JPS62271513A - Vibrator - Google Patents

Vibrator

Info

Publication number
JPS62271513A
JPS62271513A JP11361486A JP11361486A JPS62271513A JP S62271513 A JPS62271513 A JP S62271513A JP 11361486 A JP11361486 A JP 11361486A JP 11361486 A JP11361486 A JP 11361486A JP S62271513 A JPS62271513 A JP S62271513A
Authority
JP
Japan
Prior art keywords
plates
piezoelectric ceramic
filter
vibration mode
resonance frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11361486A
Other languages
Japanese (ja)
Inventor
Taku Gonji
五雲寺 卓
Shinichi Yamamoto
真一 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11361486A priority Critical patent/JPS62271513A/en
Publication of JPS62271513A publication Critical patent/JPS62271513A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To form a timing extraction filter not causing spurious response near the pass band by forming the thickness at both ends of a piezoelectric ceramic plate having an electrode at upper and lower faces smaller than that of the middle part. CONSTITUTION:The electrode and constant elastic metallic plates 14, 15 and 24, 25 for temperature compensation are soldered to upper/lower faces of piezoelectric ceramic plates 11, 21. The plates 14, 24 at the upper face of the plates 11, 21 are connected together and supports 4, 5, 6 of a mechanical filter are provided. Then steps 12, 13 and 22, 23 are formed respectively to both ends of the plates 11, 12. Then the characteristic before adjustment shown by solid lines is improved as shown by broken lines after adjustment and while the resonance frequency of the longitudinal vibration mode changes largely from fL to fL', the change in the resonance frequency of the bending vibration mode is only from fB to fB'. Thus, no spurious response is caused in the vicinity of pass band and the filter has a characteristic as a timing extracting filter.

Description

【発明の詳細な説明】 3、発明の詳細な説明 〔概 要〕 メカニカルフィルタに用いる振動子であって、圧電セラ
ミックの上下面に電極板を設けた縦振動子の長さ寸法だ
けでなく厚さ寸法を小さくすることにより、縦振動モー
ドの共振周波数f、の変化に対し屈曲モードの共振周波
数f、の変化を少なくしようとするものである。
[Detailed Description of the Invention] 3. Detailed Description of the Invention [Summary] A vertical vibrator used in a mechanical filter, in which electrode plates are provided on the top and bottom surfaces of a piezoelectric ceramic, has not only the length dimension but also the thickness. By reducing the size, the change in the resonant frequency f of the bending mode is reduced relative to the change of the resonant frequency f of the longitudinal vibration mode.

〔産業上の利用分野〕[Industrial application field]

本発明は、縦振動モードの振動子の改良に関する。 The present invention relates to improvements in longitudinal vibration mode vibrators.

一般に縦振動モードのメカニカルフィルタの設計におい
ては、あらかじめ製造のバラツキを考慮して各振動子の
共振周波数は所定の周波数に対し低めになるように振動
子の長さlを決定している。
Generally, in designing a longitudinal vibration mode mechanical filter, the length l of each vibrator is determined in advance so that the resonant frequency of each vibrator is lower than a predetermined frequency, taking manufacturing variations into account.

そして振動子の長さを短かくしていくことにより振動子
の共振周波数を上げ所望の値に一致させるようにしてい
る。
By shortening the length of the vibrator, the resonant frequency of the vibrator is raised to match a desired value.

〔従来の技術〕[Conventional technology]

従来のメカニカルフィルタは第7図に示す構成を有して
いた。即ち、縦振動子10 、20により構成され、そ
れぞれは厚さ方向に分極された矩形状の圧電セラミック
板101,201から成る。その上下面には恒弾性金属
板102.103,202,203が半田等の接着剤で
接続しである。上面に形成された恒弾性金属板102,
202は結合子30により結合されかつ該メカニカルフ
ィルタには、支持部40 、41 、42が設けられて
いる。
A conventional mechanical filter had a configuration shown in FIG. That is, it is composed of longitudinal vibrators 10 and 20, each of which is composed of rectangular piezoelectric ceramic plates 101 and 201 polarized in the thickness direction. Constant elastic metal plates 102, 103, 202, 203 are connected to the upper and lower surfaces thereof with an adhesive such as solder. a constant elastic metal plate 102 formed on the top surface;
202 are connected by a connector 30, and the mechanical filter is provided with support parts 40, 41, and 42.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

第8図は第7図の従来のメカニカルフィルタの特性図で
ある。同図において縦軸は減衰量D、横軸は周波数fを
示し、fLは縦振動モードの共振周波数、f、は屈曲振
動モードの共振周波数を示す。
FIG. 8 is a characteristic diagram of the conventional mechanical filter shown in FIG. In the figure, the vertical axis shows the attenuation amount D, and the horizontal axis shows the frequency f, where fL shows the resonance frequency of the longitudinal vibration mode, and f shows the resonance frequency of the bending vibration mode.

