JPS6228037U - - Google Patents
Info
- Publication number
- JPS6228037U JPS6228037U JP11892085U JP11892085U JPS6228037U JP S6228037 U JPS6228037 U JP S6228037U JP 11892085 U JP11892085 U JP 11892085U JP 11892085 U JP11892085 U JP 11892085U JP S6228037 U JPS6228037 U JP S6228037U
- Authority
- JP
- Japan
- Prior art keywords
- switching valve
- subchambers
- exhaust port
- subchamber
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Characterised By The Charging Evacuation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11892085U JPS6228037U (OSRAM) | 1985-08-02 | 1985-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11892085U JPS6228037U (OSRAM) | 1985-08-02 | 1985-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228037U true JPS6228037U (OSRAM) | 1987-02-20 |
Family
ID=31005821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11892085U Pending JPS6228037U (OSRAM) | 1985-08-02 | 1985-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228037U (OSRAM) |
-
1985
- 1985-08-02 JP JP11892085U patent/JPS6228037U/ja active Pending