JPS62217600A - Sor apparatus - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Summary] The SOR device is miniaturized by using superconducting electromagnets, etc.
By making the particle orbit plane a vertical plane and arranging more radiation directions of synchrotron radiation in one direction, synchrotron radiation can be used easily.

[Industrial application field]

The present invention uses synchrotron radiation (Synchro tr
onOrbital Radiation, S O
SOR is a type of SOR in which the orbits of charged particles intersect.
Regarding equipment.

SOR devices are extremely strong light sources that emit continuous light ranging from X-rays to infrared light and are highly parallel, so they are expected to be used in a wide range of fields in the future.

However, since conventional SOR devices use normal conduction electromagnets, charged particles are made to orbit in the horizontal direction. One of the reasons for this method is that the radiation emitted radially in the tangential direction of the circumference due to the deflection of charged particles can be used efficiently.

Recently, research and development has been progressing to miniaturize SOR devices by using superconducting electromagnets, and it is thought that the orbits of charged particles will be able to change from horizontal planes to vertical planes.

However, if a conventional SOR device that uses a single magnetic field is simply made vertical, the direction of the synchrotron radiation will be in various directions, such as upward, downward, and horizontal. It is not practical because it cannot be used as a 3D arrangement, and the arrangement is three-dimensional.

The present invention is a S
It is intended to provide an OR device.

[Conventional technology]

3(a) and 3(b) are schematic diagrams of a conventional SOR device, with FIG. 3(a) being a side view and FIG. 3(b) being a sectional view.

In these figures, ◯ indicates a vacuum container of an annular storage ring in which accelerated charged particles such as electrons 3 are stored. There are superconducting electromagnets 2 on both sides of the vacuum vessel 1, and the electrons 3 orbit in a circular orbit under the action of the magnetic field produced by the electromagnets 2, and emit synchrotron radiation in all directions of this orbital plane. Of these, horizontal
Vertical synchrotron radiation 5 is guided to the irradiation sample 6 through a synchrotron radiation channel and utilized.

For example, when installing and using an aligner using X-ray exposure as an irradiation sample, there are three types of incident directions of synchrotron radiation: upward, downward, and horizontal, so the structure of the machine 23 must be suitable for each. This makes it extremely difficult to use. In addition, the irradiation sample position may be arranged three-dimensionally.
That's not a good thing.

[Problem that the invention seeks to solve]

In conventional SOR devices, the direction of emitted light is upward, downward,
Since there are various horizontal directions, it is necessary to change the structure of the synchrotron radiation utilization equipment even for one purpose, which is inconvenient.

[Means for solving problems]

The solution to the above problem is to move high-energy charged particles while being rotated by the magnetic field of a magnet so that the orbits intersect an odd number of times before returning to the original position. This is achieved by the SOR device according to the present invention, which has an even number of magnets, in which magnets with opposite magnetic field directions are adjacent to each other alternately, and the orbital plane of the charged particles is a substantially perpendicular plane. Ru.

[Effect]

In the storage ring of the SOR device, by creating a Möbius circular orbit in which the orbits of charged particles intersect an odd number of times, the radiation direction of the synchrotron radiation from the circular arc orbits at both ends is aligned in one direction, making it convenient for the use of synchrotron radiation. .

〔Example〕

FIGS. 1(a) and 1(b) are schematic diagrams of the SOR device in Example (1) of the present invention, where FIG. 1(a) is a side view, and FIG.
Figure (b) is a cross-sectional view.

In these figures, reference numeral 1 denotes a storage ring vacuum container in the form of a square square, in which two circular arcs are connected by an X-shaped part, and accelerated charged particles, such as electrons 3, are stored inside the vacuum vessel. There are superconducting electromagnets 2 on both sides of each circular part of the vacuum vessel 1, and the electrons 3 move in an arcuate orbit under the action of the magnetic field produced by the electromagnets, and transfer to the magnetic field produced by the other magnet at the X-shaped part. The electrons 3 travel along such a circular orbit in the shape of a letter square, and when the electrons 3 bend in this orbital plane, they emit synchrotron radiation in all tangential directions.

Synchrotron radiation from both arcuate orbit parts near the most expanded orbit 5
Since the radiation is emitted in a substantially downward direction, the vertically downward beam is used as it is, and the inclined beam is used by the mirror 4, so that all the beams are finally applied to the irradiated sample 6 as vertically downward beam 5. When the direction of the synchrotron radiation 5 is aligned with respect to all the irradiated samples 6 in this way, when this irradiated sample 6 is used as an X-ray exposure device, for example, there is an advantage that the conventional device can be used as is except for the light source section. be.

Reference numeral 7 denotes various devices in the ring cross section, which are a particle collision prevention regulator, a particle extraction and intake regulator, and a particle accelerator for energy supply.

FIG. 2 is a schematic side view of the SOR device in Example (2) of the present invention.

This has three orbital intersections and four superconducting electromagnets, and is intended to also utilize the light emitted from the two inner arcuate orbits.

In this way, by using a vertical SOR device with the particle orbital plane perpendicular, it is possible to provide many synchrotron radiation channels while keeping the device installation area small, and the synchrotron radiation direction is aligned, making it easy to use. It is extremely convenient.

〔Effect of the invention〕

As described in detail above, according to the present invention, it is possible to obtain a large amount of vertically emitted light in a small space, and it is easy to use it in various existing devices.

[Brief explanation of drawings]

Figures 1 (a) and (b) are schematic diagrams of the SOR device in Example (1) of the present invention, Figure 2 is a schematic side view of the SOR device in Example (2) of the present invention, and Figure 3 ( a) and (b) are schematic diagrams of a conventional SOR device. In the figure, 1 is a vacuum container, 2 is a magnet, 3 is a charged particle (electron), 4 is a mirror, 5 is a synchrotron radiation beam, 6 is an irradiated sample, and 7 is a bundle of various equipment of the ring cross section in Figure 1 A. (1 to 3 units of SOR equipment)

Claims (1)

[Claims] High-energy charged particles (3) move while being rotated by the magnetic field of the magnet (2) and orbit around the orbit.
An even number of magnets (2) are provided so that the orbits intersect an odd number of times before returning to the original position, and these magnets (2) are arranged such that magnets (2) whose magnetic fields are directed in opposite directions are arranged adjacent to each other alternately. An SOR device characterized in that the orbital plane of the charged particles (3) is a substantially vertical plane.