JPS62201929U - - Google Patents
Info
- Publication number
- JPS62201929U JPS62201929U JP9036786U JP9036786U JPS62201929U JP S62201929 U JPS62201929 U JP S62201929U JP 9036786 U JP9036786 U JP 9036786U JP 9036786 U JP9036786 U JP 9036786U JP S62201929 U JPS62201929 U JP S62201929U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- cup
- discharging mechanism
- photoresist
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9036786U JPS62201929U (zh) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9036786U JPS62201929U (zh) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201929U true JPS62201929U (zh) | 1987-12-23 |
Family
ID=30950160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9036786U Pending JPS62201929U (zh) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201929U (zh) |
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1986
- 1986-06-13 JP JP9036786U patent/JPS62201929U/ja active Pending