JPS62213629A - Inner pressure control device for clean booth - Google Patents

Inner pressure control device for clean booth

Info

Publication number
JPS62213629A
JPS62213629A JP61053681A JP5368186A JPS62213629A JP S62213629 A JPS62213629 A JP S62213629A JP 61053681 A JP61053681 A JP 61053681A JP 5368186 A JP5368186 A JP 5368186A JP S62213629 A JPS62213629 A JP S62213629A
Authority
JP
Japan
Prior art keywords
pressure
clean booth
damper
pressure control
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61053681A
Other languages
Japanese (ja)
Inventor
Ryohei Minowa
箕輪 良平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61053681A priority Critical patent/JPS62213629A/en
Publication of JPS62213629A publication Critical patent/JPS62213629A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)

Abstract

PURPOSE:To enable a stable pressure difference to be maintained between an inner pressure of a clean booth and an indoor pressure by a method wherein a pressure adjusting box to be connected via a first pressure control damper to a clean booth is allowed to communicate with a discharging means and further with an indoor part through a second pressure control damper. CONSTITUTION:An amount of air exceeding a volume of leakage within a clean booth flows into a spacing area within a pressure adjusting box 13 via a first relief damper 14. A spacing area within the box 13 communicates with a room 12 through a second relief damper 15 and the air within the box 13 is discharged to a duct 11 by a blower 10, so that the box 13 is kept at a lower inner pressure than that of the room 12 by an amount of set pressure of the damper 15. Under such a condition as above, if a set pressure P1 of the damper 14 is set slightly lower than a set pressure P2 of the damper 15, it is possible to keep the pressure within the clean room at a pressure a value of (P2-P1) higher than that in the room 12.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、クリーンブースの内圧制御装置に係り、特に
、例えば塗装ブースなどの内圧を、設置室内と一定差圧
に保持し、ブース内の空気と室内の空気との混合を防止
して高品質の塗装を行うクリーンブースの制御に好適な
、クリーンブースの内圧制御装置に関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an internal pressure control device for a clean booth, and in particular, for example, maintains the internal pressure of a painting booth or the like at a constant pressure difference between the inside of the installation room and the inside of the booth. The present invention relates to an internal pressure control device for a clean booth, which is suitable for controlling a clean booth that prevents air from mixing with indoor air and performs high-quality painting.

〔従来の技術〕[Conventional technology]

例えば、高品質の塗装を行うだめの塗装ブースのような
りリーンブースにおいて、クリーンブース内金清浄に保
つために、設置室内より高い圧力にして室内の空気が入
らないようにすると、反対にクリーンブース内の塗装作
業などで発生した溶剤を含んだ空気が室内に漏洩するこ
とになり危険である。したがって、クリーンブース内の
圧力は、室内よりあまり高くできず、僅かに高くなるよ
うに制御する必要がある。
For example, in a lean booth, such as a paint booth used to perform high-quality painting, in order to keep the metal inside the clean booth clean, the pressure inside the clean booth is set higher than that of the installation chamber to prevent air from entering. This is dangerous because air containing solvents generated during interior painting work can leak into the room. Therefore, the pressure inside the clean booth cannot be made much higher than that inside the room, and must be controlled so that it is slightly higher.

従来のクリーンブースの内圧制御装置について、第2図
を参照して説明する。
A conventional internal pressure control device for a clean booth will be explained with reference to FIG.

第2図は、従来のクリーンブースの内圧制御装置の略示
構成図である。
FIG. 2 is a schematic configuration diagram of a conventional internal pressure control device for a clean booth.

