JPS62222080A - Composite equipment for continuously coating strip - Google Patents
Composite equipment for continuously coating stripInfo
- Publication number
- JPS62222080A JPS62222080A JP6478386A JP6478386A JPS62222080A JP S62222080 A JPS62222080 A JP S62222080A JP 6478386 A JP6478386 A JP 6478386A JP 6478386 A JP6478386 A JP 6478386A JP S62222080 A JPS62222080 A JP S62222080A
- Authority
- JP
- Japan
- Prior art keywords
- strip
- ion plating
- rewinding
- winding
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 16
- 239000011248 coating agent Substances 0.000 title claims abstract description 11
- 239000002131 composite material Substances 0.000 title claims 2
- 238000004804 winding Methods 0.000 claims abstract description 17
- 238000007733 ion plating Methods 0.000 claims abstract description 11
- 238000004544 sputter deposition Methods 0.000 claims abstract description 10
- 230000005684 electric field Effects 0.000 abstract description 2
- 239000011261 inert gas Substances 0.000 abstract description 2
- 239000011247 coating layer Substances 0.000 description 13
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は金属はプラスチックなど各種帯板の表面に１層
、２層あるいは多層のコーティングを連続的に施すため
の装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an apparatus for continuously applying single, double or multilayer coatings to the surface of various metal or plastic strips.
従来の技術
材料に耐食性や装飾性などを付与するために、表面にコ
ーティングを施す手段として、塗装、メッキ、蒸着など
が古くから行われている。近年。BACKGROUND OF THE INVENTION Painting, plating, vapor deposition, etc. have been used for a long time as a means of applying a coating to a surface of a material in order to impart corrosion resistance or decorative properties to the material. recent years.
イオンプレーティング、スパッタリング、プラズマＣＶ
Ｄ （ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉ
ｔｉｏｎ）などのいわゆるドライコーティング法により
、優れた耐食性、装飾性、耐Ｊ’ｊ！ 此性を有する被
覆層が得られることがわかり、このような方法によって
コーティングされた高付加価値材料の要求が高まってい
る。Ion plating, sputtering, plasma CV
D (chemical vapor deposition
Excellent corrosion resistance, decorative properties, and J'j! It has been found that coating layers having this property can be obtained, and there is an increasing demand for high value-added materials coated by such methods.
発明が解決しようとする問題点
従来のドライコーティング法は、切板などを真空容器に
入れてコーティングするバッチ処理によって行われてお
り、また、帯板に連続的にコーティングする方法も知ら
れているが、いずれも単一の処理である。各種ドライコ
ーティング法により施された皮膜は、それぞれ特有の特
性を有しているので、単一の処理手段では、限られた特
性のものしか得られない。Problems to be Solved by the Invention Conventional dry coating methods are carried out by batch processing in which cut plates are placed in a vacuum container and coated, and methods in which strips are coated continuously are also known. However, each is a single process. Since films applied by various dry coating methods each have unique characteristics, only limited characteristics can be obtained using a single processing method.
未発ツ１は、帯板に連続的に複数のドライコーティング
を施し、単層あるいは多層の被覆層を生成させ、耐食性
、装飾性、耐摩耗性など各種多様の特性を有するコイル
製品を比較的短時間で製造する設備を目的とする。Unhatsu 1 is a comparatively popular method of producing coil products that have various characteristics such as corrosion resistance, decorativeness, and abrasion resistance by continuously applying multiple dry coatings to the strip to create single or multilayer coating layers. The purpose is equipment that can produce products in a short period of time.
問題点を解決するための手段
本発明は、２２Ｊｌｉの巻出巻取装置の間にイオンプレ
ーティング装置（以下■ｐ装置という）とスパッタリン
グ装２１（以下ＳＰ装置という）を直列に設けたことを
特徴とする。ＩＰ装置とＳＰ装置は連通した真空容器内
に設け１巻出巻取装置は該連通した真空容器内に設けて
もよく、また真空容器外に設けてもよい。Means for Solving the Problems The present invention provides an ion plating device (hereinafter referred to as p device) and a sputtering device 21 (hereinafter referred to as SP device) in series between the unwinding and winding device of 22Jli. Features. The IP device and the SP device may be provided in a vacuum vessel that communicates with each other, and the single unwinding and winding device may be provided within the vacuum vessel that communicates with each other, or it may be provided outside the vacuum vessel.
以下に本発明設備を図面に示す例によって説明する。第
１図は２７Ｊ：の巻出巻取装２ｔｌ、１の間にＩＰ装置
２とＳＰ装置３とが直列に設けられ、これら各装置が連
通した真空容器４内に収容されている。The equipment of the present invention will be explained below using examples shown in the drawings. In FIG. 1, an IP device 2 and a SP device 3 are provided in series between the unwinding and winding devices 2tl and 1 of 27J, and these devices are housed in a vacuum container 4 in communication with each other.
真空容器４は１巻出巻取装置１．１の間で一体的に構成
され、排気装置Ｐにより各部位が所定の真空度に保たれ
るよう排気される。The vacuum container 4 is integrally constructed between the first unwinding and winding device 1.1, and is evacuated by an exhaust device P so that each part is maintained at a predetermined degree of vacuum.
巻出巻取装置１．１は、帯板Ｓのコイルを巻き出し、あ
るいは巻き出された帯板Ｓを巻取るものである。The unwinding and winding device 1.1 unwinds a coil of the strip S, or winds up the unwound strip S.
ＩＰ装置２は、蒸発源となるターゲット５を加熱あるい
は電子ビーム照射等により蒸発させイオン化し、帯板Ｓ
の表面に被覆層を形成させるものである。The IP device 2 evaporates and ionizes a target 5, which serves as an evaporation source, by heating or electron beam irradiation.
A coating layer is formed on the surface of the material.
Ｓｒ装Ｍ３は、不活性ガスを電界中でイオン化しターゲ
ラ！・６に衝突させて、ターゲット６の原子あるいは分
子をはじき出して、帯板Ｓの表面に被覆層を形成させる
ものである。Sr-loaded M3 ionizes inert gas in an electric field. 6, the atoms or molecules of the target 6 are thrown out, and a coating layer is formed on the surface of the strip S.
なお、第１図中の７は予熱ヒータ、８はガス導入口、９
はＩＰ装置ヒータ、ｌＯはＳＰ装置ヒータ、１１はスリ
ットである。スリット１１は、ＩＰ装置、ＳＰ装置内を
所定の真空度に保つためのものであり、公知の各種手段
を用いてもよい。In addition, 7 in Fig. 1 is a preheating heater, 8 is a gas inlet, and 9 is a preheater.
is an IP device heater, IO is an SP device heater, and 11 is a slit. The slit 11 is for maintaining a predetermined degree of vacuum inside the IP device and the SP device, and various known means may be used.
第２図は、２基の巻出巻取装置を真空容器外に設けた例
を示し、巻出巻取装置１．１と真空容器５との間には差
圧シール装置１２、【２が設けられている。差圧シール
装置１２は、大気と真空の間を段階的にシールするもの
であり、第２図に示すようなロールを用いるほか、各種
タイプのものを用いることもできる。FIG. 2 shows an example in which two unwinding and winding devices are installed outside the vacuum container, and a differential pressure sealing device 12, [2] is installed between the unwinding and winding device 1.1 and the vacuum container 5. It is provided. The differential pressure sealing device 12 seals between the atmosphere and vacuum in stages, and in addition to using a roll as shown in FIG. 2, various types of devices can also be used.
作用
巻出巻取装置１、ｌのいずれか一方に帯板Ｓのコイルを
装着し、帯板Ｓの一端を他方に＼装着して、真空容器４
内を排気する。つぎにＩＰ装置２、ＳＰ装置３のうちの
所望の装置に所望の反応ガスを導入し、各ポンプＰによ
り、各装置内を所定の真空度に維持する。ついで、予熱
ヒータ７および所望の装置内のヒータ９、ｌＯにより帯
板Ｓを所定温度に加熱しつつ通板させ、コーティングを
行う。The coil of the strip S is attached to either one of the unwinding and winding devices 1 and 1, one end of the strip S is attached to the other, and the vacuum container 4 is opened.
Exhaust the inside. Next, a desired reaction gas is introduced into a desired one of the IP device 2 and the SP device 3, and each pump P maintains the inside of each device at a predetermined degree of vacuum. Next, the strip S is heated to a predetermined temperature by the preheating heater 7 and the heaters 9 and 10 in a desired device and is passed through the strip to perform coating.
ＩＰ装置２、Ｓｒ装ご３を第１図のように配設し、帯板
Ｓを第１図の右から左に通板すると、ＩＰ装置２とＳＰ
装置３を作動した場合には、イオンプレーティング被覆
層とスパッタリング被覆層の２層コーティングが施され
る。また第１図の配置で、イオンプレーティング被覆層
、スパッタリング被覆層、イオンプレーティング被覆層
を順に形成した３層コーティングを施す場合は、まず、
ＩＰ装？Ｉ２およびＳＰ装置３を作動して図の右から左
に通板し、再びＩＰ装置２を作動して図の左から右に通
板すればよい。When the IP device 2 and the Sr packaging 3 are arranged as shown in Fig. 1, and the strip S is passed from right to left in Fig. 1, the IP device 2 and the SP
When the apparatus 3 is operated, a two-layer coating is applied: an ion plating coating layer and a sputtering coating layer. In addition, when applying a three-layer coating in which an ion plating coating layer, a sputtering coating layer, and an ion plating coating layer are sequentially formed using the arrangement shown in Fig. 1, first,
IP equipment? It is sufficient to operate I2 and SP device 3 to pass the sheet from right to left in the figure, and then operate IP device 2 again to pass the sheet from left to right in the figure.
このようにして、イオンプレーティング被覆層、スパッ
タリング被覆層のうちから選択した任意の被覆層を有す
る単層あるいは多層コーティングを施すことができる。In this way, it is possible to apply a single layer or multilayer coating having any coating layer selected from ion plating coating layers and sputtering coating layers.
複数のイ１？板を連続的にコーティングする場合は、帯
板を巻出した側の巻出巻取装置に次に処理する帯板のコ
イルを装着し、前に処理した帯板の後端に接続して通板
する。このとき、第１図の例では、巻出巻取装置ｔと予
熱ヒータ７との間をしゃ断して巻出巻取装置１の部分の
みをリークし、コイルを脱着し排気して行うなどの手段
により、設備全体をリークせずに連続して処理すること
ができる。第２図の例では、巻出巻取装置１が真空容器
外にあるので、コイルの脱着が容易である。Multiple i1? When coating strips continuously, the coil of the next strip to be treated is attached to the unwinding device on the side where the strip was unwound, and connected to the rear end of the previously treated strip. Board. At this time, in the example shown in FIG. 1, the connection between the unwinding and winding device t and the preheating heater 7 is cut off, only the portion of the unwinding and winding device 1 is leaked, and the coil is attached and removed and the air is exhausted. This means that the entire installation can be processed continuously without leakage. In the example shown in FIG. 2, since the unwinding and winding device 1 is located outside the vacuum container, it is easy to attach and detach the coil.
実施例
ステンレス鋼帯表面にＴｉＮとアモルファス５ｉ０２（
以下α−５ｉ０２という）の２層コーティングを施し、
装飾性と耐食性の優れた自動車モール用ステンレスコイ
ルを製造した例を示す。Example: TiN and amorphous 5i02 (
A two-layer coating of α-5i02 (hereinafter referred to as α-5i02) is applied,
An example of manufacturing a stainless steel coil for automobile moldings with excellent decorativeness and corrosion resistance is shown below.
厚さ０．５ｗｍ 、幅３００ｍｍ＋の３０４系ステンレ
ス鋼帯をラインスピード０．１ｆｆｌ／分で通板しなが
ら、まずＩＰ装置により蒸発源としてＴｉを、反応ガス
としてＮ２を使用し、真空度１Ｏ−３Ｔｏｒｒに維持し
てＴｉＮをコーティングした後、ＳＰ装置により蒸発源
としてＳ ｉ ０２を、スバ、タガスとしてＡ「を使用
し真空度１０＝Ｔｏｒｒに維持して、Ｔ ｉ Ｎ ｆ、
％膜上にａ−Ｓｉ０２をコーティングした。その結果、
金色で装飾性と耐食性ともに優れたモール材用ステンレ
スコイルが得られた。While passing a 304 series stainless steel strip with a thickness of 0.5 wm and a width of 300 mm+ at a line speed of 0.1 ffl/min, first, using an IP device, Ti was used as an evaporation source and N2 was used as a reaction gas, and the vacuum degree was 1 O-. After coating TiN while maintaining the pressure at 3 Torr, using an SP device, using S i 02 as the evaporation source and A' as the evaporation source and maintaining the vacuum level at 10 Torr, TiN f,
% film was coated with a-Si02. the result,
A gold-colored stainless steel coil for molding material with excellent decorative properties and corrosion resistance was obtained.
発明の効果
本発明により、金属やプラスチックなど各種帯板の表面
に各種被覆層からなる単層あるいは多層のコーティング
が連続処理で短時間に形成され、装飾性、耐食性、＃摩
耗性等の各種特性を有する帯板コイル製品が製造できる
。Effects of the Invention According to the present invention, single-layer or multi-layer coatings consisting of various coating layers can be formed on the surface of various strips such as metals and plastics in a short time by continuous processing, and various properties such as decorativeness, corrosion resistance, and abrasion resistance can be formed. It is possible to manufacture strip coil products with
第１図及び第２図は本発明設備の一例を示す概略図であ
る。
１・・・巻出巻取装置、２・・・イオンプレーティング
装置、３・・・スパッタリング装置、４・・・真空容器
、５．６ｍ番・ターゲット、７・・−予熱ヒータ、８・
・・ガス導入口、９・・ΦＩＦ装置ヒータ、 １０・Φ
ΦＳＰ装置ヒータ、１１Φ・・スリット、１２・番・差
圧シール装置、Ｐ・・・排気装置（ポンプ）、Ｓ・・・
帯板。
代理人弁理士 井 上 雅 生
第 １ 口
第 ２ｍFIGS. 1 and 2 are schematic diagrams showing an example of the equipment of the present invention. DESCRIPTION OF SYMBOLS 1... Unwinding and winding device, 2... Ion plating device, 3... Sputtering device, 4... Vacuum container, 5.6m target, 7... - Preheating heater, 8...
・・Gas inlet, 9・・ΦIF device heater, 10・φ
ΦSP device heater, 11Φ...slit, 12th differential pressure seal device, P...exhaust device (pump), S...
strip. Representative Patent Attorney Masaru Inoue, 1st, 2nd M
Claims (1)
スパッタリング装置を直列に設けたことを特徴とする帯
板連続複合コーティング設備。A strip continuous composite coating facility characterized by having an ion plating device and a sputtering device installed in series between two unwinding and winding devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6478386A JPS62222080A (en) | 1986-03-25 | 1986-03-25 | Composite equipment for continuously coating strip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6478386A JPS62222080A (en) | 1986-03-25 | 1986-03-25 | Composite equipment for continuously coating strip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62222080A true JPS62222080A (en) | 1987-09-30 |
Family
ID=13268162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6478386A Pending JPS62222080A (en) | 1986-03-25 | 1986-03-25 | Composite equipment for continuously coating strip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62222080A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152273A (en) * | 1987-12-10 | 1989-06-14 | Nkk Corp | Method and device for continuous vacuum deposition |
-
1986
- 1986-03-25 JP JP6478386A patent/JPS62222080A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152273A (en) * | 1987-12-10 | 1989-06-14 | Nkk Corp | Method and device for continuous vacuum deposition |
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