JPS62287065A - Heating element for vacuum deposition and its production - Google Patents
Heating element for vacuum deposition and its productionInfo
- Publication number
- JPS62287065A JPS62287065A JP12955386A JP12955386A JPS62287065A JP S62287065 A JPS62287065 A JP S62287065A JP 12955386 A JP12955386 A JP 12955386A JP 12955386 A JP12955386 A JP 12955386A JP S62287065 A JPS62287065 A JP S62287065A
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- shape
- metal
- vacuum deposition
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 19
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 7
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- 239000000843 powder Substances 0.000 claims abstract description 19
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 9
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 8
- 239000011230 binding agent Substances 0.000 claims abstract description 7
- 229920000609 methyl cellulose Polymers 0.000 claims abstract description 4
- 239000001923 methylcellulose Substances 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910001868 water Inorganic materials 0.000 claims abstract description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 235000010981 methylcellulose Nutrition 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- 238000001125 extrusion Methods 0.000 abstract description 9
- 238000005245 sintering Methods 0.000 abstract description 4
- 238000000748 compression moulding Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 238000007738 vacuum evaporation Methods 0.000 description 5
- 239000011162 core material Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
（産業上の利用分野）
本発明は、真空蒸着用フィラメント、ポートといった真
空蒸着用発熱体及びその製造方法に関するものである。Detailed Description of the Invention 3. Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a heating element for vacuum deposition, such as a filament for vacuum deposition and a port, and a method for manufacturing the same.
（従来の技術）
従来、真空蒸情用フイラメンＩ・とじては、タングステ
ン線、モリブデン線等の金属線若しくはかかる金属線を
複数本撚り合せたものを所定のフィラメント形状に成形
したものが知られており、また真空蒸着用ポートとして
は、タングステン板。(Prior Art) Conventionally, filamen I for vacuum evaporation have been known in which metal wires such as tungsten wires and molybdenum wires, or a plurality of such metal wires twisted together, are formed into a predetermined filament shape. It also has a tungsten plate as a port for vacuum deposition.
モリブデン板等の金属板を所定のボート形状に成形した
ものが知られている。It is known that a metal plate such as a molybdenum plate is formed into a predetermined boat shape.
（発明が解決しようとする問題点）
ところが、このような発熱体は金属線若しくは金属板か
らなるもので比表面積が小さく、特性に改善の余地があ
る。金属線を撚り合せたフィラメントは比表面積を大き
くしたものであるが、複数本の金属線を必要とするため
コスト的に問題があり、比表面積増大の改善策としては
不合理である。(Problems to be Solved by the Invention) However, such heating elements are made of metal wires or metal plates and have a small specific surface area, so there is room for improvement in characteristics. A filament made by twisting metal wires has a large specific surface area, but since it requires a plurality of metal wires, it poses a cost problem and is unreasonable as an improvement measure for increasing the specific surface area.
しかも、これらの発熱体は、通常タングステン。Moreover, these heating elements are usually tungsten.
モリブデン等の難加工性の金属からなるものであるから
、４３状若しくは板状の成形素材の製造並びに板状素材
の成形が剛めて困難であり、製造上も問題がある。Since it is made of a difficult-to-process metal such as molybdenum, it is difficult to manufacture a 43-shaped or plate-shaped molding material and to mold a plate-shaped material, and there are also problems in manufacturing.
本発明は、このような従来のものにおける問題を解決し
、比表面積が大きく特性の向」−を期待できる真空蒸着
用発熱体及びこれを容易に且つ安価に製造できる方法を
提供することを目的とするものである。The purpose of the present invention is to solve the problems of the conventional ones and to provide a heating element for vacuum evaporation that has a large specific surface area and can be expected to have improved properties, and a method for manufacturing the same easily and inexpensively. That is.
（問題点を解決するための手段）
本発明の真空蒸着用発熱体は、表面に微視的凹凸を有す
る金属焼結体からなるものであり、本発明の真空蒸着用
発熱体の製造方法は、タングステン、モリブデン等の金
属粉と水、メチルセルローズ等の粘結剤との混練物を押
出し成形又は圧縮成形し、この圧粉成形物を所定の発熱
体形状に整形した上、この整形物を乾燥後焼結するよう
にしたものである。(Means for Solving the Problems) The heating element for vacuum evaporation of the present invention is made of a metal sintered body having microscopic irregularities on the surface, and the method for manufacturing the heating element for vacuum evaporation of the present invention is A mixture of metal powder such as tungsten or molybdenum and water and a binder such as methylcellulose is extruded or compression molded, and this compacted product is shaped into a predetermined heating element shape. It is designed to be sintered after drying.