第2図において、1は、室12内に設置されたクリーン
ブース、2は、このクリーンブース1内の温度、清浄度
?保持するための空気調和機、3は外気取入れダクト、
4は、外気取入れダクト3の、空気調和機2吸入口部に
設けた外気量調整ダンパ、5は、空気調和機2とクリー
ンブース1との連通部に設けたブース内循環空気量調整
ダンパ□ であり、外気取入れダクト3および外気量調
整ダンパ4をもって空気調和機2に外気を取入れる手段
を構成し、また、空気調和機2およびブース内循環空気
量調整ダンパ5をもってクリーンブース1内の空気を浄
化するための空気調和装置を構成している。
In FIG. 2, 1 is a clean booth installed in the room 12, and 2 is the temperature and cleanliness inside this clean booth 1. Air conditioner for holding, 3 is outside air intake duct,
Reference numeral 4 denotes an outside air volume adjustment damper provided at the intake port of the air conditioner 2 of the outside air intake duct 3, and 5 represents an in-booth circulating air volume adjustment damper □ installed at the communication portion between the air conditioner 2 and the clean booth 1. The outside air intake duct 3 and the outside air amount adjustment damper 4 constitute a means for introducing outside air into the air conditioner 2, and the air conditioner 2 and the booth circulating air amount adjustment damper 5 constitute a means for introducing the outside air into the clean booth 1. It constitutes an air conditioner for purifying the air.

6は、クリーンブース1と室12との連絡通路となる開
口部に設けたエアカーテン装置、7は、エアカーテン用
送風機、8は、クリーンブース1内の圧力を保持するた
めの圧力制御用ダンパに係るリリーフダンパ、9は、こ
のリリーフダンパ8を覆うように設けた排気ガイド、1
0は排気送風機、11は排気ダクトで、これら排気ガイ
ド9、排気送風機10、排気ダクト11をもって、クリ
ーンブース1からの排気、例えば塗装作業で発生した溶
剤を含んだ空気などを室外に排出するための排気手段を
構成している。12は、クリーンブース1を設置した室
である。
Reference numeral 6 indicates an air curtain device provided at an opening that serves as a communication passage between the clean booth 1 and the chamber 12; 7 indicates an air curtain blower; and 8 indicates a pressure control damper for maintaining the pressure within the clean booth 1. The relief damper 9 refers to an exhaust guide 1 provided to cover the relief damper 8.
0 is an exhaust blower, and 11 is an exhaust duct. The exhaust guide 9, the exhaust blower 10, and the exhaust duct 11 are used to discharge exhaust from the clean booth 1, such as air containing solvent generated during painting work, to the outside. It constitutes the exhaust means for. 12 is a room in which the clean booth 1 is installed.

このような構成の従来のクリーンブースの内圧制御装置
において、クリーンブース1は、空気調和機2を介して
室外から空気を取り込み、クリーンブース1の内圧が室
12内より若干高くなるように、外気量調整ダンパ4の
開度によって調整している。
In the conventional clean booth internal pressure control device with such a configuration, the clean booth 1 takes in air from outside via the air conditioner 2, and controls the outside air so that the internal pressure of the clean booth 1 is slightly higher than the inside of the room 12. It is adjusted by the opening degree of the amount adjusting damper 4.

また、クリーンブース1内圧力と室1z内圧力との差圧
は、室12のドア(図示せず)の開閉などにより変化す
るため、クリーンブース1の内圧を室内より若干高く保
持できるよう、リリーフダンパ8を介してクリーンブー
ス1より室12側へ常時排気するように調整される。
In addition, since the differential pressure between the internal pressure of clean booth 1 and the internal pressure of chamber 1z changes due to the opening and closing of the door (not shown) of chamber 12, etc., a relief is installed so that the internal pressure of clean booth 1 can be maintained slightly higher than that of the room. Adjustment is made so that the exhaust is constantly exhausted from the clean booth 1 to the chamber 12 side via the damper 8.

リリーフダンパ8は、クリーンブース1内圧力と室12
内圧力との差圧をダンパーを開く向きに受け、これに対
抗して重錘を閉方向に作動させるようにすることで、ク
リーンブース1内圧力と室12内圧力との差圧を一定に
保持できるように設定圧が定められるものである。
The relief damper 8 controls the internal pressure of the clean booth 1 and the chamber 12.
The differential pressure between the internal pressure of the clean booth 1 and the internal pressure of the chamber 12 is kept constant by receiving the differential pressure between the damper in the opening direction and operating the weight in the closing direction in response. The set pressure is determined so that the pressure can be maintained.

