JPS622245U - - Google Patents

Info

Publication number
JPS622245U
JPS622245U JP9151685U JP9151685U JPS622245U JP S622245 U JPS622245 U JP S622245U JP 9151685 U JP9151685 U JP 9151685U JP 9151685 U JP9151685 U JP 9151685U JP S622245 U JPS622245 U JP S622245U
Authority
JP
Japan
Prior art keywords
waveguide
plasma
plasma generating
generation source
microwave generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9151685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447958Y2 (US06534493-20030318-C00166.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985091516U priority Critical patent/JPH0447958Y2/ja
Publication of JPS622245U publication Critical patent/JPS622245U/ja
Application granted granted Critical
Publication of JPH0447958Y2 publication Critical patent/JPH0447958Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1985091516U 1985-06-19 1985-06-19 Expired JPH0447958Y2 (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985091516U JPH0447958Y2 (US06534493-20030318-C00166.png) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985091516U JPH0447958Y2 (US06534493-20030318-C00166.png) 1985-06-19 1985-06-19

Publications (2)

Publication Number Publication Date
JPS622245U true JPS622245U (US06534493-20030318-C00166.png) 1987-01-08
JPH0447958Y2 JPH0447958Y2 (US06534493-20030318-C00166.png) 1992-11-12

Family

ID=30647476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985091516U Expired JPH0447958Y2 (US06534493-20030318-C00166.png) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPH0447958Y2 (US06534493-20030318-C00166.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPH0447958Y2 (US06534493-20030318-C00166.png) 1992-11-12

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