JPS6228439U - - Google Patents
Info
- Publication number
- JPS6228439U JPS6228439U JP11914885U JP11914885U JPS6228439U JP S6228439 U JPS6228439 U JP S6228439U JP 11914885 U JP11914885 U JP 11914885U JP 11914885 U JP11914885 U JP 11914885U JP S6228439 U JPS6228439 U JP S6228439U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- jig
- partition plate
- movable partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 8
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11914885U JPS6228439U (en:Method) | 1985-08-02 | 1985-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11914885U JPS6228439U (en:Method) | 1985-08-02 | 1985-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228439U true JPS6228439U (en:Method) | 1987-02-20 |
Family
ID=31006253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11914885U Pending JPS6228439U (en:Method) | 1985-08-02 | 1985-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228439U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60119578U (ja) * | 1984-10-12 | 1985-08-13 | 大日本印刷株式会社 | 収納具付帳票 |
| JPH01251633A (ja) * | 1987-12-07 | 1989-10-06 | Tel Sagami Ltd | ウエハ移替え装置 |
-
1985
- 1985-08-02 JP JP11914885U patent/JPS6228439U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60119578U (ja) * | 1984-10-12 | 1985-08-13 | 大日本印刷株式会社 | 収納具付帳票 |
| JPH01251633A (ja) * | 1987-12-07 | 1989-10-06 | Tel Sagami Ltd | ウエハ移替え装置 |