JPS62203141U - - Google Patents
Info
- Publication number
- JPS62203141U JPS62203141U JP9204686U JP9204686U JPS62203141U JP S62203141 U JPS62203141 U JP S62203141U JP 9204686 U JP9204686 U JP 9204686U JP 9204686 U JP9204686 U JP 9204686U JP S62203141 U JPS62203141 U JP S62203141U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- wafer processing
- conveyor belts
- units
- driving means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9204686U JPS62203141U (enExample) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9204686U JPS62203141U (enExample) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203141U true JPS62203141U (enExample) | 1987-12-25 |
Family
ID=30953387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9204686U Pending JPS62203141U (enExample) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203141U (enExample) |
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1986
- 1986-06-17 JP JP9204686U patent/JPS62203141U/ja active Pending