JPS62224488A - Laser beam machine - Google Patents

Abstract

PURPOSE:To shape a laser light without being affected by the wavelength of the laser light and to enable a stable laser machining by composing the optical system by arranging a bend reflecting mirror and cylindrical reflecting mirror on the laser light path. CONSTITUTION:The bend reflecting mirror 10 converting the light path in the horizontal direction and at right angles is set up on the light path of the laser light 4 which is emitted in the horizontal direction from a laser oscillating device 1. The bend reflecting mirror 10 is formed in the bend plane at the angle <=180 deg.C by two metal made reflecting planes 11a, 11b. The reflecting mirror 10 makes the laser light 4 incident on a bend boundary line 12, reflecting by straddling equally on the two reflecting planes. A metal made cylindrical reflecting mirror 13 is set up in opposition to the reflecting mirror 10 and the ridge line direction thereof is faced in the right angles direction to the bend boundary line 12. The laser light 4 is contracted in (a) direction by the reflecting mirror 10 and shaped in a mask pattern shape by being contracted in (b) direction on the whole by the cylindrical reflecting mirror 13.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a laser processing device, and particularly to an optical system for shaping a beam of laser light.

(Conventional technology) Laser processing technology has been put into practical use in many fields and has achieved remarkable results. One example of such processing is laser marking, which involves scratching the surface of an object by irradiating it with laser light, instead of printing or marking. X for laser marking processing technology
One method uses a Y-scanning mirror or an XY table to scan the laser beam and the object to be irradiated relative to another, and the other uses a mask formed by cutting out a predetermined pattern to form an image of the laser beam that has passed through the pattern. There is a two-part method of doing this. The former method uses a YAG@ solid-state laser, while the latter uses a general T laser.
Fi A (Transversally Excit
ed Atomos-pherlc Pressure
) ■Two lasers are used.

An example of a device using this latter method will be explained using FIG. 2. That is, (1) is T B A CO2 laser emission device 1 (hereinafter simply referred to as laser oscillation device), (2
), (3) are a pair of reflection fffl that reflect the emitted laser beam (4) and change it into an optical path toward the irradiated object (5).
, (6) is a cylindrical lens as an optical system that is installed in the reflected optical path reflected by the reflecting mirror (3) located at the rear stage and shapes the luminous flux of the laser beam (4), (7) is a mask, (8) ) is a condensing lens that condenses the laser beam that has passed through the mask (7). The problem with the above configuration is that the wavelength of the laser beam (4) is 10.6 μm, so the lens system, that is, the optical lens (6), cannot use glass that absorbs the above wavelength, so KCl, Zn5
The point is that a crystal material must be used that is difficult to absorb the above wavelengths such as e. There is a price problem in that these materials are more expensive than glass, but moreover, these materials tend to absorb moisture, and unless the humidity in the environment in which they are used is not strictly controlled, the transmittance will change. Another problem was that stable laser processing could not be performed.

(Problems to be Solved by the Invention) Therefore, it is an object of the present invention to provide a laser processing device that eliminates the problems caused by such material characteristics and is equipped with an optical system that shapes the laser beam without being affected by the wavelength of the laser beam. purpose.

[Structure of the invention]

(Means and effects for solving the problem) In a laser processing device equipped with a laser oscillator and an optical system that shapes the beam of laser light emitted from the laser oscillator, the optical system is connected to a 180-degree angle by two reflecting planes. It consists of a bending reflector formed on a bending reflection surface with a bending angle of less than 30 degrees and the above-mentioned laser beam path cylindrical reflector, eliminating the need for an optical system using a light-transmitting material as much as possible and eliminating management complications. be.

(Example) Hereinafter, an explanation will be given based on FIG. 1 showing an example.

Note that parts common to those in FIG. 2 are designated by the same reference numerals, and explanations thereof will be omitted. That is, in FIG. 1, a bending reflector tR is installed in the optical path of the laser beam (4) emitted horizontally from the laser oscillation device (1) to change the optical path horizontally and at right angles. There is.

This bending reflector (10 is two metal reflective planes (ll
a).

(llb) formed into a bent plane with an angle of less than 180 degrees. This bending reflector (IQ) allows the laser beam (4) to enter its bending boundary line α2 and reflects the laser beam (4) equally between the two reflecting planes (lla) and (llb). In addition, a cylindrical reflector (1), also made of metal, is installed opposite the bending reflector (10). It is oriented in a direction perpendicular to the bending boundary line U.The above bending reflector tUt and the cylindrical reflector a3 constitute an optical system that shapes the luminous flux of the laser beam.Reflection at the cylindrical reflector α The emitted laser light is passed through a mask (7
), the light enters the irradiated object (5) through the condensing lens (8).

In the above configuration, the laser beam (4) is transmitted through the bending reflector QO
It is shrunk in the direction (a) in the figure by I, and further shrunk in the direction (b) in the figure as a whole by the cylindrical reflector (131) to almost have a mask pattern shape.

In the above embodiments, the bending reflecting mirror is described as if it were made by combining two plane reflecting mirrors, but it may be formed by bending one plane reflecting mirror at a predetermined angle. Further, even if the arrangement of the bending reflector and the cylindrical reflector is reversed to that of the above embodiment, the effect will not change in any way. Note that these optical systems are not limited to one set, but a plurality of sets may be arranged to shape the beam of laser light into multiple stages. Also,
Although an example of laser marking processing is shown, it can be applied to processing such as heat treatment such as hardening.

〔Effect of the invention〕

Since the beam of laser light is shaped using a reflective optical system instead of using a transparent material, cost and management problems are solved.
Stable laser processing is now possible.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional example. (1)... Laser oscillator, α1... Bent reflector, α-ken... Cylindrical reflector.

Claims (2)

[Claims] (1) In a laser processing device equipped with a laser oscillator and an optical system that shapes the beam of laser light emitted from the laser oscillator, the optical system has two reflecting planes that
1. A laser processing device characterized in that a bent reflecting mirror formed on a bent reflecting surface having an angle of less than 0 degrees and a cylindrical reflecting mirror are disposed on a laser beam path. (2) The laser processing apparatus according to claim 1, wherein the bending boundary line of the bending reflector and the ridgeline of the cylindrical reflector are arranged at right angles to each other.