JPS62218833A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS62218833A JPS62218833A JP6049386A JP6049386A JPS62218833A JP S62218833 A JPS62218833 A JP S62218833A JP 6049386 A JP6049386 A JP 6049386A JP 6049386 A JP6049386 A JP 6049386A JP S62218833 A JPS62218833 A JP S62218833A
- Authority
- JP
- Japan
- Prior art keywords
- receiving plate
- pressure
- pressure receiving
- pressure sensor
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims abstract description 18
- 230000001070 adhesive effect Effects 0.000 claims abstract description 18
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims abstract description 15
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000012779 reinforcing material Substances 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 abstract description 6
- 230000035699 permeability Effects 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000271 Kevlar® Polymers 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004761 kevlar Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000012763 reinforcing filler Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
、−１
本発明は流体の圧力を検出し、電気的出力を得るための
圧力センサに関する。DETAILED DESCRIPTION OF THE INVENTION ,-1 The present invention relates to a pressure sensor for detecting fluid pressure and obtaining an electrical output.
一従３四Ｊ支１−
流体の圧力を検出するためのセンサとして、ブルドン管
やベローズ、ダイヤフラ１１などを用いて流体圧力によ
って生ずる機械的変位を機械的もしくは電気的手段によ
り検出し、あるいは流体力学的に検出する方法が利用さ
れており、更にはダイヤフラム等の面に設けられたスト
レンゲージや甲導体を利用した歪抵抗センサなどを用い
て電気的に検出することも実用化されている。1 - As a sensor for detecting fluid pressure, a Bourdon tube, bellows, diaphragm 11, etc. are used to detect mechanical displacement caused by fluid pressure by mechanical or electrical means, or Dynamic detection methods are used, and electrical detection using strain gauges provided on the surface of diaphragms, strain resistance sensors using shell conductors, etc. has also been put into practical use.
しかし、これらの従来技術は精度や応答性に問題があっ
たり、温度特性が充分でなかったり、また安定性におい
て不満があったり、あるいは高価であるなどそれぞれ一
長一短を有するものであるまた近時、磁歪特性の優れた
アモルファス合金材料が開発されたとこから、これをダ
イヤフラムとして利用して磁気回路を構成し、該磁気回
路にコイルを装着した圧カドランスデューサが提案され
ている（特開昭６Ｏ−２２６３９）。このような圧カド
ランスデューサは、軟磁性体で形成した円形底部とその
一方の面の周縁部から突出した周壁と同じその面の中心
部から突出した円柱とからなるヨークの空間部にコイル
を装着し、周壁の端面と円柱の端面とに接するようにア
モルファス合金の円板を設けたものである。しかし、ア
モルファス合金板としてはその厚さが０．０１〜０．０
５ｍｍというような薄いものしか得られておらず、強度
が低くかつもろいという欠点があり、圧カドランスデュ
ーサとしても測定可能な圧力範囲が限定されるという欠
点を有していた。However, these conventional technologies each have advantages and disadvantages, such as problems with accuracy and response, insufficient temperature characteristics, dissatisfaction with stability, and high cost. Since an amorphous alloy material with excellent magnetostrictive properties has been developed, a pressure quadrature transducer has been proposed in which a magnetic circuit is constructed using this material as a diaphragm, and a coil is attached to the magnetic circuit (Japanese Unexamined Patent Application Publication No. 1983-1991). -22639). This kind of pressure transducer has a coil placed in the space of a yoke, which consists of a circular bottom made of a soft magnetic material, a peripheral wall protruding from the periphery of one side, and a cylinder protruding from the center of the same side. An amorphous alloy disc is installed so as to be in contact with the end face of the peripheral wall and the end face of the cylinder. However, as an amorphous alloy plate, its thickness is 0.01~0.0
Only thin products such as 5 mm have been obtained, which have the drawbacks of low strength and brittleness, and also have the drawback that the measurable pressure range as a pressure transducer is limited.