なお、クリーンルームの圧力制御に関する先行技術情報
として、例えば、空気調和・衛生上学会学術論文集(1
984年10月)における、−橋克美ほかによる「垂直
層流式クリーンルームにおける圧力制御」と題する研究
レポートがある。
In addition, as prior art information regarding pressure control in clean rooms, for example, Proceedings of the Japan Society for Air Conditioning and Hygiene (1
There is a research report titled "Pressure Control in Vertical Laminar Flow Clean Rooms" by Katsumi Hashi et al. (October 1984).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来、クリーンブース1内圧力と室12内圧カとの差圧
は、前述のようにリリーフダンパ8のような機構で調整
しているため、リリーフダンパ8の回転軸あるいは摺動
部の摩擦の影響によっては、リリーフダンパに加わるカ
が弱いと円滑に作動せず、差圧の少ない領域での制御が
不安定にならざるをえなかった。
Conventionally, the pressure difference between the internal pressure of the clean booth 1 and the internal pressure of the chamber 12 is adjusted by a mechanism such as the relief damper 8, as described above, so that it is not affected by the friction of the rotating shaft or sliding part of the relief damper 8. In some cases, if the force applied to the relief damper is weak, it does not operate smoothly, and control becomes unstable in areas with low differential pressure.

したがって、リリーフダンパの設定圧をある程度大きく
シ、クリーンブース1内圧力と室12内圧力との差圧が
1〜2 rtrrs H20程度と大きくなると、クリ
ーンブース1の開口部に設けたエアカーテン装置6の風
速を上げることによって気密性能を高めなければならな
かった。
Therefore, if the set pressure of the relief damper is increased to a certain extent and the pressure difference between the internal pressure of the clean booth 1 and the internal pressure of the chamber 12 increases to about 1 to 2 rtrrs H20, the air curtain device 6 installed at the opening of the clean booth 1 The airtight performance had to be improved by increasing the wind speed.

このため、エアカーテン装置6におけるエアカーテン用
送風機7の動力が増加し、がっ、クリーンブース1内の
気流が、高速のエアカーテン流に乱され、クリーンブー
ス内の清浄度維持が困難になる問題があった。
For this reason, the power of the air curtain blower 7 in the air curtain device 6 increases, and the airflow inside the clean booth 1 is disturbed by the high-speed air curtain flow, making it difficult to maintain the cleanliness inside the clean booth. There was a problem.

なお、前述の空気調和・衛生上学会学術論文集における
レポートは、垂直層流式クリーンルームによって、その
気密性と加圧に必要な外気量について試験2行い解析を
加えた研究報告であるが、以下に述べる本発明のように
、クリーンブース内圧力と室内圧力との差圧を微小に制
御する技術手段については開示されていなかった。
The above-mentioned report in the academic journal of the Japan Society for Air Conditioning and Hygiene is a research report in which two tests were conducted and analyzed on the airtightness and amount of outside air required for pressurization using a vertical laminar flow clean room. As with the present invention described in 1., technical means for minutely controlling the differential pressure between the internal pressure of the clean booth and the indoor pressure was not disclosed.

本発明は、前述の問題点を解決するためになされたもの
で、クリーンブース内圧力と室内圧力との差圧を、微小
圧力差で安定させるとともに、クリーンブース開口部の
エアカーテンの流速を低下させて、クリーンブース内の
気流の乱れを少なくし、クリーンブース内の清浄度保持
を容易にするクリーンブースの内圧制御装置の提供を、
その目的としている。
The present invention was made to solve the above-mentioned problems, and it stabilizes the differential pressure between the internal pressure of the clean booth and the indoor pressure with a minute pressure difference, and reduces the flow velocity of the air curtain at the opening of the clean booth. To provide an internal pressure control device for a clean booth that reduces turbulence of airflow within the clean booth and facilitates maintaining cleanliness within the clean booth.
That is the purpose.

