JPS62201936U - - Google Patents

Info

Publication number

JPS62201936U

JPS62201936U JP9051486U JP9051486U JPS62201936U JP S62201936 U JPS62201936 U JP S62201936U JP 9051486 U JP9051486 U JP 9051486U JP 9051486 U JP9051486 U JP 9051486U JP S62201936 U JPS62201936 U JP S62201936U

Authority

JP

Japan

Prior art keywords

pad

wafer

vacuum

pedestal

peripheral portion

Prior art date

1986-06-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 3
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
• 239000011888 foil Substances 0.000 claims description 2
• 229910001338 liquidmetal Inorganic materials 0.000 claims description 2
• 229910052751 metal Inorganic materials 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims description 2
• GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 238000005219 brazing Methods 0.000 claims 1
• 229910052733 gallium Inorganic materials 0.000 claims 1
• 238000005468 ion implantation Methods 0.000 claims 1
• 238000010884 ion-beam technique Methods 0.000 description 1