JPS62280626A - Spectrophotometer for polarized and modulated infrared ray - Google Patents
Spectrophotometer for polarized and modulated infrared rayInfo
- Publication number
- JPS62280626A JPS62280626A JP12334786A JP12334786A JPS62280626A JP S62280626 A JPS62280626 A JP S62280626A JP 12334786 A JP12334786 A JP 12334786A JP 12334786 A JP12334786 A JP 12334786A JP S62280626 A JPS62280626 A JP S62280626A
- Authority
- JP
- Japan
- Prior art keywords
- infrared ray
- sample
- output
- detector
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 230000010287 polarization Effects 0.000 claims abstract description 11
- 230000003321 amplification Effects 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 238000000862 absorption spectrum Methods 0.000 abstract description 12
- 239000010409 thin film Substances 0.000 abstract description 6
- 230000009466 transformation Effects 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 29
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 229940125730 polarisation modulator Drugs 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000013074 reference sample Substances 0.000 description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010571 fourier transform-infrared absorption spectrum Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- HQLXAGAHMYOBIH-UHFFFAOYSA-N pyrimido[5,4-c]carbazole-2,4-dione Chemical compound N1=C2C=CC=CC2=C2C1=CC=C1C(=O)NC(=O)N=C12 HQLXAGAHMYOBIH-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
五 発明の詳細な説明
〔産業上の利用分野〕
本発明は赤外分光光度計に係り、特に、摩さがナノメー
トル（ｎｍ）オーダの薄膜の赤外吸収スペクトルを測定
するのに好適な偏光ｆｙＡ赤外分光元度計に関する。[Detailed Description of the Invention] V. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an infrared spectrophotometer, and in particular, to a method for measuring the infrared absorption spectrum of a thin film with abrasion on the order of nanometers (nm). The present invention relates to a polarization fyA infrared spectrometer suitable for measuring polarization.
〔従来の技術」
第３図に、ロックインアンプを用いた従来の赤外分光光
度計を示す。第３囚において、赤外光源１から放射され
た赤外線は、２枚の平面反射鏡２゜２″で大々偏向され
、平面反射鏡２で偏向された赤外線は試料７で反射され
た後チョッピングミラー１９に入射され、平面反射鏡２
′で偏向された赤外線は参照試料（通常は平面鏡）１８
で反射された後チョッピングミラ−１９に入射される。[Prior Art] Figure 3 shows a conventional infrared spectrophotometer using a lock-in amplifier. In the third prisoner, the infrared rays emitted from the infrared light source 1 are largely deflected by two plane reflectors 2゜2'', and the infrared rays deflected by the plane reflectors 2 are reflected by the sample 7 and then chopped. The light is incident on the mirror 19, and the plane reflecting mirror 2
The infrared rays deflected by the reference sample (usually a plane mirror) 18
After being reflected by the beam, the beam is incident on the chopping mirror 19.
チョッピングミラー１９は、斜線で示した部分が反射鏡
罠なっておシ、他の部分は光がそのまま透過するように
なっている。このチョッピングミラー１９の回転により
、試料７からの赤外線と参照試料１８からの赤外線とは
交互に回折格子２０に入射される。回折格子２０は赤外
光を各波長毎に分散し、検出器９は分散された赤外光を
検出する。即ち、試料７からの赤外線と参照試料１８か
らの赤外線は光の強度が異なるため、検出器９は強度違
いが周期的に現われる信号を検出する。そして、ロック
インアンプ１２がこの周期的に現れる信号を位相検波し
て増幅し、Ａ／Ｄ変換器１５とデータ処理器１７でデー
タ処理をする・
尚、ロックインアンプを用いる従来の赤外分光光度計に
関連するものとして、例えば特開昭５７−＋ ６５５８
号かめる。In the chopping mirror 19, the hatched portion is a reflecting mirror trap, and the other portions are configured to allow light to pass through as is. Due to this rotation of the chopping mirror 19, the infrared rays from the sample 7 and the infrared rays from the reference sample 18 are alternately incident on the diffraction grating 20. The diffraction grating 20 disperses the infrared light into wavelengths, and the detector 9 detects the dispersed infrared light. That is, since the infrared rays from the sample 7 and the infrared rays from the reference sample 18 have different light intensities, the detector 9 detects a signal in which a difference in intensity appears periodically. Then, the lock-in amplifier 12 phase-detects and amplifies this periodically appearing signal, and the A/D converter 15 and data processor 17 process the data.In addition, conventional infrared spectroscopy using a lock-in amplifier Regarding photometers, for example, Japanese Patent Application Laid-open No. 57-+6558
Carry the number.
