JPS6226034U - - Google Patents
Info
- Publication number
- JPS6226034U JPS6226034U JP11588685U JP11588685U JPS6226034U JP S6226034 U JPS6226034 U JP S6226034U JP 11588685 U JP11588685 U JP 11588685U JP 11588685 U JP11588685 U JP 11588685U JP S6226034 U JPS6226034 U JP S6226034U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- view
- platform
- quartz board
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11588685U JPS6226034U (de) | 1985-07-30 | 1985-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11588685U JPS6226034U (de) | 1985-07-30 | 1985-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6226034U true JPS6226034U (de) | 1987-02-17 |
Family
ID=30999961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11588685U Pending JPS6226034U (de) | 1985-07-30 | 1985-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226034U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04354349A (ja) * | 1991-05-31 | 1992-12-08 | Shin Etsu Handotai Co Ltd | ウエーハの自動エッチング装置 |
-
1985
- 1985-07-30 JP JP11588685U patent/JPS6226034U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04354349A (ja) * | 1991-05-31 | 1992-12-08 | Shin Etsu Handotai Co Ltd | ウエーハの自動エッチング装置 |
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