JPS6220651U - - Google Patents
Info
- Publication number
- JPS6220651U JPS6220651U JP11022585U JP11022585U JPS6220651U JP S6220651 U JPS6220651 U JP S6220651U JP 11022585 U JP11022585 U JP 11022585U JP 11022585 U JP11022585 U JP 11022585U JP S6220651 U JPS6220651 U JP S6220651U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- dust
- electrostatic precipitator
- containing gas
- charging section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012717 electrostatic precipitator Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims 3
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electrostatic Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11022585U JPS6220651U (bg) | 1985-07-18 | 1985-07-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11022585U JPS6220651U (bg) | 1985-07-18 | 1985-07-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6220651U true JPS6220651U (bg) | 1987-02-07 |
Family
ID=30989050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11022585U Pending JPS6220651U (bg) | 1985-07-18 | 1985-07-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6220651U (bg) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0498034A (ja) * | 1990-08-15 | 1992-03-30 | Takasago Thermal Eng Co Ltd | 半導体製造用クリーンルームの海塩粒子汚染防止方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5288873A (en) * | 1976-01-20 | 1977-07-25 | Matsushita Electric Ind Co Ltd | Air cleaner |
-
1985
- 1985-07-18 JP JP11022585U patent/JPS6220651U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5288873A (en) * | 1976-01-20 | 1977-07-25 | Matsushita Electric Ind Co Ltd | Air cleaner |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0498034A (ja) * | 1990-08-15 | 1992-03-30 | Takasago Thermal Eng Co Ltd | 半導体製造用クリーンルームの海塩粒子汚染防止方法 |
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