〔８９４が解決しようとする問題点〕
第６図に示す従来技術では、平面鏡２．２′を用いて元
ｗ１を２分割し、−万の光路中に試料７を置き、他方の
光路中に参照試料１８を置いている。[Problems to be solved by 894] In the conventional technique shown in FIG. A reference sample 18 is placed.
これは、試料７を通る赤外線中Ｋｔまれる試料信号及び
これに重畳するノイズから、参照試料を通る赤外線中に
會まれるノイズを相殺するためでるり、ロックインアン
プ１２は試料信号に相当する光の強度差分たけ大きく増
幅する。This is done in order to cancel out the noise generated in the infrared rays passing through the reference sample from the sample signal Kt generated in the infrared rays passing through the sample 7 and the noise superimposed thereon, and the lock-in amplifier 12 corresponds to the sample signal. It amplifies the difference in light intensity.
上記ノイズは、王として測定系に存在する水蒸気や炭酸
ガス等の様々な物質に起因し、２枚の分割ミラー２．２
′の反射率の不一致２分割した光路長の不一致、チ嘗ツ
ビングミラ−１９の反射率等によって両党路中に含まれ
るノイズの大きさが異なってくる。上述し次光路長１反
対車の不一致等の問題は完全に除去することが困難であ
る〇このため、従来の赤外分元元置計では、厚さナノメ
ートル（ｎｍ）オーダの薄膜や吸着物について高精度の
赤外吸収スペクトルの測定ができないという問題がある
〇
本発明の目的は、測定系から生ずる試料に関係しない信
号を完全に除き、試料に係る信号による赤外吸収スペク
トルのみを高感度に測定する偏光変調赤外分光ｉｌｌ計
を提供することにある。The above noise is mainly caused by various substances such as water vapor and carbon dioxide present in the measurement system.
The amount of noise contained in the two paths differs depending on the mismatch in the length of the optical path divided into two, the reflectance of the checking mirror 19, etc. It is difficult to completely eliminate the problems such as the discrepancy between the optical path length and the opposite wheel as described above.For this reason, conventional infrared spectrometers cannot handle thin films with a thickness on the order of nanometers (nm) or adsorption. There is a problem that it is not possible to measure infrared absorption spectra with high precision for objects.The purpose of the present invention is to completely eliminate signals that are generated from the measurement system and are not related to the sample, and to enhance only the infrared absorption spectra caused by signals related to the sample. An object of the present invention is to provide a polarization modulation infrared spectrometer that measures sensitivity.
上記目的は、赤外線を水平偏光と垂直偏光に交互して変
調する光学素子と、該光学素子から射出した変調赤外層
を試料に当てて得られ九赤外線を検出して電気信号に換
える検出器と、該検出器から出力される信号を位相検波
して増幅する増幅手段と、前記検出器から出力される信
号のうち変調赤外線の変調周波数成分を除くフィルタ手
段と。The above purpose is to provide an optical element that alternately modulates infrared rays into horizontally polarized light and vertically polarized light, and a detector that detects the nine infrared rays obtained by applying the modulated infrared layer emitted from the optical element to a sample and converts them into electrical signals. , an amplifying means for phase-detecting and amplifying a signal output from the detector, and a filter means for removing a modulated frequency component of modulated infrared rays from the signal output from the detector.
