JPS6221536U - - Google Patents

Info

Publication number
JPS6221536U
JPS6221536U JP11335685U JP11335685U JPS6221536U JP S6221536 U JPS6221536 U JP S6221536U JP 11335685 U JP11335685 U JP 11335685U JP 11335685 U JP11335685 U JP 11335685U JP S6221536 U JPS6221536 U JP S6221536U
Authority
JP
Japan
Prior art keywords
carrier
wafer
manipulator
reversing
reversed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11335685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11335685U priority Critical patent/JPS6221536U/ja
Publication of JPS6221536U publication Critical patent/JPS6221536U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP11335685U 1985-07-24 1985-07-24 Pending JPS6221536U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11335685U JPS6221536U (enrdf_load_stackoverflow) 1985-07-24 1985-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11335685U JPS6221536U (enrdf_load_stackoverflow) 1985-07-24 1985-07-24

Publications (1)

Publication Number Publication Date
JPS6221536U true JPS6221536U (enrdf_load_stackoverflow) 1987-02-09

Family

ID=30995082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11335685U Pending JPS6221536U (enrdf_load_stackoverflow) 1985-07-24 1985-07-24

Country Status (1)

Country Link
JP (1) JPS6221536U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01153445A (ja) * 1987-12-07 1989-06-15 Yamato Esuron Kk 合成樹脂製容器
JPH01192130A (ja) * 1988-01-27 1989-08-02 Tokyo Electron Ltd 検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01153445A (ja) * 1987-12-07 1989-06-15 Yamato Esuron Kk 合成樹脂製容器
JPH01192130A (ja) * 1988-01-27 1989-08-02 Tokyo Electron Ltd 検査装置

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