JPS62201932U - - Google Patents

Info

Publication number
JPS62201932U
JPS62201932U JP9078586U JP9078586U JPS62201932U JP S62201932 U JPS62201932 U JP S62201932U JP 9078586 U JP9078586 U JP 9078586U JP 9078586 U JP9078586 U JP 9078586U JP S62201932 U JPS62201932 U JP S62201932U
Authority
JP
Japan
Prior art keywords
pin
heater section
treatment apparatus
heat treatment
mounting means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9078586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521875Y2 (US06650917-20031118-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986090785U priority Critical patent/JPH0521875Y2/ja
Publication of JPS62201932U publication Critical patent/JPS62201932U/ja
Application granted granted Critical
Publication of JPH0521875Y2 publication Critical patent/JPH0521875Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986090785U 1986-06-14 1986-06-14 Expired - Lifetime JPH0521875Y2 (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986090785U JPH0521875Y2 (US06650917-20031118-M00005.png) 1986-06-14 1986-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986090785U JPH0521875Y2 (US06650917-20031118-M00005.png) 1986-06-14 1986-06-14

Publications (2)

Publication Number Publication Date
JPS62201932U true JPS62201932U (US06650917-20031118-M00005.png) 1987-12-23
JPH0521875Y2 JPH0521875Y2 (US06650917-20031118-M00005.png) 1993-06-04

Family

ID=30950968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986090785U Expired - Lifetime JPH0521875Y2 (US06650917-20031118-M00005.png) 1986-06-14 1986-06-14

Country Status (1)

Country Link
JP (1) JPH0521875Y2 (US06650917-20031118-M00005.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737848A (en) * 1980-08-19 1982-03-02 Toshiba Corp Heating apparatus for wafer
JPS5749248A (en) * 1980-09-09 1982-03-23 Fujitsu Ltd Substrate heating and retaining device
JPS6176957U (US06650917-20031118-M00005.png) * 1984-10-26 1986-05-23

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737848A (en) * 1980-08-19 1982-03-02 Toshiba Corp Heating apparatus for wafer
JPS5749248A (en) * 1980-09-09 1982-03-23 Fujitsu Ltd Substrate heating and retaining device
JPS6176957U (US06650917-20031118-M00005.png) * 1984-10-26 1986-05-23

Also Published As

Publication number Publication date
JPH0521875Y2 (US06650917-20031118-M00005.png) 1993-06-04

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