JPS6221536U - - Google Patents
Info
- Publication number
- JPS6221536U JPS6221536U JP11335685U JP11335685U JPS6221536U JP S6221536 U JPS6221536 U JP S6221536U JP 11335685 U JP11335685 U JP 11335685U JP 11335685 U JP11335685 U JP 11335685U JP S6221536 U JPS6221536 U JP S6221536U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- manipulator
- reversing
- reversed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11335685U JPS6221536U (enExample) | 1985-07-24 | 1985-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11335685U JPS6221536U (enExample) | 1985-07-24 | 1985-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221536U true JPS6221536U (enExample) | 1987-02-09 |
Family
ID=30995082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11335685U Pending JPS6221536U (enExample) | 1985-07-24 | 1985-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221536U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01153445A (ja) * | 1987-12-07 | 1989-06-15 | Yamato Esuron Kk | 合成樹脂製容器 |
| JPH01192130A (ja) * | 1988-01-27 | 1989-08-02 | Tokyo Electron Ltd | 検査装置 |
-
1985
- 1985-07-24 JP JP11335685U patent/JPS6221536U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01153445A (ja) * | 1987-12-07 | 1989-06-15 | Yamato Esuron Kk | 合成樹脂製容器 |
| JPH01192130A (ja) * | 1988-01-27 | 1989-08-02 | Tokyo Electron Ltd | 検査装置 |