前記検出器の出力信号を前記増幅手段あるいは前記フィ
ルタ手段に交互に入力するスイッチ手段と。switch means for alternately inputting the output signal of the detector to the amplification means or the filter means;
前記ロックインアンプの出力信号と前記フィルタ手段の
出力信号とから前記試料の赤外線吸収スペクトル信号を
取り出して処理するデータ処理手段とで赤外分光光度計
を構成することで達成される。This is achieved by configuring an infrared spectrophotometer with data processing means for extracting and processing an infrared absorption spectrum signal of the sample from the output signal of the lock-in amplifier and the output signal of the filter means.
水平偏光と垂直偏光を交互にとる変調赤外線が試料に入
射すると、試料の化学構造に応じた波長の元の吸収が水
平偏光で起こり、垂直偏光と水平偏光との間に強度差が
生じる。この強度差を増幅手段１例えばロックインアン
プで増幅しデータ処理することで試料の赤外吸収スペク
トルが得られる。光学索子から射出される水平偏光と垂
直偏光の強度が全く同一であれは、この赤外吸収スペク
トルにはｍｊ定系のノイズは含まれない。しかし、実際
には光学素子から射出される水平偏光と垂直偏光には強
度差がある丸め、ｆＭ記赤外吸収スペクトルにはノイズ
が重量されている。そこで、本発明では、フィルタ手段
により、変調周波数成分を除いた信号、即ち、試料信号
を含まない界囲気中の水蒸気、炭酸ガス等に起因するノ
イズのみを別に取り出し、これを考慮して増幅手段、例
えばロックインアンプの出力信号をデータ処理すること
で高精度な赤外吸収スペクトルを得る。When modulated infrared light that alternates between horizontally and vertically polarized light is incident on a sample, the original absorption of the wavelength depending on the chemical structure of the sample occurs in the horizontally polarized light, creating an intensity difference between the vertically and horizontally polarized light. The infrared absorption spectrum of the sample can be obtained by amplifying this intensity difference using the amplifying means 1, such as a lock-in amplifier, and processing the data. If the intensities of the horizontally polarized light and the vertically polarized light emitted from the optical probe are exactly the same, this infrared absorption spectrum does not include mj-constant noise. However, in reality, the horizontally polarized light and the vertically polarized light emitted from the optical element are rounded and have a difference in intensity, and the fM infrared absorption spectrum is heavily contaminated with noise. Therefore, in the present invention, the signal excluding the modulation frequency component, that is, only the noise caused by water vapor, carbon dioxide gas, etc. in the surrounding air, which does not include the sample signal, is extracted separately by the filter means, and the amplification means takes this into account. For example, a highly accurate infrared absorption spectrum can be obtained by data processing the output signal of a lock-in amplifier.
以下、本発明の一実施例を第１図及び第２図を参照して
説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
第１図は本発明の一実施例に係る偏光変調赤外反射分光
光度針の構成図である。第１図において。FIG. 1 is a configuration diagram of a polarization modulated infrared reflection spectrophotometer needle according to an embodiment of the present invention. In FIG.
光源１から出た赤外線は放物面反射鏡２で平行光にされ
、マイケルンル干渉計３に入る。マイヶルンン干渉計３
から射出された赤外縁は放物面反射ｖＲ４で集光され、
光学索子５に入射される。Infrared light emitted from a light source 1 is made into parallel light by a parabolic reflector 2 and enters a Michael-Enle interferometer 3. Maikarun interferometer 3
The infrared edge emitted from is focused by parabolic reflection vR4,
The light is incident on the optical probe 5.
光学素子５は、本実施例では垂直偏光変光子５ａと１例
えば複屈折性セレン化亜鉛の結晶で作られる応力偏光変
調子５ｂから成る。垂直偏光変光子５ａは入射する赤外
光を直線偏光に整え、応力偏光変調子５ｂはこの直線偏
光の偏光面を回転させ、水平偏光と垂直偏光との間を変
調させる。In this embodiment, the optical element 5 comprises a vertical polarization modulator 5a and a stress polarization modulator 5b made of birefringent zinc selenide crystal, for example. The vertical polarization modulator 5a arranges the incident infrared light into linearly polarized light, and the stress polarization modulator 5b rotates the plane of polarization of this linearly polarized light to modulate between horizontally polarized light and vertically polarized light.
