JPS62221456A - Apparatus for treating flue gas from optical fiber manufacturing process - Google Patents

Apparatus for treating flue gas from optical fiber manufacturing process

Info

Publication number
JPS62221456A
JPS62221456A JP61064916A JP6491686A JPS62221456A JP S62221456 A JPS62221456 A JP S62221456A JP 61064916 A JP61064916 A JP 61064916A JP 6491686 A JP6491686 A JP 6491686A JP S62221456 A JPS62221456 A JP S62221456A
Authority
JP
Japan
Prior art keywords
flue gas
exhaust gas
optical fiber
water
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61064916A
Other languages
Japanese (ja)
Other versions
JPH0685889B2 (en
Inventor
Nobuhiro Sakurai
櫻井 信弘
Takeshi Miyazaki
健 宮▲崎▼
Takehiro Tsukasaki
司城 武洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Fuji Kasei Kogyo Co Ltd
Kyowa Kako Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Fuji Kasei Kogyo Co Ltd
Kyowa Kako Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd, Fuji Kasei Kogyo Co Ltd, Kyowa Kako Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP6491686A priority Critical patent/JPH0685889B2/en
Publication of JPS62221456A publication Critical patent/JPS62221456A/en
Publication of JPH0685889B2 publication Critical patent/JPH0685889B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To efficiently treat the solid fine particles and chlorine compound in exhaust gas, by providing an electric precipitator having a conductive dust collection electrode made of a resin and a washing spray for washing said electrode with water and an absorbing tower for removing the chlorine compound in the flue gas. CONSTITUTION:A flue gas 11 from an optical fiber manufacturing process is introduced into a water scattering part 12 where a scattering liquid 14 is sprayed to the flue gas from a spray nozzle 13 while the treated flue gas is guided to a conductive dust collector 15 made of a resin. In the dust collector 15, solid fine particles in the flue gas are charged by the negative ion generated by a discharge electrode 17 by a high voltage generator 16 to be collected by a pipe-shaped dust collection electrode 18. The flue gas 19 after primary treatment is subjected to the gas-liquid contact treatment with the absorbing solution, which is scattered from the water scattering pipe 21 provided to the tower top of an absorbing tower 20, in a packed part to transfer the chlorine compound in the exhaust gas. The flue gas after treatment is guided to an exhaust fan 26 as purified gas to be exhausted to the open air from a stack 27.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は光ファイバ製造工程より排出される排ガスの処
理装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an apparatus for treating exhaust gas discharged from an optical fiber manufacturing process.

従来技術の問題点 近年、情報伝達の手段として、光ファイバケーブルによ
る通信が注目されており、その需要が年々増加している
ことは周知の通りである。しかしながら、かかる光ファ
イバの製造技術は先端技術でもあるため、その排ガス処
理などには様々な問題があり、現状は従来公知の排ガス
処理技術、装置をそのまま通用しており、まだ十分に確
立された技術となるにいたっていないのが現状である。
Problems with the Prior Art In recent years, communication using optical fiber cables has been attracting attention as a means of transmitting information, and it is well known that the demand for it is increasing year by year. However, since the manufacturing technology of such optical fibers is a cutting-edge technology, there are various problems with its exhaust gas treatment, etc. Currently, conventionally known exhaust gas treatment techniques and equipment are used as they are, and they are not yet fully established. The current situation is that it has not yet become a technology.

光ファイバ母材の製造に際しては、所謂CVD法、VA
D法などがよく用いられているが、これらの方法におけ
る反応は次式の通りである。
When manufacturing the optical fiber base material, the so-called CVD method, VA
Method D etc. are often used, and the reaction in these methods is as shown in the following formula.

