JPS6229097A - Microwave discharge light source unit - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a microwave discharge light source device with a new structure, and more specifically, the present invention relates to a microwave discharge light source device with a new structure, and more specifically, to a light emitting device as described below, which is composed of an electrodeless lamp, a microwave cavity resonator, a light reflection plate, etc. The present invention relates to an electrodeless microwave discharge light source device having a structure in which a portion can be freely inserted into and removed from a main body of the device, and as a result, operations such as lamp replacement can be performed extremely easily and safely.

[Prior Art] Electrodeless microwave discharge light source devices are widely used as light sources for resin curing, printing, and photolithography. In many of these devices, the light reflector itself doubles as a microwave cavity resonator, which means that a microwave feed port is drilled into the side wall of the light reflector and the microwave is fed through a waveguide. The structural feature is that the magnetron is connected.

However, in a device with this structure, a power feed port is drilled in a part of the side surface of the light reflection plate, and the waveguide is directly connected to this, so it can be adjusted depending on the purpose of light distribution. It is difficult to replace the light reflecting plate at any time.

For this reason, a device has been developed in which a power feeding port is provided at the bottom of the light reflecting plate, which is a blind spot for the light reflecting function, and microwaves are introduced from this hole. In the case of such a device.

Since the light reflecting plate with various light reflecting surface shapes can be replaced and attached at any time depending on the purpose of light distribution, it is useful because its uses can be expanded.

An example of this device will be explained based on FIG. 3, which is a schematic diagram. In FIG. 3, 1 is a magnetron from which predetermined microwaves are oscillated. Microwave is arrow ilP l
The body and limbs move inside the waveguide 2 as shown in the figure. The terminal end of the waveguide 2 is open, and this opening 2a is connected to the light emitting section 3.

The light emitting unit 3 includes a light reflecting plate 3a having a hole 3al of a predetermined shape in the bottom thereof, an electrodeless lamp 3b installed astride the hole 3al, and an erected structure surrounding the electrodeless lamp 3b. For example, a microwave cavity resonator 3C consisting of a metal net cage
It is composed of.

The light emitting part 3 and the opening 2a of the waveguide 2 are connected to each other by screws 4, for example, in order to prevent leakage of microwaves.
It is tightly fixed with a.

Further, the electrodeless lamp 3b and the cavity resonator 3c are also fixed with many screws 4b and 4c.

Here, the hole 3al functions as a power supply port, and the microwave propagated through the waveguide is introduced into the cavity resonator 3C from this power supply port 3a and is confined there, resulting in a strong microwave electromagnetic field. is formed to induce discharge in the electrodeless lamp 3b, causing it to emit light.

Note that 5 is a cooling fan, and the light emitting part 3 is heated by the heat rays generated when the electrodeless lamp 3b emits light.
This is an element for feeding cooling air from the power supply port 3a1 as indicated by the arrow P2 for cooling.

[Problems to be Solved by the Invention] In the device exemplified above, unlike the conventional device, the waveguide 2 is not connected directly to the side wall of the light reflecting plate 3a but to the bottom thereof, so that the light distribution is The light reflecting plate 3a can be replaced as appropriate depending on the purpose. That is, the screws 4a etc. can be removed and a new light reflecting plate can be fixed again by screwing into the opening of the waveguide 2.

However, since these devices are usually installed all at once at a certain location, when replacing the light emitting section, the entire device must be removed from the location and dismantled. .

The actual work is extremely complicated, as it requires operations such as disassembling the light emitting part.

In particular, the light reflector, electrodeless lamp, cavity resonator, etc. are each fixed with a large number of screws, so if the structure described above makes it difficult to disassemble the entire device, for example, when replacing the lamp, the work will be difficult. It has to be complicated.

The present invention is a structure that solves the above problem, and has a structure in which the light emitting section 3
You can remove them all at once from the device, or do it all at once!
7? It is possible to remove only the light emitting section 3 from the main body of the device and replace each of its elements without removing the entire headpiece from its installation location. The purpose of the present invention is to provide an electrodeless microwave discharge light source device.

[Summary of the Invention] The electrodeless microwave discharge light source device of the present invention comprises: a magnetron that oscillates microwaves; an electrodeless lamp; a microwave cavity resonator surrounding the electrodeless lamp; and an electrodeless lamp and microwave cavity resonator. It consists of a light reflecting plate that contains both and has one open.

and a light emitting part with a power feeding port drilled in the bottom; a waveguide connecting the magnetron to the power feeding port of the light emitting part; and a cooling fan that sends cooling air from the power feeding port to the light emitting part. A microwave discharge light source device comprising one light emitting part and one light emitting part.
The device is characterized in that the device is mounted on two support plates at once, and the support plates are removably fitted into support plate holding grooves provided on both sides of the power feeding port.

