JPS62202768U - - Google Patents

Info

Publication number
JPS62202768U
JPS62202768U JP9154086U JP9154086U JPS62202768U JP S62202768 U JPS62202768 U JP S62202768U JP 9154086 U JP9154086 U JP 9154086U JP 9154086 U JP9154086 U JP 9154086U JP S62202768 U JPS62202768 U JP S62202768U
Authority
JP
Japan
Prior art keywords
source device
evaporation source
crucible
section
shaped cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9154086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9154086U priority Critical patent/JPS62202768U/ja
Publication of JPS62202768U publication Critical patent/JPS62202768U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP9154086U 1986-06-16 1986-06-16 Pending JPS62202768U (US06262066-20010717-C00424.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9154086U JPS62202768U (US06262066-20010717-C00424.png) 1986-06-16 1986-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9154086U JPS62202768U (US06262066-20010717-C00424.png) 1986-06-16 1986-06-16

Publications (1)

Publication Number Publication Date
JPS62202768U true JPS62202768U (US06262066-20010717-C00424.png) 1987-12-24

Family

ID=30952418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9154086U Pending JPS62202768U (US06262066-20010717-C00424.png) 1986-06-16 1986-06-16

Country Status (1)

Country Link
JP (1) JPS62202768U (US06262066-20010717-C00424.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014003046A (ja) * 2012-06-15 2014-01-09 Hitachi Ltd イオン注入方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59203644A (ja) * 1983-05-06 1984-11-17 Mitsubishi Electric Corp 蒸発源用るつぼ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59203644A (ja) * 1983-05-06 1984-11-17 Mitsubishi Electric Corp 蒸発源用るつぼ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014003046A (ja) * 2012-06-15 2014-01-09 Hitachi Ltd イオン注入方法

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