JPS62245104A - 寸法測定装置 - Google Patents

寸法測定装置

Info

Publication number
JPS62245104A
JPS62245104A JP8605686A JP8605686A JPS62245104A JP S62245104 A JPS62245104 A JP S62245104A JP 8605686 A JP8605686 A JP 8605686A JP 8605686 A JP8605686 A JP 8605686A JP S62245104 A JPS62245104 A JP S62245104A
Authority
JP
Japan
Prior art keywords
mirror
measured
along
lens
deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8605686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0412802B2 (enrdf_load_stackoverflow
Inventor
Toshiji Kojima
小島　利治
Yuji Takeuchi
雄二 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP8605686A priority Critical patent/JPS62245104A/ja
Publication of JPS62245104A publication Critical patent/JPS62245104A/ja
Publication of JPH0412802B2 publication Critical patent/JPH0412802B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP8605686A 1986-04-16 1986-04-16 寸法測定装置 Granted JPS62245104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8605686A JPS62245104A (ja) 1986-04-16 1986-04-16 寸法測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8605686A JPS62245104A (ja) 1986-04-16 1986-04-16 寸法測定装置

Publications (2)

Publication Number Publication Date
JPS62245104A true JPS62245104A (ja) 1987-10-26
JPH0412802B2 JPH0412802B2 (enrdf_load_stackoverflow) 1992-03-05

Family

ID=13876031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8605686A Granted JPS62245104A (ja) 1986-04-16 1986-04-16 寸法測定装置

Country Status (1)

Country Link
JP (1) JPS62245104A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0412802B2 (enrdf_load_stackoverflow) 1992-03-05

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