JPS6222509U - - Google Patents
Info
- Publication number
- JPS6222509U JPS6222509U JP11320585U JP11320585U JPS6222509U JP S6222509 U JPS6222509 U JP S6222509U JP 11320585 U JP11320585 U JP 11320585U JP 11320585 U JP11320585 U JP 11320585U JP S6222509 U JPS6222509 U JP S6222509U
- Authority
- JP
- Japan
- Prior art keywords
- driven body
- position detection
- detection marker
- reflectance
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003550 marker Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11320585U JPS6222509U (OSRAM) | 1985-07-24 | 1985-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11320585U JPS6222509U (OSRAM) | 1985-07-24 | 1985-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6222509U true JPS6222509U (OSRAM) | 1987-02-10 |
Family
ID=30994783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11320585U Pending JPS6222509U (OSRAM) | 1985-07-24 | 1985-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6222509U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313453A (en) * | 1976-07-23 | 1978-02-07 | Chisso Corp | Two point contactless optical displacement measuring apparatus |
| JPS5529767A (en) * | 1978-08-24 | 1980-03-03 | Agency Of Ind Science & Technol | Measuring method for displacement of target mark |
-
1985
- 1985-07-24 JP JP11320585U patent/JPS6222509U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313453A (en) * | 1976-07-23 | 1978-02-07 | Chisso Corp | Two point contactless optical displacement measuring apparatus |
| JPS5529767A (en) * | 1978-08-24 | 1980-03-03 | Agency Of Ind Science & Technol | Measuring method for displacement of target mark |