この様に変調された赤外光は、次に、金属板上に被着さ
れた薄膜試料７に入射され、試料７で反射された赤外光
は放物面反射鏡８で再び集光されたあと検出器９で検出
される。The infrared light modulated in this way is then incident on a thin film sample 7 deposited on a metal plate, and the infrared light reflected by the sample 7 is focused again by a parabolic reflector 8. After that, it is detected by the detector 9.
検出器９の出力信号は、プレアンプ１０を介し同軸ケー
ブルでスイッチ１１の入力端子ｌｅａに入力される。ス
イッチ１１は２つの―力端子１１ｂ、＋＋ｃを備え、後
述するデータ処理装置１７からの制御信号により入力端
子＋１ａと出力端子Ｍｌ）またはｌｌｃとを切換接続す
る。The output signal of the detector 9 is inputted to the input terminal lea of the switch 11 via a preamplifier 10 and a coaxial cable. The switch 11 has two - terminals 11b and ++c, and switches and connects the input terminal +1a and the output terminal Ml) or llc in response to a control signal from a data processing device 17, which will be described later.
スイッチ１１の出力端子ｌ１１）から出力される検出器
９の出力信号は、ロックインアンプ１２で位相検波され
増幅されてから、ポテンショスタット、可ｆ抵抗器等で
構成したアッテネータ１４を介してに／ＤＫ換器１５に
入力される。−万、スイッチ１１の出力端子＋１０から
出力される検出器９の出刃信号は、例えばＩ ＯＫＨｚ
以下を通すローパスフィルタ１３を通った後、Ａ／Ｄ変
換器１５に入力される。The output signal of the detector 9 output from the output terminal l11) of the switch 11 is phase-detected and amplified by the lock-in amplifier 12, and then outputted via the attenuator 14, which is composed of a potentiostat, a variable f resistor, etc. The signal is input to the DK converter 15. - 10,000, the output signal of the detector 9 output from the output terminal +10 of the switch 11 is, for example, I OKHz.
After passing through a low-pass filter 13 that passes the following, it is input to an A/D converter 15.
Ａ／Ｄｉ換器１５に入力された信号はフーリエ変換処理
器１６でフーリエ変換されデータ処理器１７に送られて
処理される。The signal input to the A/Di converter 15 is Fourier transformed by a Fourier transform processor 16 and sent to a data processor 17 for processing.
斯かる構成により、ニッケル金属板上に付けた厚さ５ｎ
ｍのポリイミドインドロキナゾリンジオン試料の赤外吸
収スペクトルを調べた例について述べる。With such a configuration, a thickness of 5 nm deposited on a nickel metal plate is obtained.
An example of investigating the infrared absorption spectrum of a polyimide indoloquinazolinedione sample of m.
試料７に光学索子５から射出したに調赤外元を照射する
と、変調赤外光のうち水平偏光では試料７の化学構造に
応じて光の吸収が起こり、垂直偏光では起きない。この
水平偏光、垂直偏光の測定系に存在する水蒸気や炭酸ガ
ス等の物質による吸収残置は同じである。従って、ロッ
クインアンプ１２は、理想的にはノイズを増幅せず試料
信号のみを増幅することになるが、笑際には、光学索子
５から射出される変調赤外光の水平偏光と垂直偏光の＠
度が同一でないので、ロックインアンプ１２の出力をＡ
／Ｄｉ換しフーリエ変換して得た赤外吸収スペクトルＢ
ａａは、第３図に示すように、ノイズが重量した信号と
なる。When the sample 7 is irradiated with the modulated infrared light emitted from the optical probe 5, horizontally polarized light of the modulated infrared light is absorbed depending on the chemical structure of the sample 7, but vertically polarized light is not absorbed. The absorption and residual absorption by substances such as water vapor and carbon dioxide gas present in the horizontally polarized light and vertically polarized light measurement systems is the same. Therefore, ideally, the lock-in amplifier 12 would amplify only the sample signal without amplifying noise, but in actuality, the lock-in amplifier 12 may Polarized @
Since the degrees are not the same, the output of lock-in amplifier 12 is set to A.
