JPS62203141U - - Google Patents

Info

Publication number
JPS62203141U
JPS62203141U JP9204686U JP9204686U JPS62203141U JP S62203141 U JPS62203141 U JP S62203141U JP 9204686 U JP9204686 U JP 9204686U JP 9204686 U JP9204686 U JP 9204686U JP S62203141 U JPS62203141 U JP S62203141U
Authority
JP
Japan
Prior art keywords
processing apparatus
wafer processing
conveyor belts
units
driving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9204686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9204686U priority Critical patent/JPS62203141U/ja
Publication of JPS62203141U publication Critical patent/JPS62203141U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP9204686U 1986-06-17 1986-06-17 Pending JPS62203141U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9204686U JPS62203141U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9204686U JPS62203141U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Publications (1)

Publication Number Publication Date
JPS62203141U true JPS62203141U (enrdf_load_stackoverflow) 1987-12-25

Family

ID=30953387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9204686U Pending JPS62203141U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Country Status (1)

Country Link
JP (1) JPS62203141U (enrdf_load_stackoverflow)

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