〔問題点を解決するための手段〕[Means for solving problems]

前述の問題点を解決するために、本発明に係るクリーン
ブースの内圧制御装置の構成は、室内に設置されたクリ
ーンブースに、このクリーンブース内の空気を浄化する
ための空気調和装置と、この空気調和装置に外気を取入
れる手段と、前記クリーンブースの開口部に設けたエア
カーテン装置と、前記クリーンブース内の圧力を保持す
るための圧力制御用ダンパと、前記クリーンブースから
の排気を室外に排出するための排気手段とを備えたクリ
ーンブースの内圧制御装置において、前記クリーンブー
スに第1の圧力制御用ダンパを介して接続する圧力調整
用ボックスを設け、この圧力調整用ボックスを、前記排
気手段に連通せしめるとともに、第2の圧力制御用ダン
パを介して上記室内に連通するようにしたものである。
In order to solve the above-mentioned problems, the configuration of the internal pressure control device for a clean booth according to the present invention includes a clean booth installed indoors, an air conditioner for purifying the air in the clean booth, and an air conditioner for purifying the air in the clean booth. means for introducing outside air into the air conditioner; an air curtain device provided at the opening of the clean booth; a pressure control damper for maintaining the pressure within the clean booth; In the clean booth internal pressure control device, the clean booth is provided with a pressure adjustment box connected to the clean booth via a first pressure control damper, and the pressure adjustment box is connected to the It communicates with the exhaust means and also communicates with the chamber via a second pressure control damper.

なお付記すると、圧力調整用ボックスは、その内圧が、
第1の圧力制御用ダンパの設定圧だけクリーンブース内
圧力より低く、第2の圧力制御用ダンパの設定圧だけ室
内圧力より低くなるように、前記第1.第2の圧力制御
用ダンパの各設定圧を設定するものとし、かつ、前記第
1の圧力制御用ダンパの設定圧を、前記第2の圧力制御
用ダンパの設定圧より低く設定するものである。
It should be noted that the internal pressure of the pressure adjustment box is
The first. Each set pressure of the second pressure control damper is set, and the set pressure of the first pressure control damper is set lower than the set pressure of the second pressure control damper. .

〔作用〕[Effect]

前述の技術的手段による働きを、本発明を開発した考え
方に合わせて次に述べる。
The operation of the above-mentioned technical means will now be described in accordance with the idea on which the present invention was developed.

圧力制御用ダンパに係るリリーフダンパにおいては、一
定の力(静止摩擦力)を越えたところでは、小さい力の
変化に対しても比例的にダンパが開閉する。そこで、こ
のことに着目して本発明では、室内と第2のリリーフダ
ンパを介して連通ずる圧力調整用ボックスを設け、第2
のリリーフダンパが円滑に作動しうる圧力、す)わち室
内圧力より低い圧力に圧力調整用ボックス内圧力を調整
し、この圧力調整用ボックス内の圧力とクリーンブース
内圧力の差で円滑に作動するように第1のリリーフダン
パを介してクリーンブースと圧力調整用ボックスを接続
するようにしたので、クリーンブース内圧力と室内圧力
との差圧が微少の状態でも安定した圧力制御ができるよ
うになった。
In a relief damper related to a pressure control damper, when a certain force (static friction force) is exceeded, the damper opens and closes proportionally even to a small change in force. Therefore, in the present invention, paying attention to this, a pressure adjustment box that communicates with the interior of the room via the second relief damper is provided, and the second
The pressure inside the pressure adjustment box is adjusted to a pressure that allows the relief damper to operate smoothly, that is, lower than the indoor pressure, and the difference between the pressure inside the pressure adjustment box and the pressure inside the clean booth allows it to operate smoothly. Since the clean booth and the pressure adjustment box are connected through the first relief damper, stable pressure control can be achieved even when the differential pressure between the internal pressure of the clean booth and the indoor pressure is small. became.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図を参照して説明する。 An embodiment of the present invention will be described below with reference to FIG.

