JPS6223447U - - Google Patents
Info
- Publication number
- JPS6223447U JPS6223447U JP11515285U JP11515285U JPS6223447U JP S6223447 U JPS6223447 U JP S6223447U JP 11515285 U JP11515285 U JP 11515285U JP 11515285 U JP11515285 U JP 11515285U JP S6223447 U JPS6223447 U JP S6223447U
- Authority
- JP
- Japan
- Prior art keywords
- leak
- support surface
- groove
- suction
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11515285U JPH0338835Y2 (https=) | 1985-07-29 | 1985-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11515285U JPH0338835Y2 (https=) | 1985-07-29 | 1985-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6223447U true JPS6223447U (https=) | 1987-02-13 |
| JPH0338835Y2 JPH0338835Y2 (https=) | 1991-08-15 |
Family
ID=30998532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11515285U Expired JPH0338835Y2 (https=) | 1985-07-29 | 1985-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338835Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006230837A (ja) * | 2005-02-28 | 2006-09-07 | Pentax Corp | 内視鏡の湾曲装置 |
| KR101246864B1 (ko) * | 2012-05-07 | 2013-04-02 | 엘아이지에이디피 주식회사 | 기판 척킹장치 |
-
1985
- 1985-07-29 JP JP11515285U patent/JPH0338835Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006230837A (ja) * | 2005-02-28 | 2006-09-07 | Pentax Corp | 内視鏡の湾曲装置 |
| KR101246864B1 (ko) * | 2012-05-07 | 2013-04-02 | 엘아이지에이디피 주식회사 | 기판 척킹장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0338835Y2 (https=) | 1991-08-15 |