CVD法 5iC14+02→5i02+2C12GeC14+Q
2 =Ge02 +2Cl2VAD法 5iC14+2H20→S  i  02  +  F
ICIGeC14+2H20−GeO2+HC1従って
、このような方法で光ファイバを製造する工程から排出
される排ガス中には5i02、G e O2などの固体
微粒子やHCI、CI2などの塩素化合物などが含まれ
ている。このため、従来はこれらのガスを処理するため
に、水又はアルカリ液で洗浄している。しかし、上記ガ
スを水洗しただけではHCI、CI2などの除去が不十
分であり、アルカリ液で洗浄した場合には、当該ガス中
の5i02とアルカリ成分が反応し、次式のように洗浄
廃液中で沈澱やろ過しにくい固体が生成されてしまい、
今度は当該廃液の処理が困難となっている。
CVD method 5iC14+02→5i02+2C12GeC14+Q
2 =Ge02 +2Cl2VAD method 5iC14+2H20→S i 02 + F
ICIGeC14+2H20-GeO2+HC1 Therefore, the exhaust gas discharged from the process of manufacturing optical fibers by such a method contains solid particles such as 5i02 and G e O2 and chlorine compounds such as HCI and CI2. For this reason, conventionally, in order to treat these gases, they are washed with water or an alkaline solution. However, simply washing the above gas with water is insufficient to remove HCI, CI2, etc., and when washing with an alkaline solution, the 5i02 in the gas reacts with the alkaline component, and as shown in the following equation, the removal of HCI, CI2, etc. This results in the formation of precipitates and solids that are difficult to filter.
This time, it has become difficult to dispose of the waste liquid.

S i02 +2NaOH−Na2 S i03 +H
20また、上記ガス中の固体微粒子は気相反応で生成さ
れた微細な粒子であり、水洗やアルカリ洗浄を組み合わ
せただけでは固体微粒子の除去が不十分である。特にこ
れらが排風機やダクトへのスケーリ/グの原因となり、
長期的な安定運転を困難なものとしている。
S i02 +2NaOH−Na2 S i03 +H
20 Furthermore, the solid particles in the gas are fine particles generated by a gas phase reaction, and the removal of the solid particles is insufficient only by a combination of water washing and alkaline washing. In particular, these can cause scaling to exhaust fans and ducts,
This makes long-term stable operation difficult.

さらに、水洗やアルカリ洗浄するためのスクラバーから
は大ユの廃水が排出され、これらの処理も問題となって
いる。
Furthermore, scrubbers used for washing with water and alkaline water discharge wastewater from Oyu, and the treatment of these has also become a problem.

発明が解決せんとする問題点 従って、本発明が解決せんとする問題点は、前述の従来
の光ファイバ製造工程からの排ガスの処理技術における
種々の問題点であり、本発明は光ファイバ製造工程より
排出される排ガスを効果的かつ経済的に処理する排ガス
処理装置を提供することを目的とする。
Problems to be Solved by the Invention Therefore, the problems to be solved by the present invention are various problems in the above-mentioned technology for treating exhaust gas from the conventional optical fiber manufacturing process. It is an object of the present invention to provide an exhaust gas treatment device that effectively and economically treats exhaust gases that are emitted.

問題点を解決するための手段 本発明に従えば、光ファイバ製造工程より排出される排
ガス中に微粒状水滴を同伴せしめる手段、微粒状水滴を
同伴した排ガス中の固体微粒子を荷電捕集する導電性の
樹脂製集塵極と該集塵極を適時水洗する洗浄スプレーと
を有する構造の電気鍋u機並びに前記排ガス中の塩素化
合物を除去する吸収塔から構成される光ファイバ製造工
程の排ガス処理装置が提供される。
Means for Solving the Problems According to the present invention, there is provided a means for entraining fine water droplets in the exhaust gas discharged from the optical fiber manufacturing process, and a conductive method for collecting charged solid particles in the exhaust gas accompanied by the fine water droplets. Exhaust gas treatment in the optical fiber manufacturing process, consisting of an electric pot U machine having a structure that includes a plastic dust collection electrode made of plastic and a cleaning spray that washes the dust collection electrode with water from time to time, and an absorption tower that removes chlorine compounds from the exhaust gas. Equipment is provided.

発明の構成及びその作用効果の説明 以下、本発明を更に詳しく説明する。Explanation of the structure of the invention and its effects The present invention will be explained in more detail below.

