JPS622241U - - Google Patents
Info
- Publication number
- JPS622241U JPS622241U JP9418785U JP9418785U JPS622241U JP S622241 U JPS622241 U JP S622241U JP 9418785 U JP9418785 U JP 9418785U JP 9418785 U JP9418785 U JP 9418785U JP S622241 U JPS622241 U JP S622241U
- Authority
- JP
- Japan
- Prior art keywords
- filling hole
- boat body
- chamber
- top surface
- slide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9418785U JPS622241U (enExample) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9418785U JPS622241U (enExample) | 1985-06-20 | 1985-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS622241U true JPS622241U (enExample) | 1987-01-08 |
Family
ID=30652525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9418785U Pending JPS622241U (enExample) | 1985-06-20 | 1985-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS622241U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63215803A (ja) * | 1987-03-03 | 1988-09-08 | Hisaka Works Ltd | 熱回収装置の最適運転方法 |
-
1985
- 1985-06-20 JP JP9418785U patent/JPS622241U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63215803A (ja) * | 1987-03-03 | 1988-09-08 | Hisaka Works Ltd | 熱回収装置の最適運転方法 |