（実施例）
以下、本発明の実施例を第１図〜第３図について説明す
る。(Example) Hereinafter, an example of the present invention will be described with reference to FIGS. 1 to 3.
まず、タングステン、モリブデン、タンタル等の金属粉
を適宜の粘結剤と混練して、第１図に示す如く、この混
線物ｌを常温下において押出し成形機２により押出し成
形し、線状、板状等の圧粉成形体３を得る。この押出し
成形は、混練物１の押出しであるから極めて容易に行い
つる。粘結剤としでは水、メチルセルローズ等通常扮体
冶金に用いられるものを使用すればよく、要はある程度
粘性があって圧粉成形体３の形状維持を行いうるもので
あればよい。圧粉成形体３の形状は、最終品がフィラメ
ントであるかボートであるかによって異なる。例えばフ
ィラメントの場合には線状にボートの場合には板状に成
形しておく。First, metal powder such as tungsten, molybdenum, tantalum, etc. is kneaded with an appropriate binder, and as shown in FIG. A powder compact 3 having a shape or the like is obtained. This extrusion molding is extremely easy to perform since it involves extruding the kneaded product 1. As the binder, it is sufficient to use water, methyl cellulose, or other materials commonly used in body metallurgy, as long as it has a certain degree of viscosity and can maintain the shape of the powder compact 3. The shape of the powder compact 3 differs depending on whether the final product is a filament or a boat. For example, in the case of a filament, it is formed into a linear shape, and in the case of a boat, it is formed into a plate shape.
圧粉成形体３の断面形状は、ダイス２ａの形状によって
若しくはマンドレルを用いることによって自由に変更で
きる。例えば、フィラメント用の圧粉成形体３として中
空軸状のものを得るようにしてもよい。また、板状の圧
粉成形体３を得る場合には、押出し成形によらず金型に
よる圧縮成形によってもよい。The cross-sectional shape of the powder compact 3 can be freely changed by changing the shape of the die 2a or by using a mandrel. For example, a hollow shaft-shaped powder compact 3 for filament may be obtained. Moreover, when obtaining the plate-shaped powder compact 3, compression molding using a mold may be used instead of extrusion molding.
次に圧粉成形体３を、所望のフィラメント形状若しくは
ボート形状に整形する。この整形は、圧粉成形体３が混
練物を単に押出し成形若しくは圧、焔成形したものであ
ることから、容易に行うことができる。Next, the powder compact 3 is shaped into a desired filament shape or boat shape. This shaping can be easily carried out because the powder compact 3 is simply extrusion molding, pressure molding, or flame molding of a kneaded material.
そして、かくして得られた整形物を真空乾燥した上で、
適当温度で真空焼結する。Then, after vacuum drying the shaped article thus obtained,
Vacuum sintering at an appropriate temperature.
このような工程を経ることによって、第２図若しくは第
３図に例示する如きフィラメント４若しくはボート５が
得られる。Through these steps, a filament 4 or boat 5 as illustrated in FIG. 2 or 3 can be obtained.
かかるフィラメント４．ボート５はポーラスな焼結体と
なっており、その表面には微視的凹凸が形成されていて
、比表面積の大きいものとなっている。Such a filament4. The boat 5 is a porous sintered body with microscopic irregularities formed on its surface and has a large specific surface area.
いこととも相俟って、焼結体の表面には微視的な凹凸が
形成されるのである。Coupled with this, microscopic irregularities are formed on the surface of the sintered body.
なお、圧粉成形体３には金属粉と同質の芯材を埋設して
おくようにしてもよい。例えば、押出し成形機の、押出
し口形状を工夫して、線状芯材を混練物１の押出し経路
上に導出させ、押出された圧粉成形体３に芯材が埋入さ
れるようにすればよい。Note that a core material of the same quality as the metal powder may be embedded in the powder compact 3. For example, by devising the shape of the extrusion port of the extrusion molding machine, the linear core material can be guided out onto the extrusion path of the kneaded material 1, so that the core material is embedded in the extruded powder compact 3. Bye.
