JPS62206350A - Cold generator - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application J The present invention relates to a cold generation device that can be used in various fields as a substitute for a cooling device using liquid nitrogen or the like.

"Conventional technology" In recent years, in the field of cutting-edge industrial technology, cooling devices using liquid nitrogen, etc. have been frequently used.
So-called MOCVD, in which the layer of S and GaAlAs is reduced layer by layer, with a +1 moat, is being put into practical use. Therefore, in this device, it is safe to sequentially capture the released Ga and S vapors that were not deposited on the S plate. That is, such surplus a
The heat energy must be quickly dissipated by surrounding bars to prevent it from flying out as qi, so such devices are equipped with buffers. The trap is provided with a cooling section filled with oil body nitrogen, and a cold generation device is attached to the cooling section so as to be able to sequentially replenish liquid nitrogen extracted from a cylinder or the like.

[Problems to be Solved by the Invention] However, in a practical device like this, the cooling surface is large and there are many atoms to be trapped, so the consumption of liquid nitrogen is extremely large. Therefore,
There are problems in that the equipment for replenishing liquid nitrogen becomes large-scale and the running costs are high.

Such cryogenic generators using liquid nitrogen are also used in various other fields, such as cooling the n-air insulation chamber of helium liquefaction equipment and the outer a part of helium feed pipes. I'm having a similar problem.

The present invention aims to reliably solve such problems with a unique configuration.

Means for Solving Problem 1 1 In order to achieve the above object, the present invention provides a solution to the desired gas by only circulating a predetermined gas without replenishing the medium that is sequentially consumed as in the case of liquid nitrogen. The structure is such that it is possible to obtain cold temperatures. i.e. 1
The cold generation device of the present invention has one gas delivery stage that delivers heat-radiated high-pressure argon gas, and multiple units that sequentially supply the argon gas from this gas delivery stage to the cold generation end through Ifr heat & thermoelectric. an expansion turbine, a plurality of compressors that sequentially compress the argon gas that has passed through the cold generation end in No. 111 and returns it to the chest gas feeder, and driving the compressor No. 1111 using the rotational power of the expansion turbine. It is characterized by being equipped with one stage of driving.

[Effect 1 With such a configuration, the high-pressure argon gas after gas delivery - discharged from the first stage is 11 iv each.
As it passes through the tension turbine, it expands adiabatically and gradually decreases in temperature, and when the temperature is the lowest, it is supplied to the cold source 79'' end and generates cold. At the end, the low-pressure argon gas that has received heat from an appropriate heat load is boosted in pressure by sequentially passing through each compressor that is driven by utilizing the rotational effect of the IK turbine, and the gas supply 1 The gas is then returned to the stage, and is further pressurized as required by this gas feed r-It, cooled, and sent to the expansion turbine again.

[Human example J An embodiment of the present invention will now be described with reference to the drawings.

This dual-cooling generator 9 has a gas delivery means l for delivering argon gas A, and an argon gas A from this gas delivery means l.
Na expansion turbines 31 to 33 that sequentially adiabatically expand and supply the cold generation end 2 to the cold generation end 2,
A plurality of compressors 41 to 43 sequentially compress the necessary argon gas A and return it to the gas delivery means l, and the compressor 9 utilizes the rotational power of the expansion turbines 31 to 33.
and a driving means 5 for moving the wheels 41 to 43 by 1K.

The gas delivery stage P includes a compressor 6 that compresses argon gas A, and a cooling tower (not shown) or l-
Cooling by exchanging heat with water W supplied from a tap etc. 77
The compressor 6 is driven by a motor 8.

Each of the expansion turbines 31 to 33 has a radial turbine structure in which impellers 91 to 93 are housed in a casing (not shown), and are connected and piped in series. Argon gas A is released from the expansion turbine 31 at the low temperature end.
is supplied to the cold generation end 2.

The cold generation end 2 is composed of a gas passage provided in a bar of NO (: VD, a trap of F), etc., and argon gas A after adiabatic expansion introduced into the gas passage.
This allows the trap to be cooled. Then, the argon gas A that has passed through the cold generator 62 is introduced into the compressor 43 at the low temperature end.

Each of the compressors 41 to 43 is a radial compressor in which blades 11i11+ to 113 are housed in a casing (not shown), and are connected in series with piping, and the drive is transmitted via the stage 5 to the expansion. It is rotated at high speed by the power from the turbines 31 to 33. Argon gas A discharged from the compressor 41 at the high temperature end is returned to the compressor 6 serving as the gas delivery role 1.

*sr=stage 5, Imi 6, 4t, 3 + ~33 impellers 91-9] and the corresponding blades of each compressor 41-43 Ill: 11 + ~l
11 are connected together by drive shafts 121 to 121.

