JPS6221537U - - Google Patents
Info
- Publication number
- JPS6221537U JPS6221537U JP11362585U JP11362585U JPS6221537U JP S6221537 U JPS6221537 U JP S6221537U JP 11362585 U JP11362585 U JP 11362585U JP 11362585 U JP11362585 U JP 11362585U JP S6221537 U JPS6221537 U JP S6221537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- placement plate
- opening
- plate body
- wafer placement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11362585U JPS6221537U (tr) | 1985-07-24 | 1985-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11362585U JPS6221537U (tr) | 1985-07-24 | 1985-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221537U true JPS6221537U (tr) | 1987-02-09 |
Family
ID=30995608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11362585U Pending JPS6221537U (tr) | 1985-07-24 | 1985-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221537U (tr) |
-
1985
- 1985-07-24 JP JP11362585U patent/JPS6221537U/ja active Pending