JPS6226576U - - Google Patents
Info
- Publication number
- JPS6226576U JPS6226576U JP11725385U JP11725385U JPS6226576U JP S6226576 U JPS6226576 U JP S6226576U JP 11725385 U JP11725385 U JP 11725385U JP 11725385 U JP11725385 U JP 11725385U JP S6226576 U JPS6226576 U JP S6226576U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- flexible belt
- cryopump
- rubber heat
- fastener
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000008929 regeneration Effects 0.000 claims description 2
- 238000011069 regeneration method Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Surface Heating Bodies (AREA)
Description
第１図は本考案の実施例の概略線図、第２図は
本考案の実施例の斜視図、第３図は第２図の―
線断面図、第４図はその要部の正面図、第５図
は第４図の―線截断面図である。
１…クライオポンプ、４…再生用ヒータ、５…
ポンプケース、８…締着具、９…可撓性ベルト、
１０…ゴム製断熱板、１１…自己温度制御型面状
発熱体、１３…保持片。
Fig. 1 is a schematic diagram of an embodiment of the present invention, Fig. 2 is a perspective view of an embodiment of the present invention, and Fig. 3 is a schematic diagram of an embodiment of the present invention.
4 is a front view of the main part thereof, and FIG. 5 is a sectional view taken along the line -- in FIG. 4. 1... Cryopump, 4... Regeneration heater, 5...
Pump case, 8... Fastener, 9... Flexible belt,
DESCRIPTION OF SYMBOLS 10... Rubber heat insulating board, 11... Self-temperature control type planar heating element, 13... Holding piece.
Claims (1)
イオポンプのポンプケースの外周に環状に固定す
る締着具を設け、該可撓性ベルトにその内面にゴ
ム製断熱板を遊動自在に保持する保持片を形成し
、該ゴム製断熱材の内面に自己温度制御型面状発
熱体を貼着して成るクライオポンプ再生用ヒータ
。 A flexible belt made of SUS or other material is provided with a fastener that fixes it in an annular manner around the outer periphery of the pump case of the cryopump, and a holding device that freely holds a rubber heat insulating plate on the inner surface of the flexible belt. A cryopump regeneration heater comprising a self-temperature control type planar heating element attached to the inner surface of the rubber heat insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117253U JPH037586Y2 (en) | 1985-08-01 | 1985-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117253U JPH037586Y2 (en) | 1985-08-01 | 1985-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226576U true JPS6226576U (en) | 1987-02-18 |
| JPH037586Y2 JPH037586Y2 (en) | 1991-02-25 |
Family
ID=31002594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985117253U Expired JPH037586Y2 (en) | 1985-08-01 | 1985-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037586Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996003268A1 (en) * | 1994-07-28 | 1996-02-08 | Dai Nippon Printing Co., Ltd. | Method of foil decorating in injection molding and apparatus therefor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761188U (en) * | 1980-09-30 | 1982-04-10 | ||
| JPS5919984U (en) * | 1982-07-28 | 1984-02-07 | 三菱重工業株式会社 | hermetic compressor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51118464A (en) * | 1975-04-10 | 1976-10-18 | Yaskawa Electric Mfg Co Ltd | Multi-functional detector of position, velocity and direction |
| JPS5919984B2 (en) * | 1980-09-19 | 1984-05-10 | 大同特殊鋼株式会社 | Corrosion-resistant material for molten sodium polysulfide |
-
1985
- 1985-08-01 JP JP1985117253U patent/JPH037586Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761188U (en) * | 1980-09-30 | 1982-04-10 | ||
| JPS5919984U (en) * | 1982-07-28 | 1984-02-07 | 三菱重工業株式会社 | hermetic compressor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996003268A1 (en) * | 1994-07-28 | 1996-02-08 | Dai Nippon Printing Co., Ltd. | Method of foil decorating in injection molding and apparatus therefor |
| US6071456A (en) * | 1994-07-28 | 2000-06-06 | Dai Nippon Printing Co., Ltd. | Process for effecting injection-molded-in decoration |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037586Y2 (en) | 1991-02-25 |