JPS62198269U - - Google Patents
Info
- Publication number
- JPS62198269U JPS62198269U JP8638186U JP8638186U JPS62198269U JP S62198269 U JPS62198269 U JP S62198269U JP 8638186 U JP8638186 U JP 8638186U JP 8638186 U JP8638186 U JP 8638186U JP S62198269 U JPS62198269 U JP S62198269U
- Authority
- JP
- Japan
- Prior art keywords
- sputter target
- sintered body
- powder sintered
- densifying
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8638186U JPS62198269U (enExample) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8638186U JPS62198269U (enExample) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62198269U true JPS62198269U (enExample) | 1987-12-17 |
Family
ID=30942632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8638186U Pending JPS62198269U (enExample) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198269U (enExample) |
-
1986
- 1986-06-06 JP JP8638186U patent/JPS62198269U/ja active Pending