JPS62200639U - - Google Patents
Info
- Publication number
- JPS62200639U JPS62200639U JP8872786U JP8872786U JPS62200639U JP S62200639 U JPS62200639 U JP S62200639U JP 8872786 U JP8872786 U JP 8872786U JP 8872786 U JP8872786 U JP 8872786U JP S62200639 U JPS62200639 U JP S62200639U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- wafer cassette
- connecting member
- wall members
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003014 reinforcing effect Effects 0.000 claims description 2
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8872786U JPS62200639U (fr) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8872786U JPS62200639U (fr) | 1986-06-10 | 1986-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62200639U true JPS62200639U (fr) | 1987-12-21 |
Family
ID=30947078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8872786U Pending JPS62200639U (fr) | 1986-06-10 | 1986-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62200639U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009037269A (ja) * | 2008-11-20 | 2009-02-19 | Asahi Kasei Electronics Co Ltd | 大型ペリクル収納容器及びその製造方法 |
| KR100993185B1 (ko) | 2010-03-30 | 2010-11-09 | 이프로링크텍(주) | Ｌｅｄ 공정용 카세트 |
-
1986
- 1986-06-10 JP JP8872786U patent/JPS62200639U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009037269A (ja) * | 2008-11-20 | 2009-02-19 | Asahi Kasei Electronics Co Ltd | 大型ペリクル収納容器及びその製造方法 |
| JP4493711B2 (ja) * | 2008-11-20 | 2010-06-30 | 旭化成イーマテリアルズ株式会社 | 大型ペリクル収納容器及びその製造方法 |
| KR100993185B1 (ko) | 2010-03-30 | 2010-11-09 | 이프로링크텍(주) | Ｌｅｄ 공정용 카세트 |