/Di exchange and Fourier transform infrared absorption spectrum B
As shown in FIG. 3, aa becomes a signal with heavy noise.
一力、検出器９の出力信号をローパスフィルタ１３を通
すと、該信号から変調信号即ち試料信号を除いたノイズ
のみの信号が得られる。このため、ローパスフィルタ１
３の出力をＡ／Ｄ変換しフーリエ変換し良信号＆ｉｃは
、第３図に示すような信号となる。First, when the output signal of the detector 9 is passed through the low-pass filter 13, a signal containing only noise is obtained by removing the modulation signal, that is, the sample signal. Therefore, the low-pass filter 1
The output of No. 3 is A/D converted and Fourier transformed, resulting in a good signal &ic as shown in FIG.
そこで、データ処理装置１７でＢａｃ ／ Ｂｄｃの値
をとることにより、ノイズの影響を排除することが可能
となる。第６図に示すように、本実施例によれば５ｎｍ
の超薄膜の測定ができる。Therefore, by taking the value of Bac/Bdc in the data processing device 17, it becomes possible to eliminate the influence of noise. As shown in FIG. 6, according to this example, 5 nm
Ultra-thin films can be measured.
上述した測定において１例えば表面が黒い試料や凹凸が
大きい試料では、Ｂａｃに比べＢａｃが著しく小さくな
シ、一般のフーリエ変換赤外分光々度計についたデータ
処理装置では対応出来なくなる。In the above-mentioned measurement, for example, in the case of a sample with a black surface or a sample with large irregularities, Bac is significantly smaller than Bac, and the data processing device attached to a general Fourier transform infrared spectrophotometer cannot handle it.
斯かる場合は、アッテネータ１４を調節してＢａａを減
衰さぜることにより対処する。また、ＢａｃとＢｄｃの
スペクトルは全く閤−の時間に測定することが好ましい
。しかし、現実には無理がある丸め、スイッチ１１を切
換えてＢａａ、 Ｂａｃを夫々又互に数１０（ロ）積算
することで測定精度の向上を図るようにしている。Such a case can be dealt with by adjusting the attenuator 14 to attenuate Baa. Furthermore, it is preferable that the Bac and Bdc spectra be measured at exactly the same time. However, in reality, rounding is impossible, and the measurement accuracy is improved by switching the switch 11 and integrating Baa and Bac by a number of 10 (b).
本発明によれば、光路を分割しないため薄膜試料以外の
反射鏡や大気中の水蒸気や炭酸ガス又は応力偏光変調子
などの影響を全く除く事ができるので、ｎｍオーダーの
極めて薄い層の赤外吸収スペクトルでも高感度に測定す
ることが出来る効果がある。According to the present invention, since the optical path is not divided, it is possible to completely eliminate the effects of reflective mirrors other than the thin film sample, atmospheric water vapor, carbon dioxide gas, stress polarization modulators, etc. It also has the effect of allowing highly sensitive measurement of absorption spectra.