） ＋ −７ｕ １１
本発明は、従来技術における種々の問題点を解決しろる
、広い圧力範囲にわたって安定に高精度保つことが可能
な圧力センサを提供しようとするものである。) + -7u 11 The present invention aims to provide a pressure sensor that can solve various problems in the prior art and can stably maintain high accuracy over a wide pressure range.
ｕ’ ｒ ’ −′Ｅ
上記の目的は、磁歪特性を有するアモルファス合金層と
弾性金属層とを積層接合してなる受圧板と検出コイルを
装着した磁性体コアとを接続して磁気回路を形成し、該
受圧板の両側面に差圧を加えろるように構成されている
とともに、該受圧板は周辺部に複数の透孔が環状に設け
られ、この透孔部位を充填している接着剤の環状層を介
して表裏両側から環状部材によ、って挟持固定されてい
るか、または該透孔に補強材を貫設してその補強材部位
を充填している接着剤の環状層を介して表裏両側から環
状部材によって挟持固定されている圧力センサによって
達成される。u' r '-'E The above purpose is to form a magnetic circuit by connecting a pressure receiving plate formed by laminating and bonding an amorphous alloy layer having magnetostrictive properties and an elastic metal layer to a magnetic core equipped with a detection coil. The pressure receiving plate is configured to apply a differential pressure to both sides thereof, and the pressure receiving plate is provided with a plurality of annular through holes around the periphery, and an adhesive filling the through holes is provided. An annular layer of adhesive is sandwiched and fixed by an annular member from both the front and back sides through the annular layer of adhesive, or a reinforcing material is inserted through the through hole and the reinforcing material portion is filled with the annular layer of adhesive. This is achieved by a pressure sensor that is clamped and fixed by an annular member from both the front and back sides.
本発明において受圧ダイヤフラムとして用いられる受圧
板は、高い磁歪特性を有するたとえば鉄系のアモルファ
ス合金の薄板と、弾性金属たとえばステンレス鋼、黄銅
、リン青銅等の薄板とを低融点の金属鑞や高分子接着剤
などによって積層接合して形成されたものである。この
場合、アモルファス合金板は積層する前にその表面を適
宜の前処理、たとえば銅メッキなどを施しておくことに
より確実強固な接合が期待できる。またアモルファス合
金板や弾性金属板はそれぞれ複数枚を使用してもよく、
積層順序も限定されない。The pressure-receiving plate used as the pressure-receiving diaphragm in the present invention is made of a thin plate of an iron-based amorphous alloy having high magnetostrictive properties, a thin plate of an elastic metal such as stainless steel, brass, phosphor bronze, etc., and a thin plate of a low-melting metal, such as a metal solder or a polymer. It is formed by laminating and bonding using an adhesive or the like. In this case, reliable and strong bonding can be expected by subjecting the surfaces of the amorphous alloy plates to appropriate pretreatment, such as copper plating, before laminating them. Also, multiple amorphous alloy plates and elastic metal plates may be used.
The stacking order is also not limited.
このような受圧板を圧力センサに組立てるに当っては、
その表裏両側から環状部材によって挟持し、接着剤によ
って固定される。受圧板の周辺の挟持部分には複数個の
透孔が打抜きなどにより環状に設けである。モして受圧
板が円板状であるときは、透孔もその円周にそって円状
に並へて設けられるのが適当である。When assembling such a pressure receiving plate into a pressure sensor,
It is held by annular members from both the front and back sides and fixed with an adhesive. A plurality of through holes are provided in an annular shape by punching or the like in the sandwiched portion around the pressure receiving plate. When the pressure receiving plate is disc-shaped, it is appropriate that the through holes are arranged in a circular manner along the circumference of the pressure receiving plate.
そして接着剤はこの透孔を埋め、表側の環状部材と裏側
の環状部材との隙間を埋めると共に受圧板の面と環状部
材の面とを接着する。The adhesive fills the through hole, fills the gap between the annular member on the front side and the annular member on the back side, and adheres the surface of the pressure receiving plate and the surface of the annular member.