各種集塵機の内で、最も大きな集塵効率を示すのは電気
集塵機であるが、排ガス中に塩素化合物を含むような場
合には電気4!塵機の耐食性の問題が発生するため、電
気集塵機の前段にアルカリ洗浄によるスクラバーを設置
して腐蝕性のガスを除去した後、電気集塵機を設置する
のが通常とされていた。しかし、前述のように光ファイ
バ製造工程からの排ガスの場合では、前段でアルカリ洗
浄をすると洗浄廃液中に沈澱やろ過しにくい固体を生成
し、廃液処理が極めて困難であるという問題が発生し、
更に水洗やアルカリ洗浄の場合には、多量の廃水が発生
するという問題もあった。従って、従来電気集塵機を光
ファイバ製造工程排ガスに適用することは事実上実施さ
れていなかった。
Among the various types of dust collectors, the electric dust collector shows the highest dust collection efficiency, but if the exhaust gas contains chlorine compounds, the electric dust collector is 4! Because of problems with the corrosion resistance of dust collectors, it was customary to install a scrubber with alkaline cleaning in front of the electrostatic precipitator to remove corrosive gases before installing the electrostatic precipitator. However, as mentioned above, in the case of exhaust gas from the optical fiber manufacturing process, if alkaline cleaning is performed in the first stage, precipitates and solids that are difficult to filter will be generated in the cleaning waste liquid, making it extremely difficult to treat the waste liquid.
Furthermore, in the case of water washing or alkaline washing, there is a problem in that a large amount of waste water is generated. Therefore, it has been virtually impossible to apply an electrostatic precipitator to the exhaust gas from the optical fiber manufacturing process.

そこで、本発明者等は耐食性の電気集塵機を用いた小型
実験機でテストを重ねた結果、次のことを確認した。
Therefore, the inventors of the present invention conducted repeated tests using a small experimental machine using a corrosion-resistant electrostatic precipitator, and as a result, confirmed the following.

■゛光ファイバ製造工程からの排ガス中には腐食性のH
CI、CI2などの塩素化合物が含まれているが、導電
性樹脂の集塵極を使用することにより耐食性については
問題なく運転が可能になり、且つ充分な除去性能を得る
ことができる。
■゛There is corrosive H in the exhaust gas from the optical fiber manufacturing process.
Although it contains chlorine compounds such as CI and CI2, by using a conductive resin dust collecting electrode, it is possible to operate without any problems in terms of corrosion resistance, and sufficient removal performance can be obtained.

■ 集塵極の電位を逃がし易くするため、導電性樹脂の
集塵極は表面を湿潤状態に保つ方が良く、また導電性樹
脂の集塵極表面を湿潤状態に保つためには、電気集塵機
の前段に排ガス中に微粒状の水滴を同伴せしめる手段、
例えば噴霧装置を設置し、排ガス中に噴霧水を同伴させ
ると良い。
■ To make it easier for the potential of the dust collection electrode to escape, it is better to keep the surface of the conductive resin dust collection electrode moist. A means for entraining fine water droplets into the exhaust gas before the
For example, a spray device may be installed to entrain the spray water into the exhaust gas.

■ 集匹極に荷電捕集された固体微粒子は適時洗浄スプ
レーすることにより、容易に流下除去できる。
■ The solid fine particles that are charged and collected on the particle collection electrode can be easily washed down and removed by timely cleaning spraying.

■ 電気集塵機で排ガス中の固体微粒子を捕集し、次い
でこのガス中の塩素化合物を吸収塔でアルカリ洗浄によ
り除去した場合には、洗浄廃液中に沈澱やろ過しにくい
固体が生成しない。
■ If solid particles in exhaust gas are collected with an electrostatic precipitator and then chlorine compounds in this gas are removed by alkaline washing in an absorption tower, no precipitates or solids that are difficult to filter are generated in the washing waste liquid.

■ 集塵極の洗浄スプレーのための洗浄スプレー水のp
Hを4以下にコントロールして運転することにより、洗
浄廃液中に沈澱や濾過しにくい固体が生成するのを防止
できる。
■ Cleaning spray water p for cleaning spray of dust collecting electrode
By controlling H to 4 or less during operation, it is possible to prevent the formation of precipitates and solids that are difficult to filter in the washing waste liquid.

■ 更に、洗浄スプレー水のpHを4以下で運転するこ
とにより、電気集塵機で捕集された固体微粒子の沈降性
が極めて良好となり、従って系外へ廃棄する廃泥の水分
含量を著しく小さくすることが出来るため、系からの廃
水の排出量を減少させることができる。
■Furthermore, by operating the washing spray water at a pH of 4 or less, the solid particles collected by the electrostatic precipitator have an extremely good sedimentation property, and therefore the water content of waste mud to be disposed of outside the system can be significantly reduced. As a result, the amount of waste water discharged from the system can be reduced.

かかる知見に基づいて、本発明者らは添付図に示すよう
な排ガス処理設備を開発し、長期運転で、前記した従来
の排ガス処理技術の問題点を改善し、光ファイバ製造工
程より排出される排ガスを効果的かつ経済的に処理する
ことに成功した。
Based on this knowledge, the present inventors have developed an exhaust gas treatment facility as shown in the attached figure, and have improved the problems of the conventional exhaust gas treatment technology described above through long-term operation, and have been able to reduce the amount of gas emitted from the optical fiber manufacturing process. We succeeded in effectively and economically treating exhaust gas.

