JPS6228873U - - Google Patents
Info
- Publication number
- JPS6228873U JPS6228873U JP11874685U JP11874685U JPS6228873U JP S6228873 U JPS6228873 U JP S6228873U JP 11874685 U JP11874685 U JP 11874685U JP 11874685 U JP11874685 U JP 11874685U JP S6228873 U JPS6228873 U JP S6228873U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- chamber
- gate valves
- laser beam
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874685U JPS6228873U (show.php) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874685U JPS6228873U (show.php) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228873U true JPS6228873U (show.php) | 1987-02-21 |
Family
ID=31005492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11874685U Pending JPS6228873U (show.php) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228873U (show.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6480245A (en) * | 1987-09-24 | 1989-03-27 | Oshita Sangyo Kk | Insecticidal tape device |
-
1985
- 1985-07-31 JP JP11874685U patent/JPS6228873U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6480245A (en) * | 1987-09-24 | 1989-03-27 | Oshita Sangyo Kk | Insecticidal tape device |
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