JPS62201937U - - Google Patents
Info
- Publication number
- JPS62201937U JPS62201937U JP9051586U JP9051586U JPS62201937U JP S62201937 U JPS62201937 U JP S62201937U JP 9051586 U JP9051586 U JP 9051586U JP 9051586 U JP9051586 U JP 9051586U JP S62201937 U JPS62201937 U JP S62201937U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- wafer
- pedestal
- metal foil
- brazed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 239000011888 foil Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9051586U JPH0449814Y2 (https=) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9051586U JPH0449814Y2 (https=) | 1986-06-16 | 1986-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62201937U true JPS62201937U (https=) | 1987-12-23 |
| JPH0449814Y2 JPH0449814Y2 (https=) | 1992-11-24 |
Family
ID=30950454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9051586U Expired JPH0449814Y2 (https=) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449814Y2 (https=) |
-
1986
- 1986-06-16 JP JP9051586U patent/JPH0449814Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449814Y2 (https=) | 1992-11-24 |