以下、添付図を参照して本発明の好ましい実施態様につ
いて更に説明する。
Hereinafter, preferred embodiments of the present invention will be further described with reference to the accompanying drawings.

光ファイバ製造工程より排出された排ガス11を、散水
部12に導入する。この排ガス11はスプレーノズル1
3から散布液14を噴霧された後、電気集塵機15に導
かれる。電気集塵機15では高電圧発生装置16により
荷電された放電極17で発生した負イオンが排ガス中の
固体微粒子を帯電させ、電気力により排ガス中の固体微
粒子は、例えば林立したパイプ状の集塵極18に捕集さ
れる。
Exhaust gas 11 discharged from the optical fiber manufacturing process is introduced into a water sprinkling section 12. This exhaust gas 11 is passed through the spray nozzle 1
After being sprayed with a spray liquid 14 from 3, it is guided to an electrostatic precipitator 15. In the electrostatic precipitator 15, negative ions generated in the discharge electrode 17 charged by the high voltage generator 16 electrify the solid particles in the exhaust gas, and the solid particles in the exhaust gas are collected by the electric force, for example, into a forest of pipe-shaped dust collecting electrodes. Collected on 18th.

本発明において使用する電気集塵機15は、前記した通
り、集塵極18として導電性の樹脂製集塵極、例えば、
導電性PVCパイプなどを使用して、耐蝕性を向上させ
ている。また、()11集された固体微粒子を除去する
だめの装置としては、適時水洗するための洗浄スプレー
装置を有し、例えば散水管より洗浄液を噴霧することに
より容易に流下除去できる。
As described above, the electrostatic precipitator 15 used in the present invention uses a conductive resin dust collecting electrode as the dust collecting electrode 18, for example,
Corrosion resistance is improved by using conductive PVC pipes. Further, as a device for removing the solid particles collected in (11), a cleaning spray device is provided for timely rinsing with water, and the particles can be easily removed by spraying a cleaning liquid from a water sprinkling pipe, for example.

このようにして−次処理された排ガス19は、次の吸収
塔20で塔頂の散水管21から散布される吸収液22と
、例えば充填部23で気液接触させ、排ガス中の塩素化
合物は液中に移行する。このようにして処理された排ガ
スは清浄ガス24として塔頂より、例えば手リミネータ
25などを通して、排風機26に導かれ、スタック27
より大気中へ放出される。
The exhaust gas 19 that has been further treated in this way is brought into gas-liquid contact with the absorption liquid 22 sprayed from the water sprinkler pipe 21 at the top of the next absorption tower 20, for example in the filling section 23, and the chlorine compounds in the exhaust gas are removed. Transfers into liquid. The exhaust gas treated in this way is guided as clean gas 24 from the top of the tower through, for example, a hand liminator 25, to an exhaust fan 26, and then to a stack 27.
released into the atmosphere.

本発明において使用する吸収塔20は、排ガス中の塩素
化合物を洗浄除去するもので、充填塔、棚段塔、洗浄ス
プレー塔などが使用できる。
The absorption tower 20 used in the present invention is for cleaning and removing chlorine compounds in exhaust gas, and can be a packed tower, a tray tower, a cleaning spray tower, or the like.

この吸収塔において11に布される吸収液22は、アル
カリ液で、例えばpHlO〜12程度に調整され、アル
カリ液としてNa0Ilを使用した場合には、塩素化合
物はNaC1として固定される。
The absorption liquid 22 applied to 11 in this absorption tower is an alkaline liquid and is adjusted to have a pH of, for example, about 10 to 12. When Na0Il is used as the alkaline liquid, the chlorine compound is fixed as NaC1.

