JPS62208196A - Fire detector by sampling tube - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a sampling tube type fire detection device equipped with a suction port.

<Prior Art> As a fire detection device using a sampling tube, a smoke tube type smoke detector used in ships and the like as shown in FIG. 2 has been known. This device is installed on each ship p! 111.12.13 is provided with a sampling tube 21.22.23 with one end open, and air containing smoke from each vessel 11.12.13 is provided at the proximal end through this sampling tube 21, 22.23. The scattered light is guided to a smoke detector 30 of a scattered light type to detect a fire.

In addition, 40 is a suction device such as a fan, and 51, 52, and 53 are valves. When a fire is detected, valves 51 to 53 are sequentially closed to detect a ship in which a fire has occurred.

<Problems with the prior art> Such a device, such as a cargo ship, requires a smoke detector with a common constant sensitivity, or if the ship is at a high temperature, could be used by providing a common cooling device to the smoke detector.

Furthermore, if this method is used in a fire detection device in a clean room of a semiconductor factory, etc., the smoke detection section can be set to a high intensity because there is little dust in the clean room itself, so even if there is airflow inside the room, smoke will not be detected. can be detected early, allowing for initial response and reducing damage.

However, manufacturing equipment installed indoors has high internal temperatures and can generate small amounts of combustion products, so a separate small fire detector that can withstand high temperatures is built in to detect fires. Therefore, there was a drawback that the equipment as a whole was expensive.

In view of the above-mentioned drawbacks, the present invention uses a sampling tube system to monitor fires in equipment that generates high temperatures. In this device, a plurality of the above-mentioned sampling tubes are installed, and the other one is installed in a place such as a clean room where there is room temperature and little environmental noise.

〉 Even if the air inside the manufacturing equipment is heated to a high temperature, the cold air flowing into the sampling tube through the suction port installed in the other clean room cools it down by the time it reaches the smoke detection section, causing smoke to disappear. Monitoring and fire detection are performed normally without condensation occurring in the detection unit.

Example of implementation An embodiment of this invention will be explained with reference to FIG.

In the diagram, 1 is a clean room such as a semi-quad factory, 2 is
is semiconductor manufacturing equipment such as a burn-in device that is installed in a clean room 1 and generates high temperature inside, and the air in the clean room 1 is kept in a clean state by a ventilation device 3 and a filter 4. Reference numeral 51 denotes a sampling pipe whose suction port 61 is provided in the return duct of the clean room 1 to monitor the entire chamber 1; 52 is a sampling pipe whose suction port 62 is provided in the manufacturing equipment 2;
．． 52 is connected to a scattered light type smoke detector 8 through a common sampling tube 7.

9 is a suction device such as a fan.

Next, the operation of this device will be explained.

Air in the clean room 1 flows through the suction port 61 and the sampling pipe 51 to the common sampling pipe 7 and then to the smoke detection section. Also, the high temperature air inside the semiconductor manufacturing equipment 2 flows from the suction port 62 through the resampling pipe 52 to the common sampling pipe 7, joins with the air in the cold clean room l, is cooled, and flows to the smoke detection section 8. .

Furthermore, when a fire occurs in the clean room 1 or inside the equipment 2 and smoke is generated, the smoke is transported from the suction port 61 (62) through the sampling pipe 51 (52) and the common sampling pipe 7 to the smoke detection section 8. is detected and a notification is given that a fire has occurred.

In the above apparatus, if the relationship between the suction amounts between the sampling tube 51 of the clean room 1 and the sampling tube 52 of the equipment 2 is such that the former is large and the latter is small, further cooling and sufficient dew condensation prevention effects can be obtained. Further, the smoke detection section 8 can also be of an ionization type.

Effects> Since the device of this invention is configured and operates as described above,
Since fire detection in equipment that generates high temperatures can be performed using a common sampling tube type without providing a cooling device in the device, there is an effect that a fire detection device can be obtained at low cost as a whole.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a fire detection device using a sampling tube according to the present invention, and FIG. 2 is a schematic diagram of a conventional fire detection device. l...Clean room, 2...Semiconductor manufacturing equipment,
3... Ventilation device, 4... Filter, 51.52...
・Sampling tube, 61.62... Suction port, 7...
Common sampling tube, 8... smoke detection section, 9... suction device.

Claims (1)

[Claims] In a device that detects fire by guiding smoke-containing air from a room or equipment to a smoke detection unit through a sampling pipe equipped with a suction port, a plurality of the above-mentioned sampling pipes are provided, one of which is connected to a room or equipment that generates high temperatures. A fire detection device using a sampling tube, which is characterized in that the other is installed in a clean room or other place at room temperature and with little environmental noise.