JPS6229093U - - Google Patents

Info

Publication number
JPS6229093U
JPS6229093U JP11986485U JP11986485U JPS6229093U JP S6229093 U JPS6229093 U JP S6229093U JP 11986485 U JP11986485 U JP 11986485U JP 11986485 U JP11986485 U JP 11986485U JP S6229093 U JPS6229093 U JP S6229093U
Authority
JP
Japan
Prior art keywords
processing table
conveyor belt
entrances
shutter
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11986485U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11986485U priority Critical patent/JPS6229093U/ja
Publication of JPS6229093U publication Critical patent/JPS6229093U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図と第２図は本考案第１実施例の断面図、
第３図は同じく要部の側面図、第４図は受け渡し
の説明図、第５図と第６図は第２実施例の断面図
である。 １……ケーシング、２……処理室、２２……出
入口、３……処理台、３１……溝、４……シヤツ
ター、４３，４４……ローラー、５……ランプ、
６……搬送ベルト、７ａ……駆動プーリ、７ｂ…
…従動プーリ、７ｃ……テンシヨンプーリ、Ｗ…
…被処理物（半導体ウエハー）、Ｓ１……搬入ス
テージ、Ｓ２……搬出ステージ。 Figures 1 and 2 are cross-sectional views of the first embodiment of the present invention;
FIG. 3 is a side view of the main parts, FIG. 4 is an explanatory view of delivery, and FIGS. 5 and 6 are sectional views of the second embodiment. 1... Casing, 2... Processing chamber, 22... Entrance/exit, 3... Processing table, 31... Groove, 4... Shutter, 43, 44... Roller, 5... Lamp,
6... Conveyor belt, 7a... Drive pulley, 7b...
...Driven pulley, 7c...Tension pulley, W...
...Object to be processed (semiconductor wafer), S1 ...Carry-in stage, S2 ...Carry-out stage.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 上面に搬送ベルトを受容する溝が設けられ、板
状の被処理物が載置される処理台と、この処理台
に向けて光を放射するランプと、この処理台を取
り囲み、両側に出入口を有する処理室と、上下動
して該出入口を開閉するシヤツターと、両出入口
の外側に配置される駆動、従動両プーリおよびこ
れらの下方に配置されるテンシヨンプーリの少な
くとも３個のプーリに巻掛けて張設され、両出入
口を貫通して平行に走行する少なくとも２本以上
のワイヤー状エンドレス搬送ベルトとを備え、シ
ヤツターの上下動に連動して、搬送ベルトをテン
シヨンプーリの付勢力に抗して押し下げるか或い
は引き上げ、搬送ベルトの処理台上面に対するレ
ベルを変位させて搬送ベルトと処理台との間で被
処理物の受け渡しを行うことを特徴とする光処理
炉。 A processing table is provided with a groove on the top surface to receive a conveyor belt, on which a plate-shaped workpiece is placed, a lamp emits light toward the processing table, and an entrance/exit surrounds the processing table, with entrances and exits on both sides. a shutter that moves up and down to open and close the entrance/exit, a drive pulley and a driven pulley located outside both entrances, and a tension pulley located below these pulleys. At least two or more wire-shaped endless conveyor belts are tensioned and run in parallel through both entrances and exits, and the conveyor belt resists the biasing force of the tension pulley in conjunction with the vertical movement of the shutter. An optical processing furnace characterized in that a workpiece is transferred between the conveyor belt and the processing table by pushing it down or pulling it up and displacing the level of the conveyor belt with respect to the upper surface of the processing table.
JP11986485U 1985-08-06 1985-08-06 Pending JPS6229093U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11986485U JPS6229093U (en) 1985-08-06 1985-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11986485U JPS6229093U (en) 1985-08-06 1985-08-06

Publications (1)

Publication Number Publication Date
JPS6229093U true JPS6229093U (en) 1987-02-21

Family

ID=31007639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11986485U Pending JPS6229093U (en) 1985-08-06 1985-08-06

Country Status (1)

Country Link
JP (1) JPS6229093U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015035472A (en) * 2013-08-08 2015-02-19 株式会社Ｓｃｒｅｅｎホールディングス Light irradiation device and light irradiation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015035472A (en) * 2013-08-08 2015-02-19 株式会社Ｓｃｒｅｅｎホールディングス Light irradiation device and light irradiation method

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