JPS62264118A - Contactless pneumatic holding device for work - Google Patents

Abstract

PURPOSE:To prevent the breakage of a work by forming the inside edge surface of the opened port on the undersurface of a pad into a curved form having a smooth circular arc form and forming a flange-shaped turn-over part at the top and suspending the work through absorbing by introducing air. CONSTITUTION:When a work 9 such as silicone wafer is sent to the edge of a conveyor 13, a pad A installed onto an arm 7 lowers by a certain distance, and a sensor 8 detects said lowering, and then a solenoid valve 10 is opened, and the air in a blower 11 is sent into a box-shaped body 1 having a curved part 3 and a flange-shaped turn-over part 4 at the opened port on the undersurface from an air feeding port 2, and the work 9 is suspended, allowing a guide 5 to prevent the lateral shift of the work 9. When a sensor 8' detects said suspension, the arm 7 rises, and then the work 9 is shifted over a transfer base 14 by the turn of a robot 6, and then the solenoid valve 10 is closed, and the work 9 is released from the pad A and loaded onto the transfer base 14. Therefore, the breakage or the contamination of the work can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION The workpieces that have come are suctioned and suspended from the pad without contact, and the workpieces, such as precision parts such as a hard disk, silicon wafer, and photomask, are extremely sensitive to scratches and dirt. Therefore, great care must be taken when transporting them.

Conventionally, these parts have been repelled using a vacuum transfer pad, chuck, etc., but this has inevitably resulted in scratches and dirt left by the pads, which has impaired the value of the XfM product.

The present invention has been made to improve these drawbacks.

The present invention includes a transport device such as a conveyor, and a box-like body (1) whose top surface is closed and whose bottom surface is open, and which has an air inlet port (2) on the top surface, so that the inner end surface of the open bottom part is formed into a smooth circle. The bent portion (3) is formed into an arc shape to form a bent portion (3).
) is provided with a folded part (4) that folds back upwards, and the pad (A) and this pad ( A
) is installed in close proximity to the pad (A) and detects the presence and approach of 1 workpiece (9). 1 drop≠≠#
;Keg also connects the air inlet (2) of the pad (A) and the blower (1)
1) Connecting hose (12) Solenoid valve α interposed in the middle
Senna (8) that opens and closes Q, (+ () and work (9)
This is a device consisting of a transfer table (14) for transferring.

The transfer tool and the transfer piece are comprised of equipment that has the function of performing reciprocating movements such as forward and backward movement, lifting, turning, etc. using a robot) motor, cylinder, etc.

The transfer table may include a) an accumulation table, a stock case) an inspection device, and one machine and equipment.

Preferred examples of the present invention will be described below with reference to the accompanying drawings; however, the present invention is not limited thereto.

The pad (A) used in the present invention is 1 as shown in Figs. 2 and 3.
By feeding the workpiece (9) into the bending portion (3), the workpiece (9) is suctioned and suspended by the pad (A)K without contact.

A guide (5) attached to the side of the box-like body (1) serves to prevent the workpiece (9) suspended from moving freely.

Figure 1 shows a line in which works (9) sent from conveyor (13) K are stacked on transfer table (14).

The pad (A) is a robot (6) which is a rotatable transfer device.
) is attached to an arm (7) that is a movable transfer piece. Senna (8)% (81 is arm (
7) to detect the presence and approach of the workpiece (9). A blower (12) is connected to the air inlet (2) of the pad (A) by a hose (12) via a solenoid valve a1.
K is connected.

When the workpiece is sent to the end of the conveyor (13), the pad (A) attached to the arm (7) K, which was waiting just above the workpiece (9), descends and the pad (A) When it reaches a certain distance from the workpiece (9))
Senna (8) detects K, stops the lowering of arm 1 (7), simultaneously opens solenoid valve αQ, and transfers the air sent from blower 1 (11) to air inlet (2) and pad (A). 1 workpiece (9) is suspended without contact.

When the sensor detects that the workpiece (9) is suspended on the pad (A), one arm (7) rises and at the same time the robot (6) turns and lifts the workpiece (9) on the transfer table (14).
), the rotation is stopped and the solenoid valve αQ is activated.
is closed, the air supplied to pad (A) is cut off, and one workpiece (9) is released from pad (A) and transferred to transfer table (14).
are laminated at predetermined positions.

As described above, the present invention makes it possible to transfer one workpiece without contact, and prevents scratches and stains on the workpiece during transfer.

[Brief explanation of drawings]

FIG. 1 is an embodiment of the present invention. FIG. 2 is a plan view of the pad. The third tooth is a cross-sectional side view of the pad. In the figure, (1) - Box-shaped body (2) - Air inlet (3) - Bent part (6) - Robot (7] - Arm +5osi - Seven sensors (9) - Wall 4 - Solenoid valve (11) ) ~Blower (12) ~Hose (13) ~Conveyor (14) ~Transfer platform name Continuation of title (spontaneous) 1. Display of μ 1985 Patent Application No. 108197 2
, Title of the invention Contactless workpiece air retainer 3, trap d
Patent applicant: Hiroshi Akashi (L, Address: 2-7-12-4, Kitasakuragi, Toonaka City, Osaka Prefecture, Address: L (Name: 5, Date of Arrest: Voluntary) Amendment 6, Subject of amendment Specification 2, Claims, Detailed description of the invention
The column "Simplified appendix of drawings (1), r Claims" will be changed as follows. ``A transfer device that transfers a workpiece, a moving tool that is capable of reciprocating between the transfer device and a transfer location that transfers the workpiece, and includes a moving piece that can be raised and lowered, and that is attached to the moving piece. The upper part of the box upper body is closed and the upper part is open, and the upper surface of the box upper body is equipped with an air inlet [ ], and the open inner end surface of the lower part is formed into a smooth arc shape to form a bent part, and the bent part A pad is provided with a flange-shaped folded part at the end of the pad, and a workpiece can be suspended without contact by supplying air from the air supply 1, and an air supply port is provided with an on-off valve interposed in the pad. A non-contact work air retainer consisting of an air blower that communicates with the pad and blows air to the pad. (2), Detailed explanation of the invention (j) will be changed as follows. B. Delete "curves upwards" in line 17 of page 3 (2) of the specification, and after "beyond..." [flange-shaped J
will join. "The shape of the folded part (4) is perpendicular to the axis of the box-shaped body (1), and is either upward or downward,
An appropriate shape of clover is selected and formed according to the properties of the workpiece (9). ” (3), r Brief explanation of the drawing” column A, and the statement (5) page, line 12, add ``Side view,'' followed by alighting. [FIG. 4 is a sectional view showing a parallel folded portion, and FIG. 5 is a sectional view showing a downward folded portion. °'', add the following after line 17 on page 5 of the statement. [(4) ~ Folded part (4') (4'') ~ Folded part "4, r drawing" is replaced with the attached drawing. that's all

Claims (1)

[Claims] A transfer device that transfers a workpiece, a moving tool that is capable of reciprocating between the transfer device and a transfer location that transfers the workpiece and includes a movable piece that can be raised and lowered, and an upper part that is attached to the moving piece. An air inlet is provided on the upper surface of the box-like body which is closed and the lower part is open, and the open inner end surface of the lower part is formed into a smooth arc shape to form a bent part. A pad is provided with a folded portion that curves upward first, and allows the workpiece to be suspended without contact by supplying air from the air inlet, and the pad is communicated with the air inlet through an on-off valve. A non-contact workpiece air holding device comprising: a blower device that blows air to the pad; and a sensor that detects a workpiece on the conveyance device, lowers the moving piece upon detection of the workpiece, and opens the opening/closing valve.