JPS62201080U - - Google Patents

Info

Publication number
JPS62201080U
JPS62201080U JP8932986U JP8932986U JPS62201080U JP S62201080 U JPS62201080 U JP S62201080U JP 8932986 U JP8932986 U JP 8932986U JP 8932986 U JP8932986 U JP 8932986U JP S62201080 U JPS62201080 U JP S62201080U
Authority
JP
Japan
Prior art keywords
burn
door
chamber
nozzles
rack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8932986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8932986U priority Critical patent/JPS62201080U/ja
Publication of JPS62201080U publication Critical patent/JPS62201080U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP8932986U 1986-06-13 1986-06-13 Pending JPS62201080U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8932986U JPS62201080U (enrdf_load_stackoverflow) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8932986U JPS62201080U (enrdf_load_stackoverflow) 1986-06-13 1986-06-13

Publications (1)

Publication Number Publication Date
JPS62201080U true JPS62201080U (enrdf_load_stackoverflow) 1987-12-22

Family

ID=30948222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8932986U Pending JPS62201080U (enrdf_load_stackoverflow) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPS62201080U (enrdf_load_stackoverflow)

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