JPS62204304U - - Google Patents
Info
- Publication number
- JPS62204304U JPS62204304U JP9278086U JP9278086U JPS62204304U JP S62204304 U JPS62204304 U JP S62204304U JP 9278086 U JP9278086 U JP 9278086U JP 9278086 U JP9278086 U JP 9278086U JP S62204304 U JPS62204304 U JP S62204304U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum level
- degree
- furnace
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000010000 carbonizing Methods 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9278086U JPS62204304U (ko) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9278086U JPS62204304U (ko) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62204304U true JPS62204304U (ko) | 1987-12-26 |
Family
ID=30954793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9278086U Pending JPS62204304U (ko) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62204304U (ko) |
-
1986
- 1986-06-18 JP JP9278086U patent/JPS62204304U/ja active Pending