[Specific explanation] The apparatus of the present invention will be explained in more detail below with reference to the drawings.

Fig. 1 is a front view conceptually showing the coupling relationship between each element of the device of the present invention, and Fig. 2 shows a part of the light emitting unit with the light reflecting plate removed from the support plate holding groove. FIG.

In the diagram 1. 2. 3.3a□ and 5 respectively represent a magnetron, a light emitting part of the waveguide 2, a power feeder, and a cooling fan, as in the case of FIG.

In the device of the present invention, the light reflecting plate 3a constituting the light emitting part
, the electrodeless lamp 3b and the microwave cavity resonator 3c are all mounted on one support plate 7, and since this support plate 7 is detachable from the device body, the light emitting part is separated from the device body. It becomes possible.

A power supply port 3al of a predetermined shape is drilled in approximately the center of the support plate 7, and an installation base 6, which has a hole approximately the same shape as the power supply port 3aI, is fixed by screwing, for example. has been done.

On this installation stand 6, an electrodeless lamp 3b is connected to this power supply port 3a.
1, and is fixed vertically with screws 4b, and further surrounds this electrodeless lamp 3b to form a cavity resonator (wire net cage).
3c is erected and fixed by screws 4C. and,
A light reflecting plate 3a is also fixed to the outer edge of the installation stand 6 with screws 4a.

In this way, the support plate 1 on which the light emitting section 3 is mounted is removably fitted into the opening 2a of the waveguide 2.

A pair of support plate holding grooves 8a and 8b are provided on both sides of the opening 2a, which is also a power supply port, and the edges of the support plate 7 are engaged in these grooves so that the support plate 7 can be pushed in the direction of the arrow P and pulled out. The support plate 7 is attached in this state. 8C is the holding groove 8a, 8b
When the support plate 7 is attached to the holding grooves 8a and 8b, the spring means attached to the top elastically presses the support plate 7 with its edges, thereby pushing the lower surface of the support plate 7 against the main body of the device. It has the function of preventing microwave leakage by tightly adhering to the top surface.

Note that if a hanging plate is provided at the end of the support plate 7 and a handle (none of which is shown) is attached to this hanging plate, the support plate -
This is useful because it allows the work to be carried out smoothly when the light emitting section is fitted into and removed from the main body of the device.

[Effects of the Invention] As is clear from the above description, in the device of the present invention, by pushing the support plate into or pulling it out from the device main body, the light emitting portions disposed all over the support plate can be It can be attached or detached. Therefore, even if it becomes necessary to replace elements of the light emitting part, there is no need to remove the entire device from its installation site and carry out complicated disassembly work as in the past. Instead, it is possible to easily pull out only the light emitting part from the main body of the device, perform the replacement work, and then attach the support plate to the light emitting part again in the holding groove.In this way, the device of the present invention can easily remove only the light emitting part from the main body of the device. It has a new structure that can be inserted and removed freely, and its practical value is extremely high.

[Brief explanation of the drawing]

Figure 1 is a conceptual diagram showing the connection relationship between each element of the device of the present invention, and Figure 2 is a diagram with the light reflecting plate removed.
, 11, -1, -MU L+r-IML&1m+-+4, and FIG. 3 is a conceptual diagram of the conventional device. 1-Magnetro Otsu 2-Waveguide. 3-light emitting section, 3a-light reflecting plate. 3b-electrodeless lamp, 3a□-power supply port. 3cm microwave cavity resonator. 4a, 4b, 4cm screws, 5-Cooling fan. B - Installation stand, 7 - Support plate.

Claims (1)

[Claims] 1. A magnetron that oscillates microwaves; an electrodeless lamp, a microwave cavity resonator surrounding the electrodeless lamp, and a light that encloses both the electrodeless lamp and the microwave cavity, one of which is open. A light-emitting section consisting of a reflector and a power supply port provided at the bottom; a waveguide connecting the magnetron to the power supply port of the light-emitting section; and a cooling air inserted into the light-emitting section from the power supply port. A microwave discharge light source device comprising: a cooling fan; the light emitting part is mounted all at once on one support plate; and the support plate is a support plate holder disposed on both sides of a power supply port. A microwave discharge light source device characterized in that it is detachably fitted into a groove. 2. The microwave discharge light source device according to claim 1, wherein the support plate holding groove is provided with spring means for pressing the edge of the support plate with which it engages.