JPS622241U - - Google Patents

Info

Publication number
JPS622241U
JPS622241U JP9418785U JP9418785U JPS622241U JP S622241 U JPS622241 U JP S622241U JP 9418785 U JP9418785 U JP 9418785U JP 9418785 U JP9418785 U JP 9418785U JP S622241 U JPS622241 U JP S622241U
Authority
JP
Japan
Prior art keywords
filling hole
boat body
chamber
top surface
slide plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9418785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9418785U priority Critical patent/JPS622241U/ja
Publication of JPS622241U publication Critical patent/JPS622241U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP9418785U 1985-06-20 1985-06-20 Pending JPS622241U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9418785U JPS622241U (enrdf_load_stackoverflow) 1985-06-20 1985-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9418785U JPS622241U (enrdf_load_stackoverflow) 1985-06-20 1985-06-20

Publications (1)

Publication Number Publication Date
JPS622241U true JPS622241U (enrdf_load_stackoverflow) 1987-01-08

Family

ID=30652525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9418785U Pending JPS622241U (enrdf_load_stackoverflow) 1985-06-20 1985-06-20

Country Status (1)

Country Link
JP (1) JPS622241U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215803A (ja) * 1987-03-03 1988-09-08 Hisaka Works Ltd 熱回収装置の最適運転方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215803A (ja) * 1987-03-03 1988-09-08 Hisaka Works Ltd 熱回収装置の最適運転方法

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