集塵極18に捕集された固体微粒子は、電気集塵機15
の上部に設置された散水管28より間欠的に噴霧される
洗浄液29により、循環槽30へ洗い流される。固体微
粒子は、循環槽30で上澄液31とスラリー32に分離
され、上澄液31は散布液14、洗浄液29として循環
使用する。なお、本発明に従えば、この洗浄液29のp
Hを4以下、好ましくはθ〜4にすることが必要であり
、このpHが4を超えると循環槽30における洗浄液の
沈降性が不良になる傾向にあり、浮遊物質が発生する場
合があるので好ましくない。また、添付図の態様におい
ては、散布液14を循環槽30より供給しているが、散
布液14のpHはO〜4である必要はなく、別個の供給
源から給液してもよい。
The solid particles collected on the dust collecting electrode 18 are transferred to the electric dust collector 15.
The cleaning liquid 29 is intermittently sprayed from a water sprinkler pipe 28 installed at the top of the tank, and the cleaning liquid 29 is washed into the circulation tank 30. The solid particles are separated into a supernatant liquid 31 and a slurry 32 in a circulation tank 30, and the supernatant liquid 31 is circulated and used as a spray liquid 14 and a cleaning liquid 29. In addition, according to the present invention, the p of this cleaning liquid 29 is
It is necessary to adjust H to 4 or less, preferably θ to 4; if this pH exceeds 4, the settling properties of the cleaning liquid in the circulation tank 30 tend to be poor, and suspended solids may be generated. Undesirable. Further, in the embodiment shown in the attached drawings, the spray liquid 14 is supplied from the circulation tank 30, but the pH of the spray liquid 14 does not need to be O to 4, and may be supplied from a separate supply source.

液中に移行した塩素化合物は吸収塔20下部の循環槽3
3で、pHメータ34により自動的に注入されるアルカ
リ液35で中和される。吸収液22は塩濃度の許すまで
循環使用され、その後に廃液36として排出される。な
お、当該排ガス中にC12を含まないような場合は、散
水部に代えて吸収塔を電気集塵機の入口部に設置するこ
とも可能であり、その場合、散水部は不要である。
The chlorine compounds transferred to the liquid are transferred to the circulation tank 3 at the bottom of the absorption tower 20.
3, it is neutralized with an alkaline solution 35 automatically injected by a pH meter 34. The absorption liquid 22 is recycled until the salt concentration allows, and then discharged as a waste liquid 36. Note that if the exhaust gas does not contain C12, it is also possible to install an absorption tower at the inlet of the electrostatic precipitator instead of the water spraying section, and in that case, the water spraying section is not necessary.

実施例 以下、本発明の好ましい実施例を説明するが、本発明の
範囲をこれに限定するものでないことはいうまでもない
EXAMPLES Preferred examples of the present invention will be described below, but it goes without saying that the scope of the present invention is not limited thereto.

添付図のようなフローに従って、光ファイバ製造工程の
排ガスの処理を行った。
The exhaust gas from the optical fiber manufacturing process was treated according to the flow shown in the attached diagram.

排ガスの流量は6Qn? / min 、運転は24時
間で、湿式電気4J塵機の荷電は20kV、20mA、
吸収塔としてば塔径1000mmφの充填塔を用いた。
Is the exhaust gas flow rate 6Qn? / min, the operation is 24 hours, the charging of the wet electric 4J dust machine is 20 kV, 20 mA,
A packed tower with a tower diameter of 1000 mmφ was used as an absorption tower.

電気集塵機の循環洗浄液のpuはlで、吸収塔の吸収液
のpHは10〜12にコントロールして運転した。
The electrostatic precipitator was operated with the circulating cleaning liquid having a pu of 1 and the absorption tower having a pH of 10 to 12.

各成分の測定結果は第1表に示した通りであった。The measurement results for each component were as shown in Table 1.

第1表の結果より明らかなように、排ガス中の固体微粒
子及び塩素化合物ともに、完全に除去された。なお、廃
液の排出量は2ケ月で僅か2Mであった。
As is clear from the results in Table 1, both solid particles and chlorine compounds in the exhaust gas were completely removed. Note that the amount of waste liquid discharged was only 2M over two months.

第  1  表 ダスト(nu/Nm” )     l 40    
NDHCl (mg/Nm3)   86  ND(注
)測定方法 ダスト: JIS−Z−88081型による円筒ろ紙法
HCl : JIS−に−01060−)リジン法発明
の詳細 な説明したように、本発明に従えば光ファイバ製造工程
からの排ガスを処理するに当り、排ガス中の固体微粒子
と塩素化合物を効率よく処理し、かつ廃水の排出を削減
し、ランニングコストの安い効果的な排ガス処理が達成
される。
Table 1 Dust (nu/Nm”) l 40
NDHCl (mg/Nm3) 86 ND (Note) Measuring method Dust: Thyme filter method according to JIS-Z-88081 type HCl: JIS-01060-) Lysine method As described in detail of the invention, according to the present invention In treating exhaust gas from the optical fiber manufacturing process, solid particles and chlorine compounds in the exhaust gas are efficiently treated, waste water discharge is reduced, and effective exhaust gas treatment with low running costs is achieved.