かくすれば、芯材は焼結時に圧粉成形体３と結合一体化
され、焼結体の機械的強度、特にフィラメント、ボート
の端子部、支持固定部等の強度を向上させることができ
る。また、焼結後、焼結体の表面に導電性セラミックを
適宜の方法によりコーティングするようにしてもよい。In this way, the core material is integrated with the powder compact 3 during sintering, and the mechanical strength of the sintered body, particularly the strength of the filament, the terminal portion of the boat, the supporting fixing portion, etc., can be improved. Further, after sintering, the surface of the sintered body may be coated with a conductive ceramic by an appropriate method.
但し、そのコーテング層は焼結体表面の微視的凹凸を消
失させないように形成しておく。このようにすれば、フ
ィラメント、ボートの寿命を向上させることができる。However, the coating layer is formed so as not to eliminate the microscopic irregularities on the surface of the sintered body. In this way, the life of the filament and boat can be improved.
（発明の効果）
以上の説明から理解されるように、本発明の真空蒸着用
発熱体は、その表面に微視的凹凸を有するものであるか
ら、比表面積が極めて大きく、その特性を大幅に向上さ
せつるものである。しかも金属・焼結体であるから、構
成材としてタングステン、モリブデン等の難加工性金属
を用いる場合にも、製造が簡単で安価に提供できる。(Effects of the Invention) As understood from the above explanation, the heating element for vacuum evaporation of the present invention has microscopic irregularities on its surface, so it has an extremely large specific surface area, and its characteristics can be greatly improved. It is something that improves and vines. Moreover, since it is a metal/sintered body, it can be easily manufactured and provided at low cost even when difficult-to-process metals such as tungsten and molybdenum are used as the constituent material.
また、本発明の製造方法によれば、金属粉と粘結剤との
混練物を所定の発熱体形状に整形した上で焼結させるか
ら、発熱ｉ易に且つ安価に製造することができる。Further, according to the manufacturing method of the present invention, since the kneaded material of metal powder and binder is shaped into a predetermined shape of the heating element and then sintered, the heating element can be manufactured easily and at low cost.
第１図〜第３図は本発明の実施例を示したもので、第１
図は圧粉成形物の押出し成形状態を示す断面図、第２図
及び第３図は夫々最終製品たるフィラメント及びボート
を例示する斜視図である。
１・・・混練物、２・・・押出し成形機、３・圧粉成形
物、４・・フィラメント（発熱体）、５・・・ボート（
発熱体）。
第１図
第２図Figures 1 to 3 show embodiments of the present invention.
The figure is a sectional view showing the state of extrusion of the compacted product, and FIGS. 2 and 3 are perspective views illustrating a filament and a boat, respectively, which are the final products. 1... Kneaded product, 2... Extrusion molding machine, 3... Powder molded product, 4... Filament (heating element), 5... Boat (
heating element). Figure 1 Figure 2
Claims (2)
とを特徴とする真空蒸着用発熱体。(1) A heating element for vacuum deposition, characterized by being made of a metal sintered body having microscopic irregularities on its surface.
ルセルローズ等の粘結剤との混練物を押出し成形又は圧
縮成形し、この圧粉成形物を所定の発熱体形状に整形し
た上、この整形物を乾燥後焼結するようにしたことを特
徴とする真空蒸着用発熱体の製造方法。(2) A mixture of metal powder such as tungsten or molybdenum and water and a binder such as methyl cellulose is extruded or compression molded, the compacted product is shaped into a predetermined heating element shape, and then this shaping is performed. A method for producing a heating element for vacuum deposition, characterized in that the material is dried and then sintered.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12955386A JPS62287065A (en) | 1986-06-04 | 1986-06-04 | Heating element for vacuum deposition and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12955386A JPS62287065A (en) | 1986-06-04 | 1986-06-04 | Heating element for vacuum deposition and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62287065A true JPS62287065A (en) | 1987-12-12 |
Family
ID=15012348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12955386A Pending JPS62287065A (en) | 1986-06-04 | 1986-06-04 | Heating element for vacuum deposition and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62287065A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013135211A (en) * | 2011-12-23 | 2013-07-08 | Taike Technology Suzhou Co Ltd | Sintering method for tantalum capacitor anode block |
-
1986
- 1986-06-04 JP JP12955386A patent/JPS62287065A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013135211A (en) * | 2011-12-23 | 2013-07-08 | Taike Technology Suzhou Co Ltd | Sintering method for tantalum capacitor anode block |
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