また更には、これらの透孔の一部または全部にリベット
または鳩目の如き補強材を貫設しておいてもよい、補強
材としてはこれらに限らず金属線やカーボンあるいはケ
ブラーなどの高強度繊維などを用い透孔に順次挿通ずる
など、適宜の手段を利用してよい、このように透孔に補
強材を貫設したときは、受圧板周辺部分に施された接着
剤はこれらの補強材を包埋するとともに補強材と透孔と
の隙間をも埋め、環状部材と受圧板との接着結合を一層
強固なものしする。Further, a reinforcing material such as a rivet or an eyelet may be inserted through some or all of these holes.The reinforcing material is not limited to these, but may be a metal wire, carbon, or high-strength fiber such as Kevlar. When reinforcing materials are inserted through the through holes in this way, the adhesive applied around the area of the pressure receiving plate may be inserted into the through holes in sequence. , and also fills the gap between the reinforcing material and the through hole, thereby making the adhesive bond between the annular member and the pressure receiving plate even stronger.
受圧板を両面側から挟持する環状部材の少くとも一方は
、その受圧板に対する面に凸又凹のテーバ状円錐面とな
っていることが好ましい。そしてこれら２個の環状部材
は受圧板を設けない状態で重ね合せたとき、それらは内
側縁付近では相互に接し、外側縁付近では適宜の間隔を
保持しつるように形成されていることが尚好ましい。更
に、これら２個の環状部材の内側縁付近の対向する面は
相補う形状の円錐面に形成されていることが一層好まし
い。このような相補状の円錐面を有する環状部材で挟持
された受圧板は、周辺部分が一様に一方側に軽く折り曲
げられた形状となってその外側方隙間に充填された接着
剤によってで固定されるから、受圧仮には全面にわたっ
て均等な張力が掛った状態となり、結果として本発明の
圧力センサの性能のバラツキを低減させるのに有効であ
る受圧仮と環状部材との間を固定するに用いられる接着
剤は、低融点の金属鑞またはセメントあるいは高分子接
着剤などから適宜のものを選択して用いることができ、
それらには補強用充填剤などを配合してあってもよい。It is preferable that at least one of the annular members that sandwich the pressure receiving plate from both sides has a tapered conical surface with a convex or concave surface facing the pressure receiving plate. Furthermore, when these two annular members are placed one on top of the other without a pressure receiving plate, they are in contact with each other near the inner edge, and are hung with an appropriate distance maintained near the outer edge. preferable. Furthermore, it is more preferable that the opposing surfaces near the inner edges of these two annular members are formed into complementary conical surfaces. The pressure-receiving plate, which is held between these annular members having complementary conical surfaces, has a shape in which the peripheral portion is uniformly bent slightly to one side, and is fixed with an adhesive filled in the outer gap. Therefore, a uniform tension is applied to the entire surface of the pressure sensor, and as a result, it is used to fix the pressure sensor and the annular member, which is effective in reducing variations in performance of the pressure sensor of the present invention. The adhesive used can be appropriately selected from low melting point metal solder, cement, polymer adhesive, etc.
They may also contain reinforcing fillers and the like.
受圧板と組合せて磁気回路を形成する磁性体コアは、た
とえば鉄系の軟磁性材料などで形成されたものが好まし
く、その形状はコ形に形成され、中央部に検出コイルが
嵌装される。コアの両端部は検出コイルの一側方に揃っ
て延長され、その端面が受圧板の一側面たとえば裏側面
に環状部材の内側縁近傍で受圧板の中心をはさんで向い
合うように圧着されるのが好ましい。The magnetic core, which forms a magnetic circuit in combination with the pressure receiving plate, is preferably made of a soft magnetic material such as iron, and is U-shaped, with a detection coil fitted in the center. . Both ends of the core extend along one side of the detection coil, and the end surfaces are crimped to one side of the pressure receiving plate, for example, the back side, near the inner edge of the annular member so as to face each other across the center of the pressure receiving plate. It is preferable to
一層」１例一
本発明の圧力センサの例を第１〜３図によって説明する
。DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of the pressure sensor of the present invention will be explained with reference to FIGS. 1 to 3.