第1図は、本発明の一実施例に係るクリーンブースの内
圧制御装置の略示構成図であり、図中、第2図と同一符
号のものは、従来技術と同等部分であるから、その説明
を省略する。
FIG. 1 is a schematic configuration diagram of an internal pressure control device for a clean booth according to an embodiment of the present invention. In the figure, the same reference numerals as in FIG. The explanation will be omitted.

第1図において、13は、クリーンブース1を設置した
室12内に配置された圧力調整用ボックスで、この圧力
調整用ボックス13の一端は、排気送風機10.排気ダ
クト11からなる排気手段に連通している。
In FIG. 1, reference numeral 13 denotes a pressure adjustment box placed in the chamber 12 in which the clean booth 1 is installed, and one end of this pressure adjustment box 13 is connected to an exhaust blower 10. It communicates with exhaust means consisting of an exhaust duct 11.

14は、前記圧力調整用ボックス13とクリーンブース
1との接続部に設けた第1の圧力制御用ダンパに係る第
1のリリーフダンパ、15は、同じく圧力調整用ボック
ス13と室12とを連通ずる部分に設けた第2の圧力制
御用ダンパに係る第2のリリーフダンパである。
14 is a first relief damper related to the first pressure control damper provided at the connection between the pressure adjustment box 13 and the clean booth 1; 15 is a first relief damper that connects the pressure adjustment box 13 and the chamber 12; This is a second relief damper related to the second pressure control damper provided in the communicating portion.

圧力調整用ボックス13は、その内圧が、第1のリリー
フダンパ14の設定圧だけクリーンブース1内圧力より
低く、第2のリリーフダンパ15の設定圧だけ室12内
圧力より低くなるように、第1.第2のリリーフダンパ
14,15の各設定圧を設定しており、かつ、第1のリ
リーフダンパくの設定圧Pze、第2のリリーフダ//
(の設定圧P2より僅かに低く設定するようにしている
The pressure adjustment box 13 is configured such that its internal pressure is lower than the internal pressure of the clean booth 1 by the set pressure of the first relief damper 14 and lower than the internal pressure of the chamber 12 by the set pressure of the second relief damper 15. 1. The set pressures of the second relief dampers 14 and 15 are set, and the set pressure Pze of the first relief damper and the set pressure Pze of the second relief damper are set.
(The pressure is set slightly lower than the set pressure P2.

このように構成したクリーンブースの内圧制御装置の機
能2作用を説明する。
Function 2 of the clean booth internal pressure control device configured as described above will be explained.

本来、クリーンブース1内は、室12内圧力より僅かに
高い内圧として、室12がら空気が入らないようにした
い。
Originally, it is desired that the internal pressure in the clean booth 1 is slightly higher than the internal pressure in the chamber 12 to prevent air from entering the chamber 12.

そこで、開口部に設けたエアカーテン装置6等から洩れ
る空気量よりわずかに多い空気量を常に補充するように
外気量調整ダンパ4を調整し、外気取入れダクト3がら
空気調和機2へ外気を取入れ、空気調和機2およびブー
ス内循環空気量調整ダンパ5によってクリーンブース1
内を循環浄化する。
Therefore, the outside air amount adjustment damper 4 is adjusted so as to constantly replenish the amount of air slightly larger than the amount of air leaking from the air curtain device 6 etc. provided at the opening, and the outside air is introduced into the air conditioner 2 through the outside air intake duct 3. , the clean booth 1 by the air conditioner 2 and the damper 5 for adjusting the amount of circulating air in the booth.
Circulate and purify the inside.

