JPS62201930U - - Google Patents
Info
- Publication number
- JPS62201930U JPS62201930U JP9036886U JP9036886U JPS62201930U JP S62201930 U JPS62201930 U JP S62201930U JP 9036886 U JP9036886 U JP 9036886U JP 9036886 U JP9036886 U JP 9036886U JP S62201930 U JPS62201930 U JP S62201930U
- Authority
- JP
- Japan
- Prior art keywords
- developing device
- nozzle
- piping
- hole
- photoresist developing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9036886U JPS62201930U (ru) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9036886U JPS62201930U (ru) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201930U true JPS62201930U (ru) | 1987-12-23 |
Family
ID=30950162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9036886U Pending JPS62201930U (ru) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201930U (ru) |
-
1986
- 1986-06-13 JP JP9036886U patent/JPS62201930U/ja active Pending
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