JPS62198650U - - Google Patents

Info

Publication number
JPS62198650U
JPS62198650U JP8676486U JP8676486U JPS62198650U JP S62198650 U JPS62198650 U JP S62198650U JP 8676486 U JP8676486 U JP 8676486U JP 8676486 U JP8676486 U JP 8676486U JP S62198650 U JPS62198650 U JP S62198650U
Authority
JP
Japan
Prior art keywords
ion source
positioning pin
ion
housing
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8676486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8676486U priority Critical patent/JPS62198650U/ja
Publication of JPS62198650U publication Critical patent/JPS62198650U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8676486U 1986-06-07 1986-06-07 Pending JPS62198650U (US06559137-20030506-C00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8676486U JPS62198650U (US06559137-20030506-C00071.png) 1986-06-07 1986-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8676486U JPS62198650U (US06559137-20030506-C00071.png) 1986-06-07 1986-06-07

Publications (1)

Publication Number Publication Date
JPS62198650U true JPS62198650U (US06559137-20030506-C00071.png) 1987-12-17

Family

ID=30943377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8676486U Pending JPS62198650U (US06559137-20030506-C00071.png) 1986-06-07 1986-06-07

Country Status (1)

Country Link
JP (1) JPS62198650U (US06559137-20030506-C00071.png)

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