クリーンブース内空気量の、漏れ量を越えた分は、第1
のリリーフダンパ14を介して圧力調整用ボックス13
内空間領域に流入する。
The amount of air inside the clean booth that exceeds the leakage amount is
Pressure adjustment box 13 via relief damper 14 of
It flows into the inner space area.

この圧力調整用ボックス13の空間領域は、第2のリリ
ーフダンパ151r、介して室12内に連通しており、
かつ、圧力調整用ボックス13内の空気は排気送風機1
0により排気ダクト11へ排気されているため、圧力調
整用ボックス13は、第2のリリーフダンパ15の設定
圧だけ室12内圧力より低い内圧に保たれる。
The spatial region of this pressure adjustment box 13 communicates with the inside of the chamber 12 via the second relief damper 151r.
In addition, the air in the pressure adjustment box 13 is supplied to the exhaust blower 1.
0 to the exhaust duct 11, the pressure adjustment box 13 is maintained at an internal pressure lower than the internal pressure of the chamber 12 by the set pressure of the second relief damper 15.

このような状態において、第1のリリーフダンパ14の
設定圧Plを、第2のリリーフダンパ15の設定圧P2
より僅かに低く設定しておけば、クリーンブース1内圧
力を室12内圧力より、P2  Pt分、すなわち両I
J IJ−フダンパの設定圧力の差だけ高くすることが
できる。
In such a state, the set pressure Pl of the first relief damper 14 is changed to the set pressure P2 of the second relief damper 15.
If it is set slightly lower, the internal pressure of clean booth 1 will be lower than the internal pressure of chamber 12 by P2 Pt, that is, both I
It is possible to increase the pressure by the difference in the set pressure of the J IJ-fu damper.

つまり、第1.第2のリリーフダンパ14゜15の設定
圧p、、p2を、それぞれ当該リリーフダンパの作動が
円滑になされる程度の比較的大きな差圧に設定しておき
ながら、両リリーフダンパの設定圧の差Pi  Ptが
クリーンブース1内圧力と室12内圧力との差圧を決め
ることになるので、クリーンブース1内と室12内とを
微小差圧で円滑に制御できることになる。
In other words, the first. While setting the set pressures p, p2 of the second relief dampers 14, 15 to relatively large differential pressures that allow smooth operation of the respective relief dampers, the difference between the set pressures of both relief dampers is Since Pi Pt determines the pressure difference between the pressure inside the clean booth 1 and the pressure inside the chamber 12, the inside of the clean booth 1 and the inside of the chamber 12 can be smoothly controlled with a small pressure difference.

本実施例によれば、クリーンブース1内圧力と室12内
圧力との差圧を、従来のIJ 17−フダンノ(による
装置では制御できなかった0、2〜0.5DH!0の微
小差圧で制御できるようになり、クリーンブース1内の
空気が室12内に洩れることがほとんど無くなり、例え
ば溶剤を使用する塗装ブースなどのクリーンブースの安
全性が高くなる。
According to this embodiment, the differential pressure between the internal pressure of the clean booth 1 and the internal pressure of the chamber 12 can be controlled by a minute differential pressure of 0.2 to 0.5 DH! The air inside the clean booth 1 is almost never leaked into the room 12, and the safety of clean booths such as painting booths using solvents is increased.

また、エアカーテン装置6などで気密にしなけ゛ればな
らないクリーンブース1内の圧力が適正となるのでエア
カーテンの流速を下げることができ、クリーンブース1
内の気流を乱すことが少なくなり、したがって、クリー
ンブース1内の清浄度の保持が容易になり、かつエアカ
ーテン用送風機7の動力も減少する。
In addition, since the pressure inside the clean booth 1, which must be made airtight with the air curtain device 6, etc., becomes appropriate, the flow velocity of the air curtain can be lowered, and the clean booth 1
Disturbance of the airflow inside the clean booth 1 is reduced, therefore, the cleanliness inside the clean booth 1 can be easily maintained, and the power of the air curtain blower 7 is also reduced.