第8図(八)は圧電セラミック板101,201の上下
面に正しく恒弾性金属板が接着され、対称性が良好な場
合の特性図である。この場合、振動子10゜20は第7
図(C)のα、β、γ、δで示すような長さ方向に伸縮
する縦振動を行なう。しかし接着の対称性がくずれた場
合は第7図(C)に示す如く振動子10 、20に屈曲
モードによる振動εが励起され、この場合の周波数レス
ポンスは第8図(B)に示す様になる。つまり、対称性
が崩れると、不要な振動が生じる。
FIG. 8 (8) is a characteristic diagram when the constant elasticity metal plates are properly bonded to the upper and lower surfaces of the piezoelectric ceramic plates 101, 201 and the symmetry is good. In this case, the oscillator 10°20 is the seventh
Longitudinal vibrations that expand and contract in the length direction as shown by α, β, γ, and δ in Figure (C) are performed. However, if the symmetry of the adhesion is broken, vibration ε due to the bending mode is excited in the vibrators 10 and 20 as shown in Figure 7 (C), and the frequency response in this case is as shown in Figure 8 (B). Become. In other words, when the symmetry is broken, unnecessary vibrations occur.

しかるに従来の周波数調整作業において、対称性のくず
れた振動子(8図(B)の周波数レスポンスを有する)
を調整した場合、調整後の周波数レスポンスは第8図(
C)に示すようになってしまう。
However, in conventional frequency adjustment work, a oscillator with broken symmetry (having a frequency response as shown in Figure 8 (B))
When adjusting , the frequency response after adjustment is shown in Figure 8 (
The result will be as shown in C).

すなわち縦振動子の共振、反共振周波数の間に屈曲モー
ドのレスポンス(fll)が生じてしまう。
That is, a bending mode response (fll) occurs between the resonance and anti-resonance frequencies of the longitudinal vibrator.

このような振動子を使用してメカニカルフィルタを構成
した場合の周波数特性は第8図(D)のようになり通過
帯域近傍にスプリアスレスポンスspを生じタイミング
抽出用フィルタとして使用することはできないという問
題点があった。これは、次の理由による。
When a mechanical filter is constructed using such a vibrator, the frequency characteristics are as shown in Figure 8 (D), and there is a problem that a spurious response SP occurs near the passband, making it impossible to use it as a timing extraction filter. There was a point. This is due to the following reason.

即ち、従来は長さpだけを調整していたが、縦振動モー
ドの共振周波数f、は縦振動子の長さlに反比例し ■ fLoc−(1) で表わせる。
That is, conventionally only the length p was adjusted, but the resonance frequency f of the longitudinal vibration mode is inversely proportional to the length l of the longitudinal vibrator and can be expressed as fLoc-(1).

これに対し屈曲モードの共振周波数fllは12に反比
例し、 fi”        (2> で表わせる。
On the other hand, the resonant frequency fll of the bending mode is inversely proportional to 12 and can be expressed as fi''(2>).

つまり長さpの変化に対してf、の変化の方がfLより
大きくなるため長さlを短かくしていくにつれf、が大
となってfLに近づき、さらに短かくすると第8図(C
)の例のようにfBの方がfLより大きくなるからであ
る。
In other words, the change in f with respect to the change in length p is greater than fL, so as the length l is shortened, f increases and approaches fL.
), fB is larger than fL.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の目的は、上記問題点を解決し、屈曲モードの共
振周波数の変化を少なくする様にした振動子を提供する
ことにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a vibrator that solves the above problems and reduces changes in the resonance frequency of the bending mode.