１はセンサケース、２は流体圧力導入口２Ｃをそなえた
第１環状部材、３は受圧板、４は受圧板３を第１環状部
材２との間で挟持する第２環状部材、５はコア、６は検
出コイル、７は蓋体である受圧板３は、たとえば鉄系の
磁歪特性の優れた磁性アモルファス合金の薄板３ａの表
面に銅メッキし、リン青銅の薄板３ｂを両面から接合し
てなるもので（第２図）、円板状に打抜かれ、また更に
周辺部に透孔３ｄを環状に設けである（第３図）。1 is a sensor case, 2 is a first annular member provided with a fluid pressure introduction port 2C, 3 is a pressure receiving plate, 4 is a second annular member that holds the pressure receiving plate 3 between it and the first annular member 2, and 5 is a core. , 6 is a detection coil, and 7 is a lid. The pressure receiving plate 3 is made by plating the surface of a thin plate 3a of iron-based magnetic amorphous alloy with excellent magnetostrictive properties with copper, and joining a thin plate 3b of phosphor bronze from both sides. It is punched out into a disc shape (Fig. 2), and is further provided with an annular through hole 3d at its periphery (Fig. 3).
第１環状部材２と第２環状部材４とは、受圧板３を挟ん
で対向するそれぞれの而２ａと４ａが、それぞれ凹型の
円錐テーパ面と、凸型の円錐テーパ面とを形成しており
、更にその外側にはそれぞれ環状切欠き溝２ｂと４ｂと
を備えでいる。受圧板３の周辺部はそれぞれのテーパ面
２ａと４ａとの間で押圧され、軽く折曲げられた状態で
挟持されており、透孔３ｄはそれぞれの環状切欠き溝２
ｂと４ｂとによって形成された環状空間内に突出した状
態に保持され、その空ｔｍ内にはケースｌに設けられた
孔１ａから注入された硬化性接着剤８たとえばエポキシ
系接着剤などで充填することにより、受圧板３の固定を
−Ｎ確実なものとしている。The first annular member 2 and the second annular member 4 are opposed to each other with the pressure receiving plate 3 in between, and 2a and 4a respectively form a concave conical taper surface and a convex conical taper surface. Furthermore, annular notch grooves 2b and 4b are provided on the outside thereof, respectively. The peripheral part of the pressure receiving plate 3 is pressed between the respective tapered surfaces 2a and 4a and held in a slightly bent state, and the through hole 3d is formed in the respective annular notch groove 2.
b and 4b, and the space tm is filled with a curable adhesive 8, such as an epoxy adhesive, injected from the hole 1a provided in the case l. By doing so, the fixation of the pressure receiving plate 3 is ensured by -N.
コア５は、中央部に検出コイル６を嵌めてありコ形に形
成された両脚先端部５ａ、５ａは受圧板３の裏面（図に
おいて上方面）の側端部に密着するように取付けられ、
蓋体７によって固定されている。The core 5 has a detection coil 6 fitted in its center, and its U-shaped leg tips 5a, 5a are attached so as to be in close contact with the side edges of the back surface (upper surface in the figure) of the pressure receiving plate 3.
It is fixed by a lid body 7.
このように構成された圧力センサは、受圧板３の表面（
図において下方面）には流体圧力導入口２Ｃを経て圧力
がかかり、また裏面には圧力センサの内部空間９内の圧
力すなわち大気圧がかかるが、場合によっては内部空間
９を密封して別の基準圧力の導入口と連通させてもよい
。モして受圧板３が圧力を受けて撓むとき、その程度に
応じて受圧板３の透磁性が変化し、検出コイル６のイン
ダクタンスが変化する。従ってこのインダクタンス変化
を適当な電気的検知回路によって電気出力として取り出
すことができる。The pressure sensor configured in this way has a surface of the pressure receiving plate 3 (
Pressure is applied to the lower side (in the figure) through the fluid pressure inlet 2C, and the pressure inside the internal space 9 of the pressure sensor, that is, atmospheric pressure, is applied to the back side.In some cases, the internal space 9 may be sealed and a separate It may be communicated with the reference pressure inlet. When the pressure receiving plate 3 bends under pressure, the magnetic permeability of the pressure receiving plate 3 changes depending on the degree of bending, and the inductance of the detection coil 6 changes. This inductance change can therefore be extracted as an electrical output by means of a suitable electrical sensing circuit.