さらに、圧力調整用ボックス13は、室12内とは第2
のIJ IJ−フダンパ15を介して連通ずるのみで、
室12とは独立した空間領域を構成しており、クリーン
ガス1内で発生した溶剤ガスは排気ダクト11を通じて
排気できるので、溶剤ガスが室12内へ漏洩することを
防止できる。
Furthermore, the pressure adjustment box 13 is separated from the inside of the chamber 12 by a second
IJ IJ-Full damper 15 only communicates,
It constitutes a spatial region independent from the chamber 12, and since the solvent gas generated in the clean gas 1 can be exhausted through the exhaust duct 11, leakage of the solvent gas into the chamber 12 can be prevented.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明によれば、クリーンブース内
圧力と室内圧力との差圧を、微小圧力差で安定させると
ともは、クリーンブース開口部のエアカーテンの流速を
低下させて、クリーンブース内の気流の乱れを少なくシ
、クリーンブース内の清浄度保持を容易にするクリーン
ブースの内圧制御装置を提供することができる。
As described above, according to the present invention, the differential pressure between the internal pressure of the clean booth and the indoor pressure is stabilized by a minute pressure difference, and the flow velocity of the air curtain at the opening of the clean booth is reduced, so that the pressure difference between the internal pressure and the indoor pressure is stabilized. It is possible to provide an internal pressure control device for a clean booth that reduces turbulence of airflow within the booth and facilitates maintenance of cleanliness within the clean booth.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例に係るクリーンブースの内
圧制御装置の略示構成図、第2図は、従来のクリーンブ
ースの内圧制御装置の略示構成図である。 1・・・クリーンブース、2・・・空気調和機、3・・
・外気取入れダクト、4・・・外気量調整ダンパ、6・
・・エアカーテン装置、10・・・排気送風機、11・
・・排気ダクト、12・・・室、13・・・圧力調整用
ボックス、14・・・第1のリリーフダンパ、15・・
・第2のリリ(fま711hlるλ 第1国 3−一外気η辷へ東グタト 4・−外気量mセターンlゾ 6−−一エブカーラ゛ン4」1 70−榊気、ta* n−#覧ダクト /Z−−・雀 /3−、を力鋼望PPlホタワス 、俤〜第1aリリーフッ゛ンハ2 ts−11zのリリーフヲ“レノで 第′2− 口
FIG. 1 is a schematic configuration diagram of an internal pressure control device for a clean booth according to an embodiment of the present invention, and FIG. 2 is a schematic configuration diagram of a conventional internal pressure control device for a clean booth. 1...Clean booth, 2...Air conditioner, 3...
・Outside air intake duct, 4...Outside air volume adjustment damper, 6.
...Air curtain device, 10...Exhaust blower, 11.
... Exhaust duct, 12... Chamber, 13... Pressure adjustment box, 14... First relief damper, 15...
・Second lily (f 711hl λ 1st country 3-1 outside air η side to east guttato 4・-outside air amount m set turn l zo 6--1 ebucar line 4'' 1 70-Sakaki air, ta * n -#Viewing duct/Z--・Sparrow/3-, the power steel is desired PPl hotawas, 迤~1a relief stop 2 ts-11z's relief ``reno'' 2nd- mouth

Claims (1)