そのための手段は、第1図に示すように、上下面に電極
板14 、15を設けた圧電セラミック板11から成る
縦振動子1、の上記圧電セラミック板11の両端面の厚
さ寸法d2を中央部の長さ寸法d1より小さくした部分
を形成したものである。
As shown in FIG. 1, the means for this purpose is to adjust the thickness dimension d2 of both end surfaces of the piezoelectric ceramic plate 11 of the vertical vibrator 1, which is made of a piezoelectric ceramic plate 11 provided with electrode plates 14 and 15 on the upper and lower surfaces. A portion is formed that is smaller than the length dimension d1 of the central portion.

〔作 用〕[For production]

屈曲振動モードは(2)式に示したように12に反比例
するが、同時に振動子の厚さ寸法dに比例する。すなわ
ち(2)式は f[1oc−(3) と書き換えられる。
The bending vibration mode is inversely proportional to 12 as shown in equation (2), but is also proportional to the thickness dimension d of the vibrator. That is, equation (2) can be rewritten as f[1oc-(3).

従って圧電セラミック板の両端部に段付部12 、11
を設けると、両端部の厚さ寸法d2が中央部の寸法d、
よりも小さくなるので、fIlの変化はdを一定にした
場合に比べて小さくすることができる。
Therefore, there are stepped portions 12 and 11 at both ends of the piezoelectric ceramic plate.
is provided, the thickness dimension d2 at both ends becomes the dimension d at the center,
Therefore, the change in fIl can be made smaller than when d is kept constant.

このため、所定の周波数特性を有するタイミング抽出用
フィルタを提供することが可能となった。
Therefore, it has become possible to provide a timing extraction filter having predetermined frequency characteristics.

〔実施例〕〔Example〕

以下、本発明を、実施例により添付図面を参照して、説
明する。
The invention will now be explained by way of example with reference to the accompanying drawings.

第2図は本発明の第1の適用例を示す斜視図、第3図は
第2図の線m−m ’から見た断面図である。
FIG. 2 is a perspective view showing a first application example of the present invention, and FIG. 3 is a sectional view taken along line m-m' in FIG.

圧電セラミック板u、21の各上下面には電極板と温度
補償の役目を果たす恒弾性金属板14 、15及び24
 、25、がハンダで接着されている。
On the upper and lower surfaces of the piezoelectric ceramic plates u and 21 are constant elastic metal plates 14, 15 and 24, which serve as electrode plates and temperature compensation.
, 25, are bonded with solder.

圧電セラミ5ツク板11 、21の上面の恒弾性金属板
I4と24は結合子3により、相互に接続されていると
共に該メカニカルフィルタの支持部4,5゜6が設けら
れている。
The constant elastic metal plates I4 and 24 on the upper surface of the piezoelectric ceramic plates 11 and 21 are connected to each other by a connector 3, and support portions 4 and 5 for the mechanical filter are provided.

これら、恒弾性金属板14 、24、結合子3、支持部
4,5.6は一体的に形成されている。
These constant elastic metal plates 14, 24, connector 3, and support portions 4, 5.6 are integrally formed.

更に−に記圧電セラミック板11と21の両端部には、
それぞれ段付部12 、13と22 、23が形成され
ている。
Furthermore, at both ends of the piezoelectric ceramic plates 11 and 21,
Stepped portions 12, 13 and 22, 23 are formed, respectively.

従って、第6図の特性図に示すように調整前の特性を実
線で表わすと調整後の特性は破線のようになる。
Therefore, as shown in the characteristic diagram of FIG. 6, if the characteristic before adjustment is represented by a solid line, the characteristic after adjustment is represented by a broken line.

すなわち、縦振動モードの共振周波数がfLから11′
まで大きく変化しているのに対し、屈曲振動モードの共
振周波数の変化はわずかにfBからrお′までに過ぎな
い。
That is, the resonance frequency of the longitudinal vibration mode is 11' from fL.
On the other hand, the resonant frequency of the bending vibration mode changes only slightly from fB to rO'.

このため、通過帯域近傍に従来のように(第8図(C)
)スプリアスレスポンスspが生じることもなく、タイ
ミング抽出用フィルタとしての特性をもつ。第4図と第
5図は、それぞれ本発明の第2、第3の適用例を示す断
面図であり、便宜上第1縦振動子1のみが示されている
Therefore, as in the conventional case (Fig. 8 (C))
) No spurious response sp occurs and it has characteristics as a timing extraction filter. 4 and 5 are cross-sectional views showing second and third application examples of the present invention, respectively, and only the first longitudinal vibrator 1 is shown for convenience.

