JPS6228437U - - Google Patents
Info
- Publication number
- JPS6228437U JPS6228437U JP11726185U JP11726185U JPS6228437U JP S6228437 U JPS6228437 U JP S6228437U JP 11726185 U JP11726185 U JP 11726185U JP 11726185 U JP11726185 U JP 11726185U JP S6228437 U JPS6228437 U JP S6228437U
- Authority
- JP
- Japan
- Prior art keywords
- holding
- retaining
- semiconductor wafer
- grooves
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726185U JPS6228437U (enrdf_load_stackoverflow) | 1985-08-01 | 1985-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726185U JPS6228437U (enrdf_load_stackoverflow) | 1985-08-01 | 1985-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228437U true JPS6228437U (enrdf_load_stackoverflow) | 1987-02-20 |
Family
ID=31002609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11726185U Pending JPS6228437U (enrdf_load_stackoverflow) | 1985-08-01 | 1985-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228437U (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0179828U (enrdf_load_stackoverflow) * | 1987-11-19 | 1989-05-29 | ||
| JPH02174119A (ja) * | 1988-12-26 | 1990-07-05 | Toshiba Ceramics Co Ltd | ウェハボート |
| JPH08227861A (ja) * | 1995-12-15 | 1996-09-03 | Toshiba Ceramics Co Ltd | ウェーハ熱処理用炭化珪素質ボート |
| JP2009170938A (ja) * | 1999-04-15 | 2009-07-30 | Integrated Materials Inc | ウェーハ処理用シリコン固定具およびその製造方法 |
-
1985
- 1985-08-01 JP JP11726185U patent/JPS6228437U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0179828U (enrdf_load_stackoverflow) * | 1987-11-19 | 1989-05-29 | ||
| JPH02174119A (ja) * | 1988-12-26 | 1990-07-05 | Toshiba Ceramics Co Ltd | ウェハボート |
| JPH08227861A (ja) * | 1995-12-15 | 1996-09-03 | Toshiba Ceramics Co Ltd | ウェーハ熱処理用炭化珪素質ボート |
| JP2009170938A (ja) * | 1999-04-15 | 2009-07-30 | Integrated Materials Inc | ウェーハ処理用シリコン固定具およびその製造方法 |