【特許請求の範囲】 1、室内に設置されたクリーンブースに、このクリーン
ブース内の空気を浄化するための空気調和装置と、この
空気調和装置に外気を取入れる手段と、前記クリーンブ
ースの開口部に設けたエアカーテン装置と、前記クリー
ンブース内の圧力を保持するための圧力制御用ダンパと
、前記クリーンブースからの排気を室外に排出するため
の排気手段とを備えたクリーンブースの内圧制御装置に
おいて、前記クリーンブースに第1の圧力制御用ダンパ
を介して接続する圧力調整用ボックスを設け、この圧力
調整用ボックスを、前記排気手段に連通せしめるととも
に、第2の圧力制御用ダンパを介して上記室内に連通す
るように構成したことを特徴とするクリーンブースの内
圧制御装置。 2、特許請求の範囲第1項記載のものにおいて、圧力調
整用ボックスは、その内圧が、第1の圧力制御用ダンパ
の設定圧だけクリーンブース内圧力より低く、第2の圧
力制御用ダンパの設定圧だけ室内圧力より低くなるよう
に、前記第1、第2の圧力制御用ダンパの各設定圧を設
定するものとし、かつ、前記第1の圧力制御用ダンパの
設定圧を、前記第2の圧力制御用ダンパの設定圧より低
く設定するものであるクリーンブースの内圧制御装置。
[Claims] 1. A clean booth installed indoors, an air conditioner for purifying the air in the clean booth, a means for introducing outside air into the air conditioner, and an opening of the clean booth. internal pressure control of a clean booth, comprising: an air curtain device installed in the clean booth; a pressure control damper for maintaining the pressure within the clean booth; and an exhaust means for discharging exhaust gas from the clean booth to the outside. In the apparatus, a pressure adjustment box is provided that is connected to the clean booth via a first pressure control damper, and the pressure adjustment box is communicated with the exhaust means and is connected to the clean booth via a second pressure control damper. An internal pressure control device for a clean booth, characterized in that the internal pressure control device is configured to communicate with the interior of the room. 2. In the product described in claim 1, the pressure regulating box has an internal pressure that is lower than the clean booth internal pressure by the set pressure of the first pressure controlling damper, and the pressure regulating box is lower than the clean booth internal pressure by the set pressure of the first pressure controlling damper. The set pressures of the first and second pressure control dampers are set so that the set pressure is lower than the indoor pressure, and the set pressure of the first pressure control damper is set to be lower than the indoor pressure by the set pressure. A clean booth internal pressure control device that sets the pressure lower than the set pressure of the pressure control damper.
JP61053681A 1986-03-13 1986-03-13 Inner pressure control device for clean booth Pending JPS62213629A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61053681A JPS62213629A (en) 1986-03-13 1986-03-13 Inner pressure control device for clean booth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61053681A JPS62213629A (en) 1986-03-13 1986-03-13 Inner pressure control device for clean booth

Publications (1)

Publication Number Publication Date
JPS62213629A true JPS62213629A (en) 1987-09-19

Family

ID=12949559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61053681A Pending JPS62213629A (en) 1986-03-13 1986-03-13 Inner pressure control device for clean booth

Country Status (1)

Country Link
JP (1) JPS62213629A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0554117A2 (en) * 1992-01-31 1993-08-04 John George Challenger A clean containment room construction
WO1994019922A2 (en) * 1993-07-16 1994-09-15 KRæFTENS BEKæMPELSE Method and apparatus for performing operations
JP2014121671A (en) * 2012-12-20 2014-07-03 Taikisha Ltd Pressure adjusting chamber system
JP2019195025A (en) * 2018-05-02 2019-11-07 Tdk株式会社 Circulation type efem

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0554117A2 (en) * 1992-01-31 1993-08-04 John George Challenger A clean containment room construction
WO1994019922A2 (en) * 1993-07-16 1994-09-15 KRæFTENS BEKæMPELSE Method and apparatus for performing operations
WO1994019922A3 (en) * 1993-07-16 1994-12-22 Kraeftens Bekaempelse Method and apparatus for performing operations
US5730777A (en) * 1993-07-16 1998-03-24 Peter Mosborg Peterson Method and apparatus for performing operations
JP2014121671A (en) * 2012-12-20 2014-07-03 Taikisha Ltd Pressure adjusting chamber system
JP2019195025A (en) * 2018-05-02 2019-11-07 Tdk株式会社 Circulation type efem
US11515177B2 (en) 2018-05-02 2022-11-29 Tdk Corporation Circulating EFEM

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