第1の適用例と異なるのは、圧電セラミック板11の両
端部が第2の適用例では、両端部が傾斜面121,12
2となっており、第3の適用例ではレーザ照射による1
123乃至128を形成していることである。
The difference from the first application example is that in the second application example, both ends of the piezoelectric ceramic plate 11 have sloped surfaces 121 and 12.
2, and in the third application example, 1 by laser irradiation
123 to 128 are formed.

いずれの場合も、圧電セラミック板の両端部に厚さの小
さい部分を形成している。
In either case, thinner portions are formed at both ends of the piezoelectric ceramic plate.

いずれも、第6図に示す特性を有する。Both have the characteristics shown in FIG.

〔発明の効果〕〔Effect of the invention〕

上記のとおり、本発明によれば、上下面に電極板を設け
た圧電セラミック板の両端の厚さ寸法を小さくした部分
を設けている。従って、縦振動モードの共振周波数fL
の変化に対し屈曲モードの共振周波数fIlの変化を少
なくすることができ、通過帯域近傍にスプリアスレスポ
ンスを生じないタイミング抽出用フィルタを実現するこ
とができるようになった。
As described above, according to the present invention, a piezoelectric ceramic plate having electrode plates provided on its upper and lower surfaces has portions with reduced thickness at both ends. Therefore, the resonance frequency fL of the longitudinal vibration mode
It has become possible to reduce the change in the resonant frequency fIl of the bending mode with respect to the change in , and to realize a timing extraction filter that does not generate spurious responses near the passband.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の原理図、第2図乃至第5図は本発明の
適用例を示す図、第6図は本発明による特性図、第7図
は従来技術の構成図、第8図は従来技術の問題点の説明
図である。 ■・・・第1縦振動子、  2・・・第2縦振動子、1
1 、21・・・圧電セラミック板、12 、13 、
22 、23・・・段付部、14 、15 、24 、
25・・・電極板。
Fig. 1 is a principle diagram of the present invention, Figs. 2 to 5 are diagrams showing application examples of the present invention, Fig. 6 is a characteristic diagram according to the present invention, Fig. 7 is a configuration diagram of the prior art, and Fig. 8 is an explanatory diagram of problems in the prior art. ■...First longitudinal oscillator, 2...Second longitudinal oscillator, 1
1, 21... piezoelectric ceramic plate, 12, 13,
22, 23... stepped portion, 14, 15, 24,
25... Electrode plate.

Claims (1)

【特許請求の範囲】 圧電セラミック板(11)の上面と下面には電極板(1
4)(15)が設けられ、 更に上記各圧電セラミック板の両端部に厚さ寸法が中央
部の厚さ寸法より小さく形成した部分を設けたことを特
徴とする振動子。
[Claims] On the upper and lower surfaces of the piezoelectric ceramic plate (11) are electrode plates (1
4) A vibrator characterized in that (15) is provided, and further comprising portions formed at both ends of each piezoelectric ceramic plate having a thickness smaller than that of the central portion.
JP11361486A 1986-05-20 1986-05-20 Vibrator Pending JPS62271513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11361486A JPS62271513A (en) 1986-05-20 1986-05-20 Vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11361486A JPS62271513A (en) 1986-05-20 1986-05-20 Vibrator

Publications (1)

Publication Number Publication Date
JPS62271513A true JPS62271513A (en) 1987-11-25

Family

ID=14616678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11361486A Pending JPS62271513A (en) 1986-05-20 1986-05-20 Vibrator

Country Status (1)

Country Link
JP (1) JPS62271513A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008103777A (en) * 2006-10-17 2008-05-01 Ritsumeikan Micromechanical resonator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029395U (en) * 1973-07-10 1975-04-03
JPS50123268U (en) * 1974-03-22 1975-10-08
JPS5194671U (en) * 1975-01-29 1976-07-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029395U (en) * 1973-07-10 1975-04-03
JPS50123268U (en) * 1974-03-22 1975-10-08
JPS5194671U (en) * 1975-01-29 1976-07-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008103777A (en) * 2006-10-17 2008-05-01 Ritsumeikan Micromechanical resonator

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