JPS6221080U - - Google Patents
Info
- Publication number
- JPS6221080U JPS6221080U JP11333885U JP11333885U JPS6221080U JP S6221080 U JPS6221080 U JP S6221080U JP 11333885 U JP11333885 U JP 11333885U JP 11333885 U JP11333885 U JP 11333885U JP S6221080 U JPS6221080 U JP S6221080U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- bell gear
- vapor phase
- phase growth
- bell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 230000000052 comparative effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985113338U JPH0527502Y2 (https=) | 1985-07-23 | 1985-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985113338U JPH0527502Y2 (https=) | 1985-07-23 | 1985-07-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6221080U true JPS6221080U (https=) | 1987-02-07 |
| JPH0527502Y2 JPH0527502Y2 (https=) | 1993-07-13 |
Family
ID=30995050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985113338U Expired - Lifetime JPH0527502Y2 (https=) | 1985-07-23 | 1985-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527502Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5116693U (https=) * | 1974-07-24 | 1976-02-06 |
-
1985
- 1985-07-23 JP JP1985113338U patent/JPH0527502Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5116693U (https=) * | 1974-07-24 | 1976-02-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527502Y2 (https=) | 1993-07-13 |