第４図は、このような電気回路の一例を示したものであ
り、検出コイル６のインダクタンスの変化をマルチバイ
ブレータ回路の電気出力に変換するよう構成されたもの
である。FIG. 4 shows an example of such an electric circuit, which is configured to convert a change in the inductance of the detection coil 6 into an electric output of a multivibrator circuit.
＋１１六
本発明の圧力センサの受圧板は磁歪特性を有するアモル
ファス合金層と弾性金属層とを積層接合しであるので、
アモルファス合金の強度やもろさと関係なく高い圧力か
ら低い圧力までそれぞれの圧力範囲に適した受圧板を作
ることができる。従って、測定圧力範囲に対応した受圧
板を選択することにより、同一構造を有する神々の容量
の圧力センサを容易に製作することができる。+116 Since the pressure receiving plate of the pressure sensor of the present invention is made by laminating and bonding an amorphous alloy layer having magnetostrictive characteristics and an elastic metal layer,
Regardless of the strength or fragility of the amorphous alloy, it is possible to create a pressure receiving plate suitable for each pressure range from high pressure to low pressure. Therefore, by selecting a pressure receiving plate that corresponds to the measurement pressure range, it is possible to easily manufacture pressure sensors of divine capacity having the same structure.
また受圧板の周辺部には透孔が設けてあり接着剤を介し
て表裏の環状部材で挟持固定するようにしであるので、
受圧板の張力が均等に掛ると共に取り付は状態も常に均
質なものとなっており、出力が安定して品質上バラツキ
の少ない圧力センサとなった。In addition, a through hole is provided in the periphery of the pressure plate so that it can be clamped and fixed by the annular members on the front and back sides using adhesive.
The tension on the pressure-receiving plate is applied evenly, and the mounting condition is always uniform, resulting in a pressure sensor with stable output and little variation in quality.
なおまた、受圧板の周辺部の透孔に補強材を貫設するこ
とにより受圧板の固定が一層確実なものとなり、信頼性
が高いものとなった。Furthermore, by providing the reinforcing material through the through-holes in the peripheral portion of the pressure receiving plate, the fixation of the pressure receiving plate becomes even more reliable, resulting in high reliability.
第１図は本発明の圧力センサの一例の構造を示す図であ
り、（ａ）はその縦断面図、（ｂ）は（ａ）におけるＸ
−Ｘ線にそった横断面図である。
第２図は本発明における受圧板の構造を示す部分断面図
、第３図は受圧板の平面図である。
第４図は圧力センサに結合されるる出力装置の一例の回
路図である。
２ 第１環状部材
３３ 受圧板
４ 第２環状部材
５ コ ア
ロ 検出コイルFIG. 1 is a diagram showing the structure of an example of the pressure sensor of the present invention, in which (a) is a longitudinal sectional view thereof, and (b) is an X in (a).