With such a configuration, the heat-radiated high-pressure argon gas A sent out from the gas delivery stage 1 is expanded when it is passed through each of the expansion turbines 31 to 33. In this case, the specific heat ratio K of argon gas A (constant pressure ratio mcp/d volume specific heat C
11, the thermal conductivity of the gas itself is 3.88X 10"cal-am-'sldeg
' (0°C), which is a temperature lower than that of air, so this argon gas A expands by almost 8 degrees by passing through the expansion turbines 31 to 33. The temperature gradually decreases, and when the argon gas A reaches its lowest temperature, it reaches the cold generation end 2.
It is used for cooling MOGVD tiger knobs.

The argon gas A that has received heat due to the cooling of the trap is increased in pressure by sequentially passing through each compressor 43 to 41, and the pressure is increased to the compressor 6 of the gas supply stage 1.
will be returned to. And, with this Combref 6, further 1. After being subjected to IiE, it is cooled by an aftercooler 7, and then sent to an I expansion turbine 31 for circulation. In such a cycle, for example, if the output force of the compressor 6 is 20 ata and the pressure after 1 blow is 1 ata, the temperature at the outlet of the aftercooler is 300 K (27 degrees Celsius), then at the cold generation end 2 Theoretically, it is possible to generate a cold temperature of 90.5K (-182.7℃).Figure 2 shows the T (temperature)-3 (entropy) diagram of this cycle, and the a Points to i correspond to points a to i in Figure 1, respectively.Of course, the above values are based on the assumption that complete adiabatic expansion has occurred, but the adiabatic efficiency may be reduced to some extent. The polytropic exponent n (
-sc = 1.887) is about 1.5, at a pressure ratio of 11I4, it is 110.5 K (
It is possible to generate temperatures as low as -180.8°C. In addition, the pressure at each point is 20a at point a and point b.
ta (Po), c point tea, 4 ata (P2
), 2.7 ata (P+) at point d, 8 points,
1ata (Po) at 1 point, 2ata at g point
(P+'), h point ff14ata (P7'
), the i point is about 8ata (P3°).

Cold can be generated as described in H below, but in this device, the argon gas A is sequentially insulated using multiple expansion turbines 31 to 33, so the cold can be generated. When cooling with liquid nitrogen at the generating end, it is possible to express the temperature at approximately 0 [
I am stationed there. In other words, since argon gas A is a atomic molecule and has a high specific heat ratio of 1.887, and its thermal conductivity is lower than that of helium, it is adiabatically expanded by the III tension turbines 31 to 31. It is easy to generate cold. Therefore, it is possible to realize the liquid nitrogen temperature without using an 8-exchanger or the like. Since this device guides the cold generation end 2 to the desired temperature only by circulating the argon gas A, there is no need to supply a cooling medium such as liquid nitrogen from the outside. , cut off argon gas A, @l
Since the IMIl, ltire and 1t taken out during expansion are used to drive the compressors 41 to 41, the power II+ energy supplied from the outside can be kept to a minimum, thus achieving economical operation. ist'T f
It is @, and running costs can be reduced to a minimum.

Moreover, this device has the expansion turbines 31 to 31 and compressors 41 to 43 configured in an F body, and does not require any other large-scale equipment. It is easy to simplify and downsize I. Furthermore, since argon gas A is easy to handle, the system can be configured and operated in a timely manner.

It should be noted that the single-stripe turbine and compressor are not limited to the radial type, and for example, an axial flow turbine and an axial flow compressor may be used in combination.

Also, its use is of course not limited to cooling MOCVD traps, but can also be used in various devices that require cooling.
11 is IIr function.

Since the present invention is 4U & as described above, the structure W is simple and it is easy to downsize, and moreover, economical continuous rotation is possible and the running cost can be kept low. It is possible to provide a cold generation device that has been longed for.

[Brief explanation of drawings]

Fig. 1 is a system explanatory diagram showing one embodiment of the present invention;
The figure is an explanatory diagram of the operation of the same embodiment. 1... Gas delivery means 2... Cold generation ends 31-33... Expansion turbines 41-41... Compressor 5... Drive-1st stage agent Valve If)? Akazawa-Hiroshi Figure 1

Claims (1)

[Claims] a gas delivery means for delivering heat-radiated high-pressure argon gas; a plurality of expansion turbines that sequentially adiabatically expand the argon gas from the gas delivery means and supply the same to a cold generation end;
A plurality of compressors that sequentially compress the argon gas that has passed through the cold generation end and return it to the gas delivery means, and a drive means that drives the compressors using rotational power of the expansion turbine. Characteristic cold generation device.