JPS6228439U - - Google Patents

Info

Publication number
JPS6228439U
JPS6228439U JP11914885U JP11914885U JPS6228439U JP S6228439 U JPS6228439 U JP S6228439U JP 11914885 U JP11914885 U JP 11914885U JP 11914885 U JP11914885 U JP 11914885U JP S6228439 U JPS6228439 U JP S6228439U
Authority
JP
Japan
Prior art keywords
wafer
wafers
jig
partition plate
movable partition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11914885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11914885U priority Critical patent/JPS6228439U/ja
Publication of JPS6228439U publication Critical patent/JPS6228439U/ja
Pending legal-status Critical Current

Links

JP11914885U 1985-08-02 1985-08-02 Pending JPS6228439U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11914885U JPS6228439U (enrdf_load_stackoverflow) 1985-08-02 1985-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11914885U JPS6228439U (enrdf_load_stackoverflow) 1985-08-02 1985-08-02

Publications (1)

Publication Number Publication Date
JPS6228439U true JPS6228439U (enrdf_load_stackoverflow) 1987-02-20

Family

ID=31006253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11914885U Pending JPS6228439U (enrdf_load_stackoverflow) 1985-08-02 1985-08-02

Country Status (1)

Country Link
JP (1) JPS6228439U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119578U (ja) * 1984-10-12 1985-08-13 大日本印刷株式会社 収納具付帳票
JPH01251633A (ja) * 1987-12-07 1989-10-06 Tel Sagami Ltd ウエハ移替え装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60119578U (ja) * 1984-10-12 1985-08-13 大日本印刷株式会社 収納具付帳票
JPH01251633A (ja) * 1987-12-07 1989-10-06 Tel Sagami Ltd ウエハ移替え装置

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