第１図は本発明の一実施例に係る偏光変調赤外反射分光
光度計の構成図、第２図は第１図に示す偏光変調赤外反
射分光光度計で５ｒｕｎ厚のポリイミドインドロキナゾ
リンジオン試料を測定したときの測定グラフ、第３図は
従来の赤外分光″Ｉｔ、度計の構成図である。
１・・・赤外光光源、２・・・放物面反射鏡、３・・・
マイケルンン干渉計、４・・・放物面反射鏡、５・・・
光学素子、５ａ・・・垂直偏光変元子、 ・・・応力偏
光変調子、７・・・試料、８・・・放物面反射鏡、９・
・・検出器、１゜・・・プレアンプ、１１・・・自動切
換スイッチ、１２・・・ロックインアンプ、１６・・・
ローパスフィルタ、１４・・・アッテネータ、１５・・
・Ａ／ＤＫ換器、１６・・・フ−リエ変換器、１７・・
・データ処理装置〇箪 １ 図FIG. 1 is a block diagram of a polarization modulation infrared reflection spectrophotometer according to an embodiment of the present invention, and FIG. 2 is a configuration diagram of a polarization modulation infrared reflection spectrophotometer shown in FIG. The measurement graph when measuring a sample, and Figure 3 is a configuration diagram of a conventional infrared spectrometer. 1. Infrared light source, 2. Parabolic reflector, 3.・・・
Michael interferometer, 4... parabolic reflector, 5...
Optical element, 5a... Vertical polarization variable element,... Stress polarization modulator, 7... Sample, 8... Parabolic reflector, 9...
...Detector, 1゜...Preamplifier, 11...Automatic changeover switch, 12...Lock-in amplifier, 16...
Low-pass filter, 14... Attenuator, 15...
・A/DK converter, 16...Fourier converter, 17...
・Data processing equipment 〇箪 1 diagram
Claims (1)
素子と、該光学素子から射出した変調赤外光を試料に当
てて得られた赤外光を検出する検出器と、該検出器出力
を位相検波して増幅する手段と、前記検出器出力のうち
変調赤外光の変調周波数成分を除去するフィルタ手段と
、前記検出器出力を前記増幅手段または前記フィルタ手
段に交互に入力するスイッチ手段と、前記増幅手段から
の出力と前記フィルタ手段からの出力より前記試料の信
号を取り出して処理するデータ処理手段とを備えてなる
ことを特徴とする偏光変調赤外分光光度計。1. An optical element that modulates infrared light between horizontally polarized light and vertically polarized light, a detector that detects the infrared light obtained by applying the modulated infrared light emitted from the optical element to a sample, and the detector. means for phase-detecting and amplifying the output; filter means for removing the modulated frequency component of the modulated infrared light from the detector output; and a switch for alternately inputting the detector output to the amplification means or the filter means. A polarization modulation infrared spectrophotometer comprising: means for extracting and processing a signal of the sample from the output from the amplification means and the output from the filter means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61123347A JPH0663842B2 (en) | 1986-05-30 | 1986-05-30 | Polarization modulation infrared spectrophotometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61123347A JPH0663842B2 (en) | 1986-05-30 | 1986-05-30 | Polarization modulation infrared spectrophotometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62280626A true JPS62280626A (en) | 1987-12-05 |
| JPH0663842B2 JPH0663842B2 (en) | 1994-08-22 |
Family
ID=14858316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61123347A Expired - Lifetime JPH0663842B2 (en) | 1986-05-30 | 1986-05-30 | Polarization modulation infrared spectrophotometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0663842B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01216221A (en) * | 1988-02-24 | 1989-08-30 | Nec Corp | Characteristic measuring instrument for semiconductor laser |
| WO1999030134A1 (en) * | 1997-12-08 | 1999-06-17 | The Government Of The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration (Nasa) | Multi-gas sensor |
| CN103048047A (en) * | 2011-10-11 | 2013-04-17 | 中国科学院微电子研究所 | Phase element containing normal incident broadband polarized spectrometer and optical measurement system |
-
1986
- 1986-05-30 JP JP61123347A patent/JPH0663842B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| APPLIED SPECTROSCOPY=1979 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01216221A (en) * | 1988-02-24 | 1989-08-30 | Nec Corp | Characteristic measuring instrument for semiconductor laser |
| WO1999030134A1 (en) * | 1997-12-08 | 1999-06-17 | The Government Of The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration (Nasa) | Multi-gas sensor |
| CN103048047A (en) * | 2011-10-11 | 2013-04-17 | 中国科学院微电子研究所 | Phase element containing normal incident broadband polarized spectrometer and optical measurement system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0663842B2 (en) | 1994-08-22 |
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