en) | 1985-07-31 | 1985-07-31 | Nuclear fusion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60167590A JPH0750177B2 (en) | 1985-07-31 | 1985-07-31 | Nuclear fusion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6229100A true JPS6229100A (en) | 1987-02-07 |
| JPH0750177B2 JPH0750177B2 (en) | 1995-05-31 |
Family
ID=15852576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60167590A Expired - Lifetime JPH0750177B2 (en) | 1985-07-31 | 1985-07-31 | Nuclear fusion device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750177B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005228727A (en) * | 2003-04-24 | 2005-08-25 | Tokyo Electron Ltd | Plasma monitoring method, plasma monitoring device, and plasma treatment device |
| JP2009163911A (en) * | 2007-12-28 | 2009-07-23 | Hitachi High-Technologies Corp | Plasma treatment device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927596A (en) * | 1982-08-04 | 1984-02-14 | 日本特殊陶業株式会社 | Microwave absorber |
| JPS5934701A (en) * | 1982-08-23 | 1984-02-25 | Tdk Corp | Radio wave absorber |
| JPS59209300A (en) * | 1983-05-13 | 1984-11-27 | 株式会社東芝 | Device for interrupting plasma introduced from nuclear fusion reactor to measuring device |
-
1985
- 1985-07-31 JP JP60167590A patent/JPH0750177B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927596A (en) * | 1982-08-04 | 1984-02-14 | 日本特殊陶業株式会社 | Microwave absorber |
| JPS5934701A (en) * | 1982-08-23 | 1984-02-25 | Tdk Corp | Radio wave absorber |
| JPS59209300A (en) * | 1983-05-13 | 1984-11-27 | 株式会社東芝 | Device for interrupting plasma introduced from nuclear fusion reactor to measuring device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005228727A (en) * | 2003-04-24 | 2005-08-25 | Tokyo Electron Ltd | Plasma monitoring method, plasma monitoring device, and plasma treatment device |
| JP2009163911A (en) * | 2007-12-28 | 2009-07-23 | Hitachi High-Technologies Corp | Plasma treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0750177B2 (en) | 1995-05-31 |
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