- a cross-sectional view along the X-ray; FIG. 2 is a partial sectional view showing the structure of the pressure receiving plate in the present invention, and FIG. 3 is a plan view of the pressure receiving plate. FIG. 4 is a circuit diagram of an example of an output device coupled to a pressure sensor. 2 First annular member 33 Pressure receiving plate 4 Second annular member 5 Core Allo detection coil
Claims (4)
層とを積層接合してなる受圧板と検出コイルを装着した
磁性体コアとを接続して磁気回路を形成し、該受圧板の
両側面に差圧を加えうるように構成されているとともに
、該受圧板は周辺部に複数の透孔が環状に設けられ、か
つ該透孔部位を充填している接着剤の環状層を介して表
裏両側から環状部材によって挟持固定されていることを
特徴とする圧力センサ。(1) A magnetic circuit is formed by connecting a pressure receiving plate made by laminating and bonding an amorphous alloy layer having magnetostrictive properties and an elastic metal layer to a magnetic core equipped with a detection coil, and forming a magnetic circuit on both sides of the pressure receiving plate. The pressure receiving plate is configured to be able to apply a differential pressure, and has a plurality of annular holes around its periphery, and is attached to both the front and back sides through an annular layer of adhesive filling the through holes. A pressure sensor characterized in that it is clamped and fixed by an annular member.
圧板に接するように構成されている特許請求の範囲第１
項記載の圧力センサ。(2) The magnetic core is formed in a U-shape, and both ends of the magnetic core are configured to be in contact with the pressure receiving plate.
Pressure sensor described in section.
れている特許請求の範囲第１項記載の圧力センサ。(3) The pressure sensor according to claim 1, wherein the annular member is formed to have a conical holding surface.
層とを積層接合してなる受圧板と検出コイルを装着した
磁性体コアとを接続して磁気回路を形成し、該受圧板の
両側面に差圧を加えるように構成されていると共に、該
受圧板は周辺部に複数の透孔が環状に設けられかつ該透
孔に貫設された補強材を備えていて該補強材部位を充填
している接着剤の環状装を介して表裏両側から環状部材
によって挟持固定されていることを特徴とする圧力セン
サ。(4) A magnetic circuit is formed by connecting a pressure receiving plate formed by laminating and bonding an amorphous alloy layer having magnetostrictive properties and an elastic metal layer to a magnetic core equipped with a detection coil, and forming a magnetic circuit on both sides of the pressure receiving plate. The pressure receiving plate is configured to apply a differential pressure, and the pressure receiving plate is provided with a plurality of annular through holes around the periphery and a reinforcing material penetrated through the through holes to fill the reinforcing material portion. A pressure sensor characterized in that the pressure sensor is clamped and fixed by annular members from both the front and back sides through an annular ring of adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6049386A JPS62218833A (en) | 1986-03-20 | 1986-03-20 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6049386A JPS62218833A (en) | 1986-03-20 | 1986-03-20 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62218833A true JPS62218833A (en) | 1987-09-26 |
Family
ID=13143869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6049386A Pending JPS62218833A (en) | 1986-03-20 | 1986-03-20 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62218833A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7104137B2 (en) | 2004-04-20 | 2006-09-12 | Delphi Technologies, Inc. | Magnetostrictive fluid-pressure sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57111427A (en) * | 1980-12-29 | 1982-07-10 | Aisin Seiki Co Ltd | Pressure sensor |
| JPS5991329A (en) * | 1982-11-16 | 1984-05-26 | Matsushita Electric Ind Co Ltd | Pressure sensor |
| JPS60154132A (en) * | 1984-01-24 | 1985-08-13 | Toshiba Corp | Differential pressure transmitter |
| JPS60260820A (en) * | 1984-06-07 | 1985-12-24 | Ishida Scales Mfg Co Ltd | Production of strain inducing body in load cell |
-
1986
- 1986-03-20 JP JP6049386A patent/JPS62218833A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57111427A (en) * | 1980-12-29 | 1982-07-10 | Aisin Seiki Co Ltd | Pressure sensor |
| JPS5991329A (en) * | 1982-11-16 | 1984-05-26 | Matsushita Electric Ind Co Ltd | Pressure sensor |
| JPS60154132A (en) * | 1984-01-24 | 1985-08-13 | Toshiba Corp | Differential pressure transmitter |
| JPS60260820A (en) * | 1984-06-07 | 1985-12-24 | Ishida Scales Mfg Co Ltd | Production of strain inducing body in load cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7104137B2 (en) | 2004-04-20 | 2006-09-12 | Delphi Technologies, Inc. | Magnetostrictive fluid-pressure sensor |
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