【図面の簡単な説明】[Brief explanation of drawings]

添付図は本発明の好ましい態様を示す説明図である。 ll・・・光ファイバ製造工程排ガス、12・・・散水
部、13・・・スプレーノズル、15・・・電気集塵機
、17・・・放電極、18・・・集塵極、20・・・吸
収塔、26・・・排風機、27・・・スタック、30・
・・電気集塵機循環槽、33・・・吸収塔循環槽、36
・・・廃液。
The attached drawings are explanatory diagrams showing preferred embodiments of the present invention. ll... Optical fiber manufacturing process exhaust gas, 12... Water spray section, 13... Spray nozzle, 15... Electrostatic precipitator, 17... Discharge electrode, 18... Dust collection electrode, 20... Absorption tower, 26... Exhaust fan, 27... Stack, 30.
...Electric precipitator circulation tank, 33...Absorption tower circulation tank, 36
...Waste liquid.

Claims (1)

【特許請求の範囲】 1、光ファイバ製造工程より排出される排ガス中に微粒
状水滴を同伴せしめる手段、微粒状水滴を同伴した排ガ
ス中の固体微粒子を荷電捕集する導電性の樹脂製集塵極
と該集塵極を適時水洗する洗浄スプレーとを有する構造
の電気集塵機並びに前記排ガス中の塩素化合物を除去す
る吸収塔から構成されることを特徴とする光ファイバ製
造工程の排ガス処理装置。 2、前記集塵極の洗浄スプレー水のpHが4以下である
特許請求の範囲第1項記載の排ガス処理装置。
[Scope of Claims] 1. Means for entraining fine water droplets into the exhaust gas discharged from the optical fiber manufacturing process, a conductive resin dust collector for collecting charged solid particles in the exhaust gas accompanied by the fine water droplets. 1. An exhaust gas treatment device for an optical fiber manufacturing process, comprising an electrostatic precipitator having a structure including an electrode and a cleaning spray for timely washing the dust collection electrode with water, and an absorption tower for removing chlorine compounds from the exhaust gas. 2. The exhaust gas treatment device according to claim 1, wherein the cleaning spray water for the dust collecting electrode has a pH of 4 or less.
JP6491686A 1986-03-25 1986-03-25 Exhaust gas treatment equipment for exhaust gas from optical fiber manufacturing process Expired - Lifetime JPH0685889B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6491686A JPH0685889B2 (en) 1986-03-25 1986-03-25 Exhaust gas treatment equipment for exhaust gas from optical fiber manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6491686A JPH0685889B2 (en) 1986-03-25 1986-03-25 Exhaust gas treatment equipment for exhaust gas from optical fiber manufacturing process

Publications (2)

Publication Number Publication Date
JPS62221456A true JPS62221456A (en) 1987-09-29
JPH0685889B2 JPH0685889B2 (en) 1994-11-02

Family

ID=13271847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6491686A Expired - Lifetime JPH0685889B2 (en) 1986-03-25 1986-03-25 Exhaust gas treatment equipment for exhaust gas from optical fiber manufacturing process

Country Status (1)

Country Link
JP (1) JPH0685889B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104707438A (en) * 2015-03-30 2015-06-17 四川科伦天然药业有限公司 Air dust treatment equipment for decoction piece packaging workshop
CN108672087A (en) * 2018-06-25 2018-10-19 江苏斯德雷特通光光纤有限公司 Electrostatic precipitator in a kind of prefabricated rods extension process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4506093B2 (en) * 2003-04-02 2010-07-21 住友電気工業株式会社 Exhaust gas treatment method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104707438A (en) * 2015-03-30 2015-06-17 四川科伦天然药业有限公司 Air dust treatment equipment for decoction piece packaging workshop
CN108672087A (en) * 2018-06-25 2018-10-19 江苏斯德雷特通光光纤有限公司 Electrostatic precipitator in a kind of prefabricated rods extension process
CN108672087B (en) * 2018-06-25 2024-02-02 江苏斯德雷特光纤科技有限公司 Electrostatic dust collection device in preform extension process

Also Published As

Publication number Publication date
JPH